CN112025752B - Passive wireless machine snatchs hand based on machinery metamaterial structure - Google Patents
Passive wireless machine snatchs hand based on machinery metamaterial structure Download PDFInfo
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- CN112025752B CN112025752B CN202010932740.4A CN202010932740A CN112025752B CN 112025752 B CN112025752 B CN 112025752B CN 202010932740 A CN202010932740 A CN 202010932740A CN 112025752 B CN112025752 B CN 112025752B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J7/00—Micromanipulators
Abstract
The invention discloses a passive wireless machine grabbing hand based on a mechanical metamaterial structure, which comprises a graphene oxide layer of the mechanical metamaterial structure, a graphene layer of the mechanical metamaterial structure, a capacitor upper electrode plate, a dielectric layer, a capacitor lower electrode plate, a planar inductor, a through hole, a substrate and an anchor area, wherein the graphene layer of the mechanical metamaterial structure is positioned below the graphene oxide layer of the mechanical metamaterial structure, a double-layer mechanical metamaterial structure is positioned on the front surface of the substrate, the center of the mechanical metamaterial structure is provided with a pressure sensitive capacitor consisting of the capacitor upper electrode plate, the dielectric layer and the capacitor lower electrode plate, the capacitor lower electrode plate is connected with the anchor area, and the anchor area penetrates through the through hole to be connected with the planar inductor on the back surface of the substrate Small measurement error, small volume, low power consumption, novel structure and the like.
Description
Technical Field
The invention discloses a passive wireless machine grabbing hand based on a mechanical metamaterial structure, and belongs to the technical field of microelectronic devices.
Background
The robot gripper is an automatic device appearing in the field of modern automatic control, and is widely applied to numerous fields such as mechanical manufacturing, metallurgy, electronics, light industry, ocean development, aerospace, underground mining, military and national defense, disaster relief and rescue, medical service, intelligent building, production automatic control and the like. In recent years, the robot gripper has been gradually miniaturized, modularized, and reconfigurable. The traditional machine grabbing hand can be divided into a hydraulic transmission robot hand, a pneumatic transmission robot hand, a mechanical transmission robot hand, an electric transmission robot hand and the like according to a driving mode, and various driven machine grabbing hands have advantages and disadvantages in the aspects of transmission efficiency, stability, safety, sensitivity, accuracy, size, power consumption, production cost and the like, and are suitable for various different application occasions. In recent years, micro-machine grabbing hands based on MEMS manufacturing technology are proposed at home and abroad, compared with the traditional machine grabbing hands, the micro-machine grabbing hands adopt novel materials and novel structures, and have the advantages of high sensitivity, high precision, high response speed, small size, low power consumption, low cost and the like. With the continuous development of scientific technology, the demand of intelligent mechanical grabbing hands is continuously expanded, and the mutual fusion of various technologies is more and more compact, so that the development prospect of the mechanical grabbing hands is bright.
Disclosure of Invention
The technical problem is as follows: in view of the above requirements, the present invention provides a passive wireless robot gripper based on a mechanical metamaterial structure, which can achieve high sensitivity, high precision, low power consumption and passive wireless sensing, and solve the problems in many aspects such as material, process, reliability, repeatability, versatility and manufacturing cost, thereby providing support and guarantee for implementing the passive wireless robot gripper based on the mechanical metamaterial structure in industrial applications such as industrial control and biomedicine.
The technical scheme is as follows: the passive wireless robot gripping hand based on the mechanical metamaterial structure mainly utilizes the bending deformation of the structure caused by the difference of the thermal expansion coefficients of the double-layer structure of the mechanical metamaterial and the negative Poisson ratio characteristic of the mechanical metamaterial structure, so that the whole structure is heated to generate outward expansion deformation, and the purpose of gripping objects is achieved. The passive wireless robot grabbing hand based on the mechanical metamaterial structure comprises a graphene oxide layer of the mechanical metamaterial structure, a graphene layer of the mechanical metamaterial structure, an upper capacitor electrode plate, a dielectric layer, a lower capacitor electrode plate, a planar inductor, a through hole, a substrate and an anchor area; the graphene layer of the mechanical metamaterial structure is located below the graphene oxide layer of the mechanical metamaterial structure, the double-layer mechanical metamaterial structure is located on the front face of the substrate, the center of the mechanical metamaterial structure is provided with a pressure sensitive capacitor which is composed of a capacitor upper electrode plate, a dielectric layer and a capacitor lower electrode plate, the capacitor lower electrode plate is connected with an anchor area, and the anchor area penetrates through the through hole to be connected with a planar inductor on the back face of the substrate. When an object is placed at the center of the mechanical metamaterial structure mechanical grabbing hand, the capacitance value of the pressure sensitive capacitor is changed under the action of the gravity of the object, and the inductance value of the planar inductor is unchanged, so that the resonance frequency of an LC resonance circuit formed by the pressure sensitive capacitor and the planar inductor is changed, and the detection of the object on the mechanical grabbing hand is realized. Meanwhile, infrared light excitation is applied to the mechanical grabbing hand, and the mechanical grabbing hand is bent towards one side of the graphene oxide layer of the mechanical metamaterial structure based on different thermal expansion coefficients of the mechanical metamaterial double-layer structure, so that grabbing action is generated, and the purpose of grabbing an object is achieved. Because the negative poisson ratio characteristic of the mechanical metamaterial structure, namely the mechanical metamaterial structure is longitudinally stretched and also transversely stretched, the deformation that the whole structure expands outwards is presented, and the function that a machine grabs a hand to grab an object is more diversified. Meanwhile, a passive and wireless signal reading mode is adopted in a matching mode, so that the mechanical grabbing hand has the advantages of high sensitivity, small measurement error, long service life, low power consumption, small size, compatible process, novel structure and the like.
The passive wireless machine grabbing hand based on the mechanical metamaterial structure comprises a graphene oxide layer of the mechanical metamaterial structure, a graphene layer of the mechanical metamaterial structure, an upper capacitor electrode plate, a dielectric layer, a lower capacitor electrode plate, an anchor area, a planar inductor, a through hole and a substrate; the graphene layer of the mechanical metamaterial structure is positioned below the graphene oxide layer of the mechanical metamaterial structure to form a double-layer mechanical metamaterial structure, the double-layer mechanical metamaterial structure is positioned on the front face of the substrate, the center of the mechanical metamaterial structure is provided with a pressure sensitive capacitor, the double-layer mechanical metamaterial structure is composed of a capacitor upper electrode plate positioned on the upper portion, a dielectric layer positioned in the middle portion and a capacitor lower electrode plate positioned on the lower portion, the capacitor lower electrode plate is connected with an anchor area, and the anchor area penetrates through the through hole to be connected with a planar inductor on the back face of the substrate.
The planar shapes of the graphene oxide layer of the mechanical metamaterial structure and the graphene layer of the mechanical metamaterial structure are both bilaterally symmetrical and vertically symmetrical structures, the bilaterally symmetrical structures are two transversely arranged M-shaped structures, and the vertically symmetrical structures are two vertically arranged triangles.
The planar inductor is a square spiral coil positioned on the back surface of the substrate.
The upper electrode plate of the capacitor is made of graphene, carbon nano tube CNT or silver nano wire, and the thickness of the upper electrode plate is 10-50 mu m.
The dielectric layer is made of polydimethylsiloxane PDMS with the thickness of 100-200 μm.
The lower electrode plate of the capacitor is made of graphene, carbon nano tube CNT or silver nano wire, and the thickness of the lower electrode plate is 10-50 mu m.
The substrate can be divided into two types of hard substrates and flexible substrates, wherein the hard substrates are made of silicon, silicon nitride or silicon carbide and the like, and the thickness of the hard substrates is 300-500 mu m; the flexible substrate is made of polyester resin PET, polydimethylsiloxane PDMS or polyethylene naphthalate PEN, and has a thickness of 200-500 μm.
The anchor area is made of metal conductors such as gold, silver, copper and the like, and the thickness of the anchor area is 200-300 mu m.
The invention discloses a use method of a passive wireless machine grabbing hand based on a mechanical metamaterial structure, which comprises the following steps: when an object is placed at the center of a mechanical metamaterial structure machine grabbing hand, the capacitance value of a pressure sensitive capacitor formed by an upper capacitor plate, a dielectric layer and a lower capacitor plate is changed under the action of the gravity of the object, while the inductance value of a planar inductor is unchanged, so that the resonance frequency of an LC resonance circuit formed by the pressure sensitive capacitor and the planar inductor is changed, and the detection of the object on the mechanical grabbing hand is realized by a passive wireless signal reading method; meanwhile, infrared light excitation is applied to a mechanical grabbing hand, and the mechanical grabbing hand is bent towards one side of the graphene oxide layer of the mechanical metamaterial structure based on different thermal expansion coefficients of the double-layer structure of the mechanical metamaterial, so that grabbing action is generated; in addition, because the negative poisson ratio characteristic of the mechanical metamaterial structure, namely the mechanical metamaterial structure is longitudinally stretched and also transversely stretched, the deformation of the whole structure expanding outwards is presented, so that the function of grabbing objects by a machine grabbing hand is more diversified, and the purpose of grabbing the objects is realized.
Has the advantages that: according to the passive wireless machine grabbing hand based on the mechanical metamaterial structure, the precision of the structure size can reach a higher level through a microelectronic processing technology, the size is greatly reduced, and the miniaturization of the machine grabbing hand is favorably realized; the mechanical grabbing hand is based on a mechanical metamaterial structure, the limitation of a traditional grabbing structure is broken through, and the mechanical grabbing hand is high in precision, fast in response speed and strong in reliability by utilizing supernormal physical characteristics such as negative Poisson's ratio of the mechanical metamaterial structure; the invention also adopts a passive wireless sensing technology, breaks through the thought limit of the traditional detection principle, carries out non-contact measurement on the mechanical grabbing hand in a mutual inductance coupling mode, and has high sensitivity, small measurement error and long service life; meanwhile, the passive wireless machine grabbing hand with the mechanical metamaterial structure has the advantages of low cost, small size, low power consumption, compatible process and the like.
Drawings
Fig. 1 is a schematic diagram of a passive wireless robot gripper based on a mechanical metamaterial structure on an upper surface of a substrate.
Fig. 2 is a schematic view of a planar inductor structure on the lower surface of a substrate.
Fig. 3 is a cross-sectional view of a passive wireless robot gripper a-a' based on a mechanical metamaterial structure.
Among them are: the graphene oxide layer comprises a graphene oxide layer 1 with a mechanical metamaterial structure, a graphene layer 2 with a mechanical metamaterial structure, a capacitor upper electrode plate 3, a dielectric layer 4, a capacitor lower electrode plate 5, an anchor area 6, a planar inductor 7, a through hole 8 and a substrate 9.
Detailed Description
The invention is further described below with reference to the accompanying drawings.
Referring to fig. 1, 2 and 3, the invention provides a passive wireless machine grabbing hand based on a mechanical metamaterial structure, which comprises a graphene oxide layer 1 with a mechanical metamaterial structure, a graphene layer 2 with a mechanical metamaterial structure, a capacitor upper electrode plate 3, a dielectric layer 4, a capacitor lower electrode plate 5, an anchor area 6, a planar inductor 7, a through hole 8 and a substrate 9; the graphene layer 2 of the mechanical metamaterial structure is positioned below the graphene oxide layer 1 of the mechanical metamaterial structure to form a double-layer mechanical metamaterial structure, the double-layer mechanical metamaterial structure is positioned on the front surface of a substrate 9, a pressure sensitive capacitor is arranged at the center of the mechanical metamaterial structure and consists of a capacitor upper electrode plate 3 positioned on the upper portion, a dielectric layer 4 positioned in the middle portion and a capacitor lower electrode plate 5 positioned on the lower portion, the capacitor lower electrode plate 5 is connected with an anchor area 6, and the anchor area 6 penetrates through a through hole 8 to be connected with a planar inductor 7 on the back surface of the substrate 9.
The planar shapes of the graphene oxide layer 1 of the mechanical metamaterial structure and the graphene layer 2 of the mechanical metamaterial structure are both bilaterally symmetrical and vertically symmetrical structures, the bilaterally symmetrical structures are two transversely arranged M-shaped structures, and the vertically symmetrical structures are two vertically arranged triangles.
The planar inductor 7 is a square spiral coil located on the back of the substrate 9.
The upper electrode plate 3 of the capacitor is made of graphene, carbon nano tube CNT or silver nano wire, and the thickness of the upper electrode plate is 10-50 mu m.
The dielectric layer 4 is made of polydimethylsiloxane PDMS with a thickness of 100-200 μm.
The lower electrode plate 5 of the capacitor is made of graphene, carbon nano tube CNT or silver nano wire, and the thickness of the lower electrode plate is 10-50 mu m.
The substrate 9 can be divided into two types of hard substrates and flexible substrates, wherein the hard substrates are made of silicon, silicon nitride or silicon carbide and the like, and the thickness of the hard substrates is 300-500 mu m; the flexible substrate is made of polyester resin PET, polydimethylsiloxane PDMS or polyethylene naphthalate PEN, and has a thickness of 200-500 μm.
The anchor region 6 is made of metal conductors such as gold, silver, copper and the like, and the thickness is 200-300 mu m.
The invention discloses a use method of a passive wireless machine grabbing hand based on a mechanical metamaterial structure, which comprises the following steps: the center of the mechanical metamaterial structure mechanical grabbing hand is provided with a pressure sensitive capacitor consisting of an upper capacitor electrode plate 3, a dielectric layer 4 and a lower capacitor electrode plate 5, when an object is placed at the center of the mechanical metamaterial structure mechanical grabbing hand, the capacitance value of the pressure sensitive capacitor is changed due to the gravity action of the object, and the inductance value of a planar inductor 7 is unchanged, so that the resonance frequency of an LC resonance circuit consisting of the pressure sensitive capacitor and the planar inductor 7 is changed, and the detection of the object on the mechanical grabbing hand is realized. At the moment, infrared light excitation is applied to the mechanical grabbing hand, and based on the difference of the thermal expansion coefficients of the mechanical metamaterial double-layer structure, the mechanical grabbing hand bends towards one side of the graphene oxide layer 1 of the mechanical metamaterial structure, so that grabbing action is generated, and the purpose of grabbing an object is achieved. Simultaneously because the negative poisson ratio characteristic of machinery metamaterial structure, also can stretch transversely when machinery metamaterial structure is vertical tensile promptly, present the deformation that the whole structure outwards expanded for the function that snatchs the machine hand and grab the object is more diversified, realizes the purpose of grabbing the object. Meanwhile, a passive and wireless signal reading mode is adopted in a matched mode, so that the machine grabbing hand is high in sensitivity, small in measurement error, long in service life and low in power consumption.
The mechanical grabbing hand is novel in structure, the precision of the structural dimension can reach a higher level through a microelectronic processing technology, and the miniaturization of the mechanical grabbing hand is facilitated; the mechanical grabbing hand is based on a mechanical metamaterial structure, and the mechanical grabbing hand has the advantages of high precision, high response speed and high reliability by utilizing supernormal physical characteristics of a negative Poisson ratio and the like of the mechanical metamaterial structure; the robot grabbing hand further adopts a passive wireless signal reading technology, and non-contact measurement is carried out on the robot grabbing hand in a mutual inductance coupling mode, so that the grabbing hand has the advantages of high sensitivity, small measurement error, long service life and the like.
The passive wireless machine grabbing hand based on the mechanical metamaterial structure is different from other traditional machine grabbing hands, and has the following main characteristics: the mechanical metamaterial structure based on the two-dimensional material has strong flexibility, high thermal conductivity, high expansion coefficient and excellent mechanical performance, so that a mechanical grabbing hand based on the mechanical metamaterial double-layer structure can generate large bending deformation, a good grabbing function is realized, and the performance of a device is improved; the mechanical grabbing hand is detected by adopting a passive wireless signal reading technology, non-contact measurement is directly carried out on the mechanical grabbing hand in a mutual inductance coupling mode, the change of the resonance frequency of the LC resonance circuit is detected, convenience and rapidness are realized, and compared with the traditional mechanical grabbing hand, the output measurement range is larger, and the measurement precision is higher; thirdly, the mechanical grabbing hand adopts a mechanical metamaterial structure, the extraordinary physical characteristics of the mechanical grabbing hand, such as the negative Poisson ratio, enable the functions of the mechanical grabbing hand to be more diversified, and the mechanical grabbing hand is small in size and low in power consumption; fourthly, the mechanical grabbing hand is manufactured without special materials, so that the manufacturing cost is low and the service life is long.
The criteria for distinguishing whether this structure is present are as follows:
(a) the mechanical metamaterial structure with the negative Poisson ratio characteristic is adopted to realize the grabbing action,
(b) and passive wireless signal reading is realized by adopting an LC resonance circuit structure formed by a pressure sensitive capacitor and a planar inductor.
The structure satisfying the above two conditions should be regarded as the passive wireless robot gripper of the structure.
The above description is only a preferred embodiment of the present invention, and the scope of the present invention is not limited to the above embodiment, but equivalent modifications or changes made by those skilled in the art according to the present disclosure should be included in the scope of the present invention as set forth in the appended claims.
Claims (8)
1. The utility model provides a passive wireless machine based on machinery metamaterial structure snatchs hand which characterized in that: the graphene oxide layer comprises a graphene oxide layer (1) with a mechanical metamaterial structure, a graphene layer (2) with a mechanical metamaterial structure, a capacitor upper electrode plate (3), a dielectric layer (4), a capacitor lower electrode plate (5), an anchor area (6), a planar inductor (7), a through hole (8) and a substrate (9); the graphene layer (2) of the mechanical metamaterial structure is positioned below the graphene oxide layer (1) of the mechanical metamaterial structure to form a double-layer mechanical metamaterial structure, the double-layer mechanical metamaterial structure is positioned on the front surface of a substrate (9), a pressure sensitive capacitor is arranged at the center of the mechanical metamaterial structure and consists of a capacitor upper polar plate (3) positioned on the upper portion, a dielectric layer (4) positioned in the middle portion and a capacitor lower polar plate (5) positioned on the lower portion, the capacitor lower polar plate (5) is connected with an anchor area (6), and the anchor area (6) penetrates through a through hole (8) to be connected with a planar inductor (7) on the back surface of the substrate (9);
the planar shapes of the graphene oxide layer (1) of the mechanical metamaterial structure and the graphene layer (2) of the mechanical metamaterial structure are bilaterally symmetrical and vertically symmetrical structures, the bilaterally symmetrical structures are two transversely arranged M-shaped structures, and the vertically symmetrical structures are two vertically arranged triangles.
2. The passive wireless robot gripping hand based on the mechanical metamaterial structure as claimed in claim 1, wherein: the planar inductor (7) is a square spiral coil positioned on the back surface of the substrate (9).
3. The passive wireless robot gripping hand based on the mechanical metamaterial structure as claimed in claim 1, wherein: the upper electrode plate (3) of the capacitor is made of graphene, carbon nano tube CNT or silver nano wire, and the thickness of the upper electrode plate is 10-50 mu m.
4. The passive wireless robot gripping hand based on the mechanical metamaterial structure as claimed in claim 1, wherein: the dielectric layer (4) is made of polydimethylsiloxane PDMS with the thickness of 100-200 μm.
5. The passive wireless robot gripping hand based on the mechanical metamaterial structure as claimed in claim 1, wherein: the lower electrode plate (5) of the capacitor is made of graphene, carbon nano tube CNT or silver nano wire, and the thickness of the lower electrode plate is 10-50 mu m.
6. The passive wireless robot gripping hand based on the mechanical metamaterial structure as claimed in claim 1, wherein: the substrate (9) can be divided into two types of hard substrates and flexible substrates, wherein the hard substrates are made of silicon, silicon nitride, silicon carbide or the like and have the thickness of 300-500 mu m; the flexible substrate is made of polyester resin PET, polydimethylsiloxane PDMS or polyethylene naphthalate PEN, and has a thickness of 200-500 μm.
7. The passive wireless robot gripping hand based on the mechanical metamaterial structure as claimed in claim 1, wherein: the anchor area (6) is made of metal conductors such as gold, silver, copper and the like, and the thickness is 200-300 mu m.
8. The use method of the passive wireless robot gripping hand based on the mechanical metamaterial structure as claimed in claim 1, wherein: when an object is placed at the center of a mechanical metamaterial structure machine grabbing hand, the capacitance value of a pressure sensitive capacitor formed by an upper capacitor electrode plate (3), a dielectric layer (4) and a lower capacitor electrode plate (5) is changed under the action of the gravity of the object, and the inductance value of a planar inductor (7) is not changed, so that the resonance frequency of an LC resonance circuit formed by the pressure sensitive capacitor and the planar inductor (7) is changed, and the detection of the object on the mechanical grabbing hand is realized by a passive wireless signal reading method; meanwhile, infrared light excitation is applied to a mechanical grabbing hand, and the mechanical grabbing hand is bent towards one side of the graphene oxide layer (1) of the mechanical metamaterial structure based on different thermal expansion coefficients of the double-layer structure of the mechanical metamaterial, so that grabbing action is generated; in addition, because the negative poisson ratio characteristic of the mechanical metamaterial structure, namely the mechanical metamaterial structure is longitudinally stretched and also transversely stretched, the deformation of the whole structure expanding outwards is presented, so that the function of grabbing objects by a machine grabbing hand is more diversified, and the purpose of grabbing the objects is realized.
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| CN108406839A (en) * | 2018-02-28 | 2018-08-17 | 吉林大学 | A kind of integrated form joint prosthesis and its application based on the modification of laser local |
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| CN109347455A (en) * | 2018-10-22 | 2019-02-15 | 北京航空航天大学 | Graphene resonant mode analog-digital converter |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2016179245A1 (en) * | 2015-05-04 | 2016-11-10 | The Florida State University Research Foundation, Inc. | Negative poisson ratio piezoresistive sensor and method of manufacture |
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| CN103148970A (en) * | 2013-02-27 | 2013-06-12 | 东南大学 | Passive wireless pressure sensor based on flexible substrates |
| CN108406839A (en) * | 2018-02-28 | 2018-08-17 | 吉林大学 | A kind of integrated form joint prosthesis and its application based on the modification of laser local |
| CN109347455A (en) * | 2018-10-22 | 2019-02-15 | 北京航空航天大学 | Graphene resonant mode analog-digital converter |
| CN109291042A (en) * | 2018-11-15 | 2019-02-01 | 中国地质大学（武汉） | Three-dimensional porous graphene humanoid robot Dextrous Hand |
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