CN111307326A - Temperature sensor, temperature measurement system and measurement method - Google Patents
Temperature sensor, temperature measurement system and measurement method Download PDFInfo
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- G01K11/3206—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using changes in transmittance, scattering or luminescence in optical fibres at discrete locations in the fibre, e.g. using Bragg scattering
- G01K11/3213—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using changes in transmittance, scattering or luminescence in optical fibres at discrete locations in the fibre, e.g. using Bragg scattering using changes in luminescence, e.g. at the distal end of the fibres
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Abstract
An optical fiber temperature sensor based on a diamond NV color center comprises an optical fiber, a microwave transmission antenna and a diamond containing the NV color center, wherein the optical fiber is used for transmitting exciting light and collecting fluorescence emitted by the NV color center; the microwave transmission antenna is a copper wire which surrounds the optical fiber ceramic ferrule and is used for transmitting microwaves to control the ground state energy level of the NV color center so as to perform optical detection magnetic resonance; and diamond containing NV color centers is positioned on the end face of the optical fiber, and the temperature change can cause the change of the ground state energy level of the NV color centers, so that the diamond is used for temperature sensing. The sensor has simple structure and strong practicability, can realize high temperature detection sensitivity, is not influenced by magnetic field noise and microwave jitter in the environment during detection, and embodies strong robustness. Diamond as the primary sensing element has a high thermal conductivity in itself, enabling the present invention to respond to temperature changes on the order of milliseconds.
Description
Technical Field
The invention relates to the field of optical fiber fluorescence sensing, in particular to an optical fiber temperature sensor based on a diamond NV color center, a temperature measuring system and a measuring method.
Background
The development of optical fibers has promoted various technological innovations in recent years, such as optical fiber communication, optical fiber sensing and the like, and the lives of people are changed at all times. The optical fiber sensor is researched and applied in the aspects of measuring physical quantities such as displacement, vibration, rotation, pressure, bending, speed, acceleration, magnetic field, voltage, humidity, temperature, sound field, PH value, strain and the like, mainly because the optical fiber has very excellent performance, and as for the material, the optical fiber has the performance of resisting electromagnetic and atomic radiation interference, the mechanical performance of thin diameter, soft quality and light weight, and the electrical performance of insulation and no induction; chemical properties of water resistance, high temperature resistance and corrosion resistance; in the aspect of optical transmission, the intensity, the phase, the frequency, the polarization state and the like of light transmitted in the optical fiber can be directly or indirectly measured, and the optical fiber also shows large broadband, large capacity and long-distance transmission and can realize multi-parameter, distributed and low-energy-consumption sensing in an optical information system.
For temperature sensing, the current optical fiber-based temperature sensing mainly utilizes two principles, namely that the temperature changes the refractive index of an optical fiber material and then changes the properties of the polarization state and the like of transmitted light, and secondly that the absorption spectrum of a special substance doped in the optical fiber generates blue shift or red shift along with the temperature. Various optical fiber temperature sensors have been developed based on these two principles, however, most sensors have several problems, namely, the dependence on the material performance is high, and the optical fiber is bent, and the temperature measurement is affected by the twisting, thereby limiting the application range. In summary, the properties and morphology of the optical fiber play a critical role for temperature measurement, also because instability and uncertainty in the measurement process are factors that must be considered; on the other hand, the optical fiber is used as a core part of the sensor, temperature measurement and scanning with high spatial resolution are difficult to realize, and the sensor of the type often cannot provide high measurement sensitivity, so that the requirements of higher-precision experiments and application cannot be met.
In recent years, research on the NV color center of diamond opens up infinite possibility in the field of quantum sensing, particularly in the aspect of temperature measurement, a detection method mainly based on ODMR is developed, the detection sensitivity below mK is realized, but the technologies are all based on a confocal optical path system, and the practicability is difficult to be realized.
Disclosure of Invention
Accordingly, the present invention is directed to a diamond NV colour center based optical fiber temperature sensor and temperature measuring system, which are designed to solve at least one of the above problems.
To achieve the above objects, as one aspect of the present invention, there is provided an optical fiber temperature sensor based on NV color center of diamond, comprising an optical fiber, a microwave transmission antenna and a diamond having NV color center, wherein,
an optical fiber for transmitting the excitation light and collecting the fluorescence emitted by the NV color center;
the microwave transmission antenna is a copper wire which surrounds the optical fiber ceramic ferrule and is used for transmitting microwaves to control the ground state energy level of the NV color center so as to perform optical detection magnetic resonance;
and diamond containing NV color centers is positioned on the end face of the optical fiber, and the temperature change can cause the change of the ground state energy level of the NV color centers, so that the diamond is used for temperature sensing.
Wherein the diamond is in a block shape or a granular shape, and the growth mode is gas phase chemical deposition or high temperature and high pressure preparation.
Wherein the optical fiber is a bare fiber (without a ferrule) or a fiber containing a cladding, a single mode fiber or a multimode fiber.
Wherein changing the size of the diamond can accommodate different spatial resolution requirements.
As another aspect of the present invention, there is provided a temperature measurement system of a fiber optic temperature sensor based on a diamond NV colour center, comprising a sensing module, a fluorescence excitation and collection module, a signal processing and analysis module and a temperature scanning measurement module, wherein,
a sensing module comprising an optical fiber temperature sensor as described above, for converting a temperature change into a fluorescence intensity change emitted by the NV colour center;
the fluorescence excitation and collection module comprises a laser, a double-color sheet, an optical fiber coupler, a multimode optical fiber, an optical filter and a photoelectric detector, is used for exciting an NV color center and collecting fluorescence, and converts an optical signal into an electric signal;
the signal processing and analyzing module comprises a microwave source and a phase-locked amplifier and is used for extracting temperature change information from the electric signal output by the photoelectric detector;
and the temperature scanning and measuring module comprises a stepping motor and an intelligent display end and is used for scanning temperature and displaying temperature information.
The temperature measurement system can be applied to chip temperature measurement.
As a further aspect of the present invention, there is provided a method of temperature measurement using the temperature measurement system as described above, comprising the steps of:
laser generated by a laser is reflected by the bicolor sheet and enters the multimode optical fiber comprising the diamond through the optical fiber coupler, then the NV color center is excited, emitted fluorescence is collected by the same optical fiber and is coupled into the other multimode optical fiber through the bicolor sheet and the filter, and finally red fluorescence is detected by the photoelectric detector;
the microwave source generates microwaves with modulated frequency, and simultaneously, a radio frequency signal output by the microwave source is used as a reference signal of the phase-locked amplifier; the modulated microwave can modulate the fluorescence emitted by the NV color center, and the fluorescence is received by the photoelectric detector and finally serves as an input signal of the phase-locked amplifier; then, sweeping the microwave center frequency, and recording an output signal of the phase-locked amplifier to obtain the frequency-modulated ODMR; setting the central frequency of the microwave as f, wherein the phase-locked amplifier has the maximum response to the temperature change, and the external temperature change directly causes the linear change of the phase-locked signal within a certain range, so that the external temperature information can be calculated;
placing an object to be detected on a stepping motor, and fixing a detector on a three-dimensional adjusting frame; before temperature detection and scanning, the center of the microwave is adjusted to f, so that the signal output by the phase-locked amplifier is 0, the movement of the stepping motor, data recording and real-time processing can be controlled through self-made temperature scanning software, and the scanned temperature information can be displayed on a computer or a screen in real time.
When the central frequency of the microwave is fixed at f, the frequency modulation depth is 1.6-2MHz, and the microwave power P is in the range of 22-27dbm, the quantum thermometer can provide the maximum detection sensitivity; at this time, the response S of the lock-in amplifier signal U to the variable magnetic field B, microwave power P and temperature T is expressed as:
the NV colour centers with different concentrations or different preparation methods have different frequency modulation depths corresponding to the maximum detection sensitivity, and the range of the microwave power is different due to the performance difference of the microwave radiation antenna.
Wherein the central frequency of the microwave is set to f0≈D(T)+ΠzAnd optimize the microwave modulation parameter, the signal change that the lock-in amplifier outputs at this moment reflects the change information of the temperature directly, show as:
the phase-locked amplified signal response directly reflects the temperature change.
Based on the technical scheme, compared with the prior art, the optical fiber temperature sensor and the temperature measuring system based on the diamond NV color center have at least one of the following beneficial effects:
1. the sensor has simple structure and strong practicability, can realize high temperature detection sensitivity, is not influenced by magnetic field noise and microwave jitter in the environment during detection, and embodies strong robustness.
2. Diamond as the primary sensing element has a high thermal conductivity in itself, enabling the present invention to respond to temperature changes on the order of milliseconds.
3. The optical fiber is only used for transmitting exciting light and collecting fluorescence, so that the bending and twisting of the optical fiber cannot influence a detection result to a certain extent, and the optical fiber is more convenient to use.
4. The probe can be used as a micrometer-grade probe, can be used for temperature measurement of micrometer size, and has great application potential particularly in the industrial field, temperature measurement of chips, and even temperature detection in organisms.
5. The fluorescence collection system, the signal processing system and the sensing system are mutually independent, so that the system is convenient to replace or upgrade.
6. The NV color center concentration and the spin property in the diamond can be optimized, so that the sensitivity of temperature measurement is remarkably improved, and a sufficient scheme is provided for temperature measurement with higher precision.
Drawings
FIG. 1 is an energy level diagram of a diamond NV color center;
FIG. 2 is a temperature sensor based on diamond NV color center;
FIG. 3 is a schematic diagram of a fiber optic temperature sensing fluorescence excitation and collection system, as well as a signal analysis and processing system, a temperature scanning system;
FIG. 4 is an ODMR spectrum under frequency modulation;
FIG. 5 shows the center frequency of the microwave as f0The temperature change can be effectively detected, and the influence of magnetic field noise and microwave power jitter in the environment can be removed;
FIG. 6 is a noise spectrum showing the temperature detection sensitivity of the present invention;
fig. 7 is a scan and measurement of the temperature of the chip surface.
In the above figures, the reference numerals have the following meanings:
6. multimode fiber, a, fiber core, 8, microwave transmission antenna, c, block diamond sample,
d. an optical fiber ceramic ferrule;
1. a laser 2, a reflector 3, a bicolor chip 4, an optical fiber coupler,
5. a filter plate 6, a multimode fiber 7, a photoelectric detector 8, a microwave transmission antenna,
9. microwave source, 10, phase-locked amplifier, 11, computer, 12, step motor.
Detailed Description
The optical fiber and the NV color center of the diamond are coupled together, so that high-sensitivity temperature sensing is realized, and the optical fiber is irrelevant to the material property and the shape of the optical fiber, so that the influence of the physical state of the optical fiber on a measurement result is avoided; in addition, the measurement sensitivity of the method is determined by the intensity of exciting light, the NV color center concentration in diamond and the collection efficiency of fluorescence, so that the space for improving the temperature measurement sensitivity is greatly widened; finally, diamond is used as a main sensor component, the size of the diamond determines the spatial resolution of temperature measurement, and the sensor can be well applied to micron-size sensing, such as biosensing and temperature measurement of chip wafers, by reducing the size of the diamond and improving the concentration of NV color centers and the collection efficiency of fluorescence.
The present invention transfers the core of the sensor to the diamond NV colour centre. The block diamond is coupled on the end face of the optical fiber, the optical fiber is used for transmitting excitation light and fluorescence in the whole measuring process, the property of the optical fiber does not bring substantial influence on the measuring result, and the excellent physical property of the diamond determines the stability and the anti-interference capability of the optical fiber temperature sensor. On the other hand, the quantum property of the ensemble NV color center can be utilized to obtain extremely high temperature measurement sensitivity, and the method can also be applied to temperature measurement of micron size, and can well play application value in scientific research and industrial fields.
The invention couples the diamond containing high-concentration NV with the optical fiber by utilizing the linear change of zero field splitting in the NV color center ground state energy level of the diamond along with the temperature within a certain range and the microwave control principle, thereby realizing the optical fiber temperature sensor for measuring the temperature by energy level movement. The invention has simple structure, the measuring process is not influenced by the environment, and simultaneously, the invention has quick temperature response due to the extremely high thermal conductivity coefficient of the diamond. Finally, some specific implementation examples and measurement data thereof are given to verify the invention, and the invention is shown to have high temperature measurement sensitivity and can also carry out temperature scanning and imaging.
The following describes in detail three subjects of the invention:
(1) subject of the invention
I) Novel temperature detection based on diamond NV color center
A negatively charged nitrogen-vacancy colour center (NV) defect in diamond is composed of substitutional nitrogen atoms (N) associated with vacancies (V) in adjacent lattice sites of diamond, has a C3V symmetry with the axis of symmetry being on the nitrogen atom-vacancy line, and the NV colour center can be said to be an artificial atom because it has a stable energy level structure, as shown in fig. 1. In the absence of an external magnetic field, the ground state energy level of the NV color center is a triplet state consisting essentially of a singlet | ms＝0>And a dual state | ms＝±1>The energy difference between these two quantum states is the so-called zero-field splitting Dgs2.87GHz, which varies with temperature, satisfies almost a linear relationship dD at room temperaturegsand/dT is approximately equal to 74 KHz/K. However, if an external magnetic field is present, this double state will experience zeeman splitting, the magnitude of which is proportional to the magnetic field parallel to the NV axis. On the other hand, at | ms＝±1>The color center of the quantum state is excited by laser of 532nm, then it is radiationless transited to metastable state and then returns to ground state, the transition speed in this process is lower than | ms＝0>Therefore, fewer photons are emitted per unit time, which makes it possible to read out the spin state of electrons using the change in the intensity of the autofluorescence. If a continuous laser is applied and a microwave sweep is performed, a so-called ODMR can be obtained.
For diamonds containing high concentrations of NV, the interaction between color centers, as well as the stresses within the diamond, cause the color centers to cleave in the dual state even in the presence of zero magnetic field, and moreover, the geomagnetic field is always present, and as a result of these effects, ODMR has two peaks. The position of the two peak values is measured, the size of the zero field splitting can be judged, and then the outside temperature information can be known. Nevertheless at utensilIn the application of the body, the temperature sensing adopts the phase-locked amplification and frequency modulation detection ODMR technology, the center frequency of the microwave is fixed at the middle position of two peaks, and the frequency modulation parameter is adjusted to achieve the optimal detection condition, so that the zero-field splitting D can be realizedgsThe change of the temperature is converted into a phase-locked amplified signal, and then real-time measurement and scanning of the temperature are realized.
I I) the quantum mechanics of the above scheme is explained as follows:
considering the presence of the earth magnetic field, as well as B and other magnetic field noise, and the interaction with the microwave Ω cos (2 π ft), the ground state Hamilton quantity of the ensemble NV color center can be written as:
II thereinx,y,zIs the stress in the diamond and z is the axial direction of the NV colour centre. Considering the decoherence of NV color center, and using the Lindblad principal equation, the ODMR spectrum can be obtained and satisfies the following relation:
wherein
C and γ are the contrast and the full width at half maximum of the spectral line, respectively. If real-time temperature detection is to be performed, the microwave may be modulated, and the modulated microwave is expressed as:
F(t)＝fc+fdcos(2πfmt) (3)
wherein f isc，fd，fmRespectively, the center frequency, modulation depth and modulation frequency of the microwave. Then, the central frequency of the microwave is swept, and the ODMR of the frequency-modulated signal can be obtained:
III) measurement protocol and measurement sensitivity
The sensitivity of the temperature measurement is inversely proportional to the maximum slope of the frequency modulated ODMR signal and can be expressed as:
through the optimization of the frequency modulation parameters, the final finding is that if the central frequency of the microwave is fixed at f0,±1The quantum thermometer can provide the maximum detection sensitivity when the frequency modulation depth is 1.6-2MHz and the microwave power is in the range of 22-27 dbm. On the other hand, since the NV color center is easily coupled to the magnetic field B, and in addition, in the scanning process, the metal object influences the microwave radiation, so that the microwave power P sensed by the NV color center changes, the response S of the phase-locked signal to these variables can be expressed as:
if the center frequency of the microwave is set to f0≈(f++f-)/2＝D(T)+ΠzAnd the microwave modulation parameters are optimized, so that the maximum temperature detection sensitivity can be obtained, the influence of magnetic field noise and the jitter of microwave power on the measurement result can be removed, then the change of the signal output by the phase-locked amplifier directly reflects the change information of the temperature, and the formula is changed into:
the phase-locked amplified signal response directly reflects the temperature change.
(2) Subject of the invention II
A blocky diamond sample containing a high-concentration NV color center is adhered to the end face of the multimode optical fiber, and a copper wire surrounding the optical fiber ceramic ferrule is used as a microwave transmission antenna, so that the blocky diamond sample is a complete structure of the sensor. The multimode optical fiber is used for transmitting exciting light and collecting fluorescence emitted by an NV color center, the fluorescence is detected by the photoelectric detector and is input to the phase-locked amplification system for signal analysis and processing, and temperature information is extracted from the change of the fluorescence.
(3) Subject of the invention three
A diamond NV colour centre based fibre temperature sensor may be used as a probe for temperature scanning. The size of the block diamond determines the spatial resolution of temperature measurement, so the size of the diamond and the whole probe can be changed, the invention can be used as a temperature measurement tool in scientific research and even industrial fields, and the invention can provide higher measurement sensitivity through the subsequent improvement of the NV color center concentration so as to meet the requirement of higher precision.
The temperature sensing process of the invention mainly comprises the following modules: the device comprises a sensing module, a fluorescence excitation and collection module, a signal processing and analysis module and a temperature scanning measurement module.
(1) And a sensing module.
The diamond is grown by a gas phase chemical deposition method, nitrogen is used as a doping gas source, and then annealing treatment at 800 ℃ is carried out, so that the diamond contains a high concentration of NV color centers (about 0.15 ppm). And then cutting and polishing the diamond into a block-shaped diamond sample c of 200 × 100um, and adhering the diamond sample to the position of the fiber core on the end face of the multimode optical fiber 6 by using ultraviolet curing adhesive under the irradiation of ultraviolet light. The optical fiber is a multimode optical fiber 6, the fiber core a is about 100um, and the optical fiber head is a ceramic ferrule d with the diameter of 2.4mm, as shown in figure 2. The optical fiber plays a role in fluorescence excitation and collection. 5 circles of copper wires with the diameter of 0.5mm are wound on the periphery of the optical fiber ceramic ferrule to serve as a microwave transmission antenna 8. This constitutes a fiber optic temperature sensor.
(2) Fluorescence excitation and collection module
532nm laser generated by the laser 1 is reflected by the bicolor plate 3 and the reflector 2 and coupled into the multimode optical fiber 6 stuck with diamond through the optical fiber coupler 4, then the NV color center is excited, emitted fluorescence is collected by the same optical fiber and coupled into the other multimode optical fiber 6 through the bicolor plate 3 and the filter plate 5, and red fluorescence is finally detected by the photoelectric detector 7.
(3) Signal processing and analyzing module
The microwave source 9 generates frequency modulated microwaves as shown in equation (3), and the rf signal output from the microwave source 9 is used as a reference signal for the lock-in amplifier 10. The modulated microwaves modulate the fluorescence emitted by the NV color center, which is received by the photodetector and ultimately used as an input signal to the lock-in amplifier 10, as shown in fig. 3. Then, the microwave center frequency is swept, and the output signal of the lock-in amplifier 10 is recorded, so that the frequency-modulated ODMR can be obtained. Setting the center frequency of the microwave as f0The response of the lock-in amplifier 10 to the temperature change is the largest, and within a certain range, the external temperature change directly causes the linear change of the lock-in signal, and the external temperature information can be calculated according to the linear change.
(4) Temperature scanning measuring module
The object to be detected is placed on the stepping motor 12, and the detector is fixed on the three-dimensional adjusting frame, so that the distance between the detector and the object to be detected can be changed according to actual conditions. Adjusting the center of the microwave to f before temperature detection and scanning0So that the output signal of the lock-in amplifier 10 is 0, which ensures that the lock-in amplifier 10 records the external temperature information more accurately. In addition, the invention comprises a self-made temperature scanning software which can control the movement of the stepping motor 12 and data recording and real-time processing, and scanned temperature information can be displayed on the computer 11 or a screen in real time.
The invention discloses a method for measuring temperature by using the temperature measuring system, which comprises the following steps:
laser generated by a laser is reflected by the bicolor sheet and enters the multimode optical fiber comprising the diamond through the optical fiber coupler, then the NV color center is excited, emitted fluorescence is collected by the same optical fiber and is coupled into the other multimode optical fiber through the bicolor sheet and the filter, and finally red fluorescence is detected by the photoelectric detector;
the microwave source generates microwaves with modulated frequency, and simultaneously, a radio frequency signal output by the microwave source is used as a reference signal of the phase-locked amplifier; the modulated microwave can modulate the fluorescence emitted by the NV color center, and the fluorescence is received by the photoelectric detector and finally serves as an input signal of the phase-locked amplifier; then, sweeping the microwave center frequency, and recording an output signal of the phase-locked amplifier to obtain the frequency-modulated ODMR; setting the central frequency of the microwave as f, wherein the phase-locked amplifier has the maximum response to the temperature change, and the external temperature change directly causes the linear change of the phase-locked signal within a certain range, so that the external temperature information can be calculated;
placing an object to be detected on a stepping motor, and fixing a detector on a three-dimensional adjusting frame; before temperature detection and scanning, the center of the microwave is adjusted to f, so that the signal output by the phase-locked amplifier is 0, the movement of the stepping motor, data recording and real-time processing can be controlled through self-made temperature scanning software, and the scanned temperature information can be displayed on a computer or a screen in real time.
The NV colour centers with different concentrations or different preparation methods have different frequency modulation depths corresponding to the maximum detection sensitivity, and the range of the microwave power is different due to the performance difference of the microwave radiation antenna.
In order that the objects, technical solutions and advantages of the present invention will become more apparent, the present invention will be further described in detail with reference to the accompanying drawings in conjunction with the following specific embodiments.
Example 1:
FIG. 4 shows the frequency-modulated ODMR without any external magnetic field applied, in which the time constant of the lock-in amplifier is set to 30ms, the frequency modulation depth is 2MHz, the magnitude of the microwave power is 10dbm, and it is apparent that there are three characteristic center frequencies f±，f0Respectively at the position of maximum slope. And f0≈(f++f-)/2. And then, the microwave power and the modulation depth of the microwave are changed, so that the value ranges of the microwave power and the modulation depth corresponding to the optimal sensitivity can be obtained.
Example 2:
according to the value range achieved in the embodiment 1, the microwave power and the modulation depth are adjusted to obtain the optimal temperature detection sensitivity.
First of all utilizeOne coil generates an alternating magnetic field (amplitude of 5.2 μ T) of 1Hz, and the central frequencies of the microwaves are respectively fixed at f±，f0And recording the change of the signal output by the phase-locked amplifier along with time. As shown in FIG. 5a, if the center frequency of the microwave is fixed to f±The phase-locked amplifier outputs an oscillating signal of 1Hz, but fixed at f0When the temperature is measured, the output signal has little change, thereby showing that the thermometer can isolate the influence of external magnetic field noise. Furthermore, by numerical analysis, the influence of the earth magnetic field on the temperature detection sensitivity is negligible.
Then an aluminum column is used to gradually change its distance from the sensor to enhance the effect of the metal on the microwave radiation, and fig. 5b shows the phase lock signal as a function of distance, as can be seen if the center frequency is fixed at f0Position, weak microwave jitter has no effect on the temperature measurement. As for the influence of the sensitivity, experiments prove that the dynamic range of the microwave jitter is about 8dbm, namely, the sensitivity does not change for weak jitter.
Finally, the actual temperature measurement is performed, as shown in FIG. 5c, the temperature of the aluminum column is changed, and the temperature change is measured by the sensor, the result shows that three different phase-locked signals will change with the temperature, and only when the heater is working, the center frequency of the microwave is f±1The two phase-locked signals are in reverse movement, when the heater is switched off, the two signals become consistent, and when the heater is switched on, a weak magnetic field is generated to further cause signal jump, but the microwave center frequency is f0The results of fig. 5a are further demonstrated if no jump occurs when the heater is turned off, that is, if the center frequency is set to f0The influence of the environment on the temperature measurement can be eliminated, and the robustness of the scheme is shown.
To summarize, the frequency-modulated ODMR based on the NV centre of diamond, if the centre frequency of the microwave is set to f when measuring the temperature0The method can effectively remove the magnetic field noise in the environment and the influence of the object to be measured on the microwave radiation, so that the temperature measurement has strong robustnessAnd (4) the bar property.
Example 3:
as for sensitivity, the noise spectral density can be detected, and FIG. 6 shows that when the microwave frequency is fixed at f0And turning off the noise spectrum curves of the microwave and the laser, the surface inventive thermometer having
Temperature measurement sensitivity of, and instrument-limited noise floor
Example 4:
in conjunction with a lock-in amplifier, we apply this scheme to chip temperature scanning. First, the center frequency of the microwave is set to f0Next, the temperature of the surface of the chip is scanned in both the working state and the non-working state of the chip, and fig. 7 shows the scanning result, it can be seen that, when the chip is not in working, the chip is at room temperature, the scanning image is uniform, but once the chip is in working, the temperature distribution appears. Finally proves that the temperature sensor can be well applied to the industrial fields of chip temperature measurement and the like.
The above-mentioned embodiments are intended to illustrate the objects, technical solutions and advantages of the present invention in further detail, and it should be understood that the above-mentioned embodiments are only exemplary embodiments of the present invention and are not intended to limit the present invention, and any modifications, equivalents, improvements and the like made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. An optical fiber temperature sensor based on a diamond NV color center is characterized by comprising an optical fiber, a microwave transmission antenna and a diamond containing the NV color center, wherein,
an optical fiber for transmitting the excitation light and collecting the fluorescence emitted by the NV color center;
the microwave transmission antenna is a copper wire which surrounds the optical fiber ceramic ferrule and is used for transmitting microwaves to control the ground state energy level of the NV color center so as to perform optical detection magnetic resonance;
and diamond containing NV color centers is positioned on the end face of the optical fiber, and the temperature change can cause the change of the ground state energy level of the NV color centers, so that the diamond is used for temperature sensing.
2. The optical fiber temperature sensor based on the NV color center of diamond of claim 1, wherein the diamond is in the shape of block or particle, and the diamond is grown by gas phase chemical deposition or high temperature and high pressure preparation.
3. The diamond NV colour center based optical fiber temperature sensor according to claim 1, wherein the optical fiber is a bare fiber (without ferrule) or a fiber with cladding, a single mode fiber or a multimode fiber.
4. A diamond NV colour centre based optical fibre temperature sensor as claimed in claim 1, wherein varying the diamond size can accommodate different spatial resolution requirements.
5. A temperature measurement system comprising a diamond NV color center based fiber optic temperature sensor according to any one of claims 1-4, comprising a sensing module, a fluorescence excitation and collection module, a signal processing and analysis module, and a temperature scanning measurement module, wherein,
a sensing module comprising the fiber optic temperature sensor of any of claims 1-4, for converting a change in temperature to a change in fluorescence intensity emitted by the NV colour centre;
the fluorescence excitation and collection module comprises a laser, a double-color sheet, an optical fiber coupler, a multimode optical fiber, an optical filter and a photoelectric detector, is used for exciting an NV color center and collecting fluorescence, and converts an optical signal into an electric signal;
the signal processing and analyzing module comprises a microwave source and a phase-locked amplifier and is used for extracting temperature change information from the electric signal output by the photoelectric detector;
and the temperature scanning and measuring module comprises a stepping motor and an intelligent display end and is used for scanning temperature and displaying temperature information.
6. The temperature measurement system of claim 5, applicable to chip temperature measurement.
7. A method of temperature measurement using the temperature measurement system of claim 5, comprising the steps of:
laser generated by a laser is reflected by the bicolor sheet and enters the multimode optical fiber comprising the diamond through the optical fiber coupler, then the NV color center is excited, emitted fluorescence is collected by the same optical fiber and is coupled into the other multimode optical fiber through the bicolor sheet and the filter, and finally red fluorescence is detected by the photoelectric detector;
the microwave source generates microwaves with modulated frequency, and simultaneously, a radio frequency signal output by the microwave source is used as a reference signal of the phase-locked amplifier; the modulated microwave can modulate the fluorescence emitted by the NV color center, and the fluorescence is received by the photoelectric detector and finally serves as an input signal of the phase-locked amplifier; then, sweeping the microwave center frequency, and recording an output signal of the phase-locked amplifier to obtain the frequency-modulated ODMR; setting the central frequency of the microwave as f, wherein the phase-locked amplifier has the maximum response to the temperature change, and the external temperature change directly causes the linear change of the phase-locked signal within a certain range, so that the external temperature information can be calculated;
placing an object to be detected on a stepping motor, and fixing a detector on a three-dimensional adjusting frame; before temperature detection and scanning, the center of the microwave is adjusted to f, so that the signal output by the phase-locked amplifier is 0, the movement of the stepping motor, data recording and real-time processing can be controlled through self-made temperature scanning software, and the scanned temperature information can be displayed on a computer or a screen in real time.
8. The measuring method according to claim 7, wherein the thermometer can provide the maximum detection sensitivity when the central frequency of the microwave is fixed at f, the frequency modulation depth is 1.6-2MHz, and the microwave power P is in the range of 22-27 dbm; at this time, the response S of the lock-in amplifier signal U to these variables (magnetic field B, microwave power P, temperature T) is expressed as:
9. the method of claim 7, wherein the NV colour centers of different concentrations or different preparation methods differ in the depth of frequency modulation corresponding to the maximum detection sensitivity and in the range of microwave power due to the difference in performance of the microwave radiating antennas.
10. The measuring method according to claim 8, wherein the center frequency of the microwave is set to f0≈D(T)+ΠzAnd optimize the microwave modulation parameter, the signal change that the lock-in amplifier outputs at this moment reflects the change information of the temperature directly, show as:
the phase-locked amplified signal response directly reflects the temperature change.
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