CN110579297A - High-sensitivity flexible piezoresistive sensor based on MXene bionic skin structure - Google Patents
High-sensitivity flexible piezoresistive sensor based on MXene bionic skin structure Download PDFInfo
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- CN110579297A CN110579297A CN201910993537.5A CN201910993537A CN110579297A CN 110579297 A CN110579297 A CN 110579297A CN 201910993537 A CN201910993537 A CN 201910993537A CN 110579297 A CN110579297 A CN 110579297A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
Abstract
The invention discloses a high-sensitivity flexible piezoresistive sensor based on an MXene bionic skin structure, which comprises a flexible interdigital electrode layer, an MXene silicon adhesive bionic layer and a packaging layer; wherein: the MXene silica gel bionic layer is prepared by obtaining a film with a bionic skin structure through silica gel impression sand paper and then coating the film on a bionic film; the flexible interdigital electrode layer is developed through ink-jet printing and magnetron sputtering, the MXene silicon adhesive bionic layer is in direct contact with the electrode area to form a loop, and the packaging material is preferably a polyethylene film. The flexible pressure-sensitive sensor has extremely high sensitivity, low detection limit, quick response time and good stability, and has great application potential in practical application of electronic skins, wearable electronic devices and the like. The sensor solves the problems that the existing MXene-based piezoresistive sensor is complex in preparation process and difficult to have high sensitivity and stability.
Description
Technical Field
The invention belongs to the technical field of wearable electronics and new materials, particularly relates to a flexible piezoresistive sensor, and more particularly relates to a high-sensitivity flexible piezoresistive sensor based on a two-dimensional MXene material sand paper bionic skin structure, and a preparation method and application thereof.
Background
In recent years, a flexible pressure sensor has attracted considerable attention in the fields of the internet of things, the smart industry, and the like, as one of important components of smart devices, due to the characteristics of being bendable at will and comfortable to wear. According to different working principles, flexible pressure sensors are mainly classified into piezoresistive type, piezoelectric type and capacitive type. Compared with piezoelectric and capacitive pressure sensors, piezoresistive pressure sensors (piezoresistive sensors for short) have the advantages of simple preparation process, small volume, low energy consumption (only nW is needed for driving power), simple and accurate signal detection, stable performance and the like. In recent years, with the continuous progress and development of science and technology, higher requirements are put forward on the performance of piezoresistive sensors in the fields of medical diagnosis, internet of things, artificial intelligence and the like. At present, the core problem of piezoresistive sensor-related research is how to further improve the sensitivity of existing devices to meet practical requirements.
Research shows that the selection and quality of sensitive materials and the design and optimization of device geometric configuration are crucial to improving the sensitivity of piezoresistive sensors. At present, carbon materials represented by two-dimensional graphene and one-dimensional carbon nanotubes have abundant microstructures, excellent conductivity and strong mechanical strength, and are widely applied to the development of miniature flexible piezoresistive sensors. However, in practical applications, graphene and carbon nanotubes prepared by chemical vapor deposition have high requirements on equipment and are difficult to transfer, and piezoresistive sensors prepared from a single material have low sensitivity and a small dynamic range, which limits further applications of the piezoresistive sensors in sensors. The new two-dimensional transition metal carbide, nitride and carbonitride family MXene has the characteristics of low preparation cost, high yield, short period, good mechanical property and metal conductivity, high biocompatibility and adjustable microstructure, and is an ideal piezoresistive sensor sensitive material.
In recent years, researchers successfully construct three-dimensional MXene composite aerogel, MXene sponge piezoresistive sensors and MXene nano-network strain sensors, and the sensors have high sensitivity and stability. However, the MXene-based flexible piezoresistive sensor constructed by the existing geometric configuration is thick and poor in light transmission, and the wearability of the sensor is difficult to realize. In addition, the regulation rule of the contact resistance of the MXene sensitive material and the flexible substrate on the sensitivity of the piezoresistive sensor is also to be further researched.
the present application is particularly proposed based on the above-mentioned drawbacks of the prior art.
Disclosure of Invention
Aiming at the defects or improvement requirements of the prior art, the invention provides the high-sensitivity flexible piezoresistive sensor based on the MXene bionic skin structure, the bionic skin structure is obtained by impression sand paper, under the action of external micro force, point contact and line contact replace the surface contact of the traditional piezoresistive sensor, the conductive path is obviously increased, the resistance is sharply reduced, and thus, the pressure-sensitive sensor has extremely high sensitivity, low detection limit and quick response time; silica gel with good mechanical flexibility is used as a substrate material to endow the sensor with good stability, so that the MXene-based piezoresistive sensor has great application potential in practical applications such as electronic skins and wearable electronic devices.
In order to achieve the above object, according to an aspect of the present invention, there is provided a high-sensitivity flexible piezoresistive sensor based on an MXene biomimetic skin structure, including a flexible interdigital electrode layer, an MXene silica gel biomimetic layer, and an encapsulation layer, which are sequentially stacked from bottom to top.
Further, according to the technical scheme, the MXene silica gel bionic material is prepared by obtaining a bionic film with a bionic skin structure through silica gel impression sand paper and then coating MXene colloidal solution on the bionic film.
Further, according to the technical scheme, the flexible interdigital electrode layer is prepared through ink-jet printing and magnetron sputtering in sequence, and the MXene silicon adhesive bionic layer directly contacts with the electrode area to form a loop.
Further, in the above technical solution, the sealing material is preferably a polyethylene film.
Further, according to the above technical scheme, the silica gel is any one of high polymer such as Polydimethylsiloxane (PDMS) and Polyurethane (PU).
Further, according to the above technical solution, the flexible interdigital electrode substrate may be any one of a polyethylene terephthalate film, a polyimide film, a polydimethylsiloxane film, or the like, and is preferably a polyimide film.
Further, according to the technical scheme, the flexible silica gel bionic layer can be obtained by stamping sand paper with different meshes (400 meshes and 5000 meshes).
in a second aspect of the present invention, a method for preparing a high-sensitivity flexible piezoresistive sensor based on an MXene biomimetic skin structure is provided, where the method includes the following steps:
S1: etching, centrifuging and washing the MAX phase precursor in hydrofluoric acid etching solution, and then carrying out ultrasonic treatment and centrifugation in an ice bath under the protection of inert atmosphere to obtain MXene colloidal solution;
S2: placing a silica gel solution impression on the surface of abrasive paper, standing in vacuum, drying, and slowly tearing off the obtained silica gel film with the impression abrasive paper structure to obtain a silica gel bionic layer;
S3: diluting the MXene colloidal solution obtained in the step S1, coating the diluted MXene colloidal solution on the bionic surface of the silica gel obtained in the step S2, and drying to obtain an MXene silica gel bionic layer;
s4: printing a flexible interdigital electrode pattern on a flexible substrate by an ink-jet printing technology, then carrying out magnetron sputtering on conductive metal, and carrying out ultrasonic cleaning to form a flexible interdigital electrode;
S5: and (4) fixing the MXene-based silica gel bionic layer obtained in the step (S3) on the flexible interdigital electrode obtained in the step (S4), then packaging and fixing the MXene-based silica gel bionic layer by adopting a packaging film, and leading the electrode by using a copper wire to obtain the MXene-based bionic piezoresistive sensor.
Further, in the above technical solution, in the MAX phase precursor in step S1, M is a transition metal, a is mainly a group iii element or a group iv element, and X is a group C element or a group N element. The MAX phase precursor is preferably Ti3AlC2Preferably with a particle size of 38 μm or less, in particular the commercially available MAX phase precursor Ti3AlC2grinding, and sieving with 400 mesh sieve.
Further, in the above technical solution, MXene in the MXene colloidal solution in step S1 is preferably Ti3C2TxA nanosheet, the MXene lamella having a size (lateral dimension) of 200-.
Further, in the above technical solution, the inert atmosphere in step S1 is preferably an argon atmosphere.
Further, in the above technical solution, the time of the vacuum standing in step S2 is preferably 10-20min, and the purpose of the vacuum standing is to remove bubbles.
Further, in the above technical solution, the drying temperature and time in step S2 are 60-90 ℃ and 0.5-1h, respectively.
Further, in the technical scheme, in order to improve the binding capacity of the silica gel biomimetic material obtained in the step S2 with the sensitive material MXene, a plasma cleaning machine can be used for processing in advance to obtain more hydrophilic groups; in the plasma treatment process, the introduced gas is oxygen or air, and the treatment time is 2-6 min.
Further, in the above technical solution, the concentration of the diluted MXene colloidal solution in the step S1 is 1-10 mg/ml.
Further, in the above technical solution, the coating in step S3 is preferably performed by spray gun, and the diameter of the spray gun head is 0.2-0.5 mm.
Further, in the above technical solution, in step S4, the conductive metal is preferably Ni or Au, where: the power and time of the Ni in magnetron sputtering are respectively 80-200W and 30-90s, the power and time of the Au sputtering are respectively 100-220W and 10-30 s.
the third aspect of the invention is to provide an application of the high-sensitivity flexible piezoresistive sensor based on the MXene bionic skin structure, which can be used in electronic skin and wearable electronic devices.
in general, compared with the prior art, the above technical solution contemplated by the present invention can achieve the following beneficial effects:
(1) Compared with the traditional pressure sensor preparation process, the method of the invention adopts the impression sand paper and the active material spraying method, has the advantages of simplicity, high efficiency, low cost and the like, and is expected to realize mass production. The bionic skin structure obtained by the impression sand paper has the advantages that under the action of external micro-force, point contact and line contact replace surface contact, a conductive path is remarkably increased, extremely high sensitivity is shown, physiological signals of a human body such as pulse fluctuation can be clearly distinguished, and the bionic skin structure has great potential in practical application such as electronic skin and wearable electronic devices.
(2) In the technical scheme of the invention, the adopted silica gel bionic layer has good flexibility, can be well contacted with the electrode, and is easy to be adhered to the uneven skin of a human body uniformly, so that the physical signals from the human body can be better monitored or the stimulation from the outside can be better detected in practical application.
(3) The sensitive layer obtained by spraying MXene colloidal solution through the flexible silica gel impression sand paper shows extremely high sensitivity (224.15 kPa)-1) And low detection limit, low working voltage, fast response time and good circulation stability, under the action of small external force, the bionic skin structure deforms, the conductive path is increased, and the resistance is reduced.
(4) the MXene nano material prepared by the chemical etching method has good hydrophilicity, higher conductivity and excellent mechanical strength.
(5) The sensor solves the problems that the existing MXene-based piezoresistive sensor is complex in preparation process and difficult to have high sensitivity and stability.
(6) MXene as a novel two-dimensional material has the advantages of large specific surface area, good water solubility, good conductivity and the like, is very suitable for being used as a sensitive material, and the regulation and control rule of MXene nano material characteristics and geometric configuration on sensitivity is urgently needed to be researched. The technical scheme of the invention provides a method for researching the regulation and control rule of the contact resistance of the MXene sensitive material and the flexible substrate on the sensitivity of the piezoresistive sensor.
Drawings
FIG. 1 is a flow chart of a process for manufacturing a high-sensitivity flexible piezoresistive sensor based on a two-dimensional MXene material sand paper bionic skin structure in the implementation of the present invention;
FIG. 2 is a physical diagram (a) of an MXene-based silica gel bionic layer and SEM diagrams (b-f) of MXene-based silica gel bionic layers with different mesh numbers of stamps; (b)400 meshes; (c)800 meshes; (d)2000 mesh; (e)3000 meshes; (f)5000 meshes;
FIG. 3 is a diagram illustrating the electrical response test of MXene-based bionic piezoresistive sensor (a) prepared in example 2 of the present invention to pressure; (b) current-time and pressure-time tests were performed; (c) testing the response time of the device; (d) testing the stability of the device;
FIG. 4 is a diagram of the MXene-based bionic piezoresistive sensor manufactured in example 2 for monitoring the response of a device to a small pressure in practical application test (a); (b) testing finger contact; (c) testing the bending of the wrist; (d) and (5) testing wrist pulse.
Detailed Description
in order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention. In addition, the technical features involved in the embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
Fig. 1 is a flow chart of a manufacturing process of a high-sensitivity flexible piezoresistive sensor with a two-dimensional MXene material sandpaper bionic skin structure in embodiment 1 of the present invention. As shown in fig. 1, the process comprises the following steps:
(1) etching MAX phase by a chemical solution method, and performing centrifugal cleaning and low-temperature ultrasound to prepare MXene nanosheets;
(2) Preparing a silica gel solution and preparing a silica gel film with a stamp sand paper structure;
(3) Preparing an MXene silica gel bionic layer;
(4) preparing a flexible interdigital electrode;
(5) And assembling the MXene-based bionic piezoresistive sensor.
Example 1
In a preferred embodiment of the invention, a method for preparing a high-sensitivity flexible piezoresistive sensor based on an MXene material sand paper bionic skin structure comprises the following steps:
S1: and etching the MAX phase by a chemical solution method, and performing centrifugal cleaning and low-temperature ultrasound to prepare the MXene nanosheet.
A commercially available MAX phase precursor-Ti3AlC2Wet chemical etching at 35 deg.CObtaining multiple layers of MXene after 24 hours; repeatedly centrifuging and washing the etching solution for 8 times, performing ultrasonic treatment for 40min under ice bath and inert atmosphere (argon gas) protection, centrifuging for 1h under the conditions that the radius of a rotor is 7cm, the rotating speed is 3500r/min and the lifting rate is 1 gear, and obtaining the upper-layer liquid MXene (namely Ti ethylene3C2TxNanosheets) colloidal solution; the average diameter of the MXene nano-sheets is 600 nm.
S2: preparing a silica gel solution and preparing a silica gel film with a stamp sand paper structure.
Preparation of a silica gel solution: polydimethylsiloxane (PDMS) prepolymer and curing agent were injected using a medical syringe at a 10: 1, adding the mixture into a beaker, magnetically stirring the mixture for 5min at room temperature, sealing the obtained PDMS colloidal solution, and placing the PDMS colloidal solution into a refrigerator for standing for 12h for later use; the curing agent is modified silicon rubber containing hydrazine;
Preparation of silica gel film with impression sand paper structure: and stamping the prepared PDMS colloidal solution on 800-mesh sand paper, uniformly coating, and standing for 15min in a vacuum state to remove redundant bubbles. And finally, drying the film in an oven (the temperature is 80 ℃, and the time is 40min), and slowly tearing off the PDMS film with the impression sand paper structure after drying is finished to obtain the PDMS film with the impression sand paper structure.
S3: and preparing the MXene silica gel bionic layer.
And (4) diluting the MXene solution obtained in the step S1 to 1mg/ml, spraying the solution to the silica gel bionic layer obtained in the step S2 through a spray gun, and drying to obtain the MXene silica gel bionic layer.
S4: and preparing the flexible interdigital electrode.
Taking a polyimide film, cutting the polyimide film into A4 paper, respectively ultrasonically cleaning the polyimide film in acetone, ethanol and ultrapure water for 30min, and then drying the polyimide film at room temperature. And then printing the drawn interdigital electrode on a cleaned flexible polyimide film by using an ink-jet printer, after the ink is dried at room temperature, respectively sputtering Ni and Au (atmosphere: Ar gas, flow rate: 4.0; pressure: 9 Pa; bias voltage: 210V; magnetron Ni power: 100W; magnetron Au power: 120W) on a polyimide plate by using magnetron sputtering, carrying out ultrasonic treatment on the sputtered polyimide plate in ethanol solution, and then wiping off redundant Ni and Au attached to the ink by using dust-free cloth, thereby preparing the interdigital electrode.
S5: and assembling the MXene-based bionic piezoresistive sensor.
And fixing the copper wires on the interdigital electrode antenna by using adhesive tape and silver adhesive to form a conductive path. And fixing the prepared MXene-based sensitive material on the interdigital electrode, and packaging the MXene-based sensitive material by using a polyethylene film to obtain the MXene-based bionic piezoresistive sensor.
example 2
In a preferred embodiment of the invention, a method for preparing a high-sensitivity flexible piezoresistive sensor based on an MXene material sand paper bionic skin structure comprises the following steps:
S1: and etching the MAX phase by a chemical solution method, and performing centrifugal cleaning and low-temperature ultrasound to prepare the MXene nanosheet.
A commercially available MAX phase precursor-Ti3AlC2Carrying out wet chemical etching for 24h at 35 ℃ to obtain a plurality of layers of MXene; repeatedly centrifuging and washing the etching solution for 7 times, performing ultrasonic treatment for 1h under ice bath and inert atmosphere (argon gas) protection, centrifuging for 1h under the conditions of rotor radius of 7cm, rotation speed of 3500r/min and lifting rate of 1 gear, and obtaining upper layer liquid (namely MXene (Ti) as the upper layer liquid3C2TxNanosheets) colloidal solution; the average diameter of the MXene nano-sheets is 500 nm.
S2: preparing a silica gel solution and preparing a silica gel film with a stamp sand paper structure.
Preparation of a silica gel solution: polydimethylsiloxane (PDMS) prepolymer and curing agent were injected using a medical syringe at a ratio of 9: 1 (volume ratio), magnetically stirring at room temperature for 5min, sealing the PDMS colloidal solution, and standing in a refrigerator for 10 h; the curing agent is modified silicon rubber containing hydrazine;
preparation of silica gel film with impression sand paper structure: and (3) stamping the prepared PDMS colloid on 2000-mesh sand paper, uniformly coating, and standing for 20min in a vacuum state to remove redundant bubbles. And finally, drying the film in an oven (the temperature is 60 ℃, the time is 60min), and slowly tearing off the PDMS film with the impression sand paper structure after drying is finished to obtain the PDMS film with the impression sand paper structure.
S3: and preparing the MXene silica gel bionic layer.
And (4) diluting the MXene solution obtained in the step S1 to 2mg/ml, spraying the solution to the silica gel bionic layer obtained in the step S2 through a spray gun, and drying to obtain the MXene silica gel bionic layer.
S4: and preparing the flexible interdigital electrode.
Taking a polyimide film, cutting the polyimide film into A4 paper, respectively ultrasonically cleaning the polyimide film in acetone, ethanol and ultrapure water for 30min, and then drying the polyimide film at room temperature. And then printing the drawn interdigital electrode on a cleaned flexible polyimide film by using an ink-jet printer, after the ink is dried at room temperature, respectively sputtering Ni and Au (atmosphere: Ar gas, flow rate: 4.0; pressure: 9 Pa; bias voltage: 210V; magnetron Ni power: 120W; magnetron Au power: 150W) on a polyimide plate by using magnetron sputtering, carrying out ultrasonic treatment on the sputtered polyimide plate in ethanol solution, and then wiping off redundant Ni and Au attached to the ink by using dust-free cloth, thereby preparing the interdigital electrode.
S5: and assembling the MXene-based bionic piezoresistive sensor.
And fixing the copper wires on the interdigital electrode antenna by using adhesive tape and silver adhesive to form a conductive path. And fixing the prepared MXene-based sensitive material on the interdigital electrode, and packaging the MXene-based sensitive material by using a polyethylene film to obtain the MXene-based bionic piezoresistive sensor.
Preferably, the mesh number of the impression sand paper is 2000 meshes, the concentration of the MXene colloidal solution is 2mg/ml, the transverse dimension of the MXene nanosheet is 500nm, and the electrical and mechanical properties of the prepared two-dimensional MXene bionic piezoresistive sensor are analyzed (as shown in FIG. 3). Fig. 3(a) shows the I (current) -T (time) curves of the MXene biomimetic piezoresistive sensor under different pressure states. It was found that as the external force increases, the current tended to increase monotonically, indicating that the device could recognize different pressures. In addition, in dynamic testing, it was found that the I-T curve (response to electricity) and the P-T curve (response to ambient pressure) of the device remained consistent at all times, as shown in FIG. 3 (b). The response time and the recovery time of the MXene bionic piezoresistive sensor to external force are 108ms and 92ms respectively. The response of the MXene bionic piezoresistive sensor to external force shows good stability, and the initial current intensity is basically kept after 10000 times of cyclic tests.
the two-dimensional MXene-based bionic piezoresistive sensor has high sensitivity, good flexibility and wearability, and can meet the requirements of practical application. As shown in fig. 4, the MXene bionic piezoresistive sensor can not only clearly respond to external tiny pressure signals (a), but also monitor human physiological signals, such as fingertip touch (b), wrist bending (c), and wrist pulse test (d).
Example 3
in a preferred embodiment of the invention, a method for preparing a high-sensitivity flexible piezoresistive sensor based on an MXene material sand paper bionic skin structure comprises the following steps:
s1: and etching the MAX phase by a chemical solution method, and performing centrifugal cleaning and low-temperature ultrasound to prepare the MXene nanosheet.
A commercially available MAX phase precursor-Ti3AlC2carrying out wet chemical etching for 24h at 35 ℃ to obtain a plurality of layers of MXene; repeatedly centrifuging and washing the etching solution for 7 times, performing ultrasonic treatment for 40min under ice bath and inert atmosphere (argon gas) protection, centrifuging for 1h under the conditions that the radius of a rotor is 7cm, the rotating speed is 3500r/min and the lifting rate is 1 gear, and obtaining the upper-layer liquid MXene (namely Ti ethylene3C2TxNanosheets) colloidal solution; the average diameter of the MXene nano-sheets is 600 nm.
S2: preparing a silica gel solution and preparing a silica gel film with a stamp sand paper structure.
Preparation of a silica gel solution: using a medical syringe, Polydimethylsiloxane (PDMS) prepolymer and curing agent were mixed at a ratio of 7: 1 (volume ratio), magnetically stirring at room temperature for 5min, sealing the PDMS colloidal solution, and standing in a refrigerator for 10 h; the curing agent is modified silicon rubber containing hydrazine;
Preparation of silica gel film with impression sand paper structure: the prepared PDMS colloid was stamped to 200S 3: and preparing the MXene silica gel bionic layer. And (3) uniformly coating on 0-mesh sand paper, standing for 20min in a vacuum state, and removing redundant bubbles. And finally, drying the film in an oven (the temperature is 60 ℃, the time is 60min), and slowly tearing off the PDMS film with the impression sand paper structure after drying is finished to obtain the PDMS film with the impression sand paper structure.
And (4) diluting the MXene solution obtained in the step S1 to 3mg/ml, spraying the solution to the silica gel bionic layer obtained in the step S2 through a spray gun, and drying to obtain the MXene silica gel bionic layer.
S4: and preparing the flexible interdigital electrode.
Taking a polyimide film, cutting the polyimide film into A4 paper, respectively ultrasonically cleaning the polyimide film in acetone, ethanol and ultrapure water for 30min, and then drying the polyimide film at room temperature. And then printing the drawn interdigital electrode on a cleaned flexible polyimide film by using an ink-jet printer, after the ink is dried at room temperature, respectively sputtering Ni and Au (atmosphere: Ar gas, flow rate: 4.0; pressure: 9 Pa; bias voltage: 210V; magnetron Ni power: 100W; magnetron Au power: 100W) on a polyimide plate by using magnetron sputtering, carrying out ultrasonic treatment on the sputtered polyimide plate in ethanol solution, and then wiping off redundant Ni and Au attached to the ink by using dust-free cloth, thereby preparing the interdigital electrode.
S5: and assembling the MXene-based bionic piezoresistive sensor.
And fixing the copper wires on the interdigital electrode antenna by using adhesive tape and silver adhesive to form a conductive path. And fixing the prepared MXene-based sensitive material on the interdigital electrode, and packaging the MXene-based sensitive material by using a polyethylene film to obtain the MXene-based bionic piezoresistive sensor.
In the technical scheme of the invention, the ultrasonic time with a better effect is given in the embodiment, but the invention is not limited to the ultrasonic time given in the embodiment, the ultrasonic time is 0.5-2 h, and can be 40min, 1h, 30min, 1.2h, 1.3h, 1.4h, 1.5h, 1.6h, 1.7h, 1.8h, 1.9h and the like, and the specific ultrasonic time is determined according to actual needs. When the ultrasonic power is small, the ultrasonic time can be increased properly.
In the technical scheme of the invention, the concentration of the MXene colloid with a relatively good effect is given in the embodiment, but the invention is not limited to the concentration of the MXene colloid given in the embodiment, the concentration of the MXene colloid is 1-10mg/ml, 1mg/ml, 2mg/ml and 3mg/ml in the embodiment can be taken, 5mg/ml, 7mg/ml and the like can be taken, and the specific concentration of the MXene colloid is determined according to actual needs.
In the technical scheme of the invention, the average transverse size of the MXene nanosheets with better effect is given in the embodiment, but the invention is not limited to the MXene transverse size given in the embodiment, the average transverse size of the MXene nanosheets is 200-2000nm, 500nm and 600nm, 200nm, 250nm, 300nm, 350nm, 400nm, 450nm and the like can be given in the embodiment, and the specific average diameter of solute particles of the MXene ink can be determined according to actual needs.
in the technical scheme of the invention, the mesh number of the abrasive paper with a better effect is given in the embodiment, but the invention is not limited to the mesh number of the abrasive paper given in the embodiment, the mesh number of the abrasive paper is 400-5000, the mesh number of the abrasive paper can be 800-2000, 400-1000-3000-5000 and the like given in the embodiment, and the specific mesh number of the abrasive paper can be determined according to actual needs.
In the technical scheme of the invention, the embodiment provides the silica gel PDMS with better effect, but the invention is not limited to the silica gel provided in the embodiment, and polymers such as polyurethane can be taken, and the specific polymers are determined according to actual needs.
The lifting rate adopted by the centrifuge in the embodiment of the invention is 1-5 grades, wherein the lifting rate specifically refers to the time required for the rotating speed of the centrifuge to reach the set rotating speed from zero or the time required for the centrifuge to reach zero from the set rotating speed, and the rotors have different times; the centrifuge used in this application was a TG16-II bench-top high speed centrifuge manufactured by changsha trivial instruments & meters ltd.
Compared with the traditional pressure sensor preparation process, the method of the invention adopts the impression sand paper and the active material spraying method, has the advantages of simplicity, high efficiency, low cost and the like, and is expected to realize mass production. The bionic skin structure obtained by the impression sand paper has the advantages that under the action of external micro force, point contact and line contact replace surface contact, a conductive path is remarkably increased, and extremely high sensitivity is expressed, so that the bionic skin structure has great potential in practical application of electronic skin, wearable electronic devices and the like.
It will be understood by those skilled in the art that the foregoing is only a preferred embodiment of the present invention, and is not intended to limit the invention, and that any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the scope of the present invention.
Claims (10)
1. A high-sensitivity flexible piezoresistive sensor based on an MXene bionic skin structure is characterized in that: the flexible interdigital electrode layer, the MXene silica gel bionic layer and the packaging layer are sequentially stacked from bottom to top.
2. The MXene biomimetic skin structure-based high-sensitivity flexible piezoresistive sensor according to claim 1, characterized in that: the MXene-based silica gel bionic material is prepared by obtaining a bionic film with a bionic skin structure through silica gel impression sand paper and then coating MXene colloidal solution on the bionic film.
3. The MXene biomimetic skin structure-based high-sensitivity flexible piezoresistive sensor according to claim 1, characterized in that: the flexible interdigital electrode layer is prepared through ink-jet printing and magnetron sputtering in sequence, and the MXene silicon adhesive bionic layer directly contacts with the electrode area to form a loop.
4. The MXene biomimetic skin structure-based high-sensitivity flexible piezoresistive sensor according to claim 1, characterized in that: the encapsulating material is preferably a polyethylene film.
5. the MXene biomimetic skin structure-based high-sensitivity flexible piezoresistive sensor according to claim 1, characterized in that: the silica gel is any one of polydimethylsiloxane and polyurethane.
6. the MXene biomimetic skin structure-based high-sensitivity flexible piezoresistive sensor according to claim 1, characterized in that: the flexible interdigital electrode substrate is any one of a polyethylene terephthalate film, a polyimide film or a polydimethylsiloxane film.
7. the method for preparing the high-sensitivity flexible piezoresistive sensor based on the MXene bionic skin structure, according to claim 1, is characterized in that: the method comprises the following steps:
s1: etching, centrifuging and washing the MAX phase precursor in hydrofluoric acid etching solution, and then carrying out ultrasonic treatment and centrifugation in an ice bath under the protection of inert atmosphere to obtain MXene colloidal solution;
S2: placing a silica gel solution impression on the surface of abrasive paper, standing in vacuum, drying, and slowly tearing off the obtained silica gel film with the impression abrasive paper structure to obtain a silica gel bionic layer;
S3: diluting the MXene colloidal solution obtained in the step S1, coating the diluted MXene colloidal solution on the bionic surface of the silica gel obtained in the step S2, and drying to obtain an MXene silica gel bionic layer;
s4: printing a flexible interdigital electrode pattern on a flexible substrate by an ink-jet printing technology, then carrying out magnetron sputtering on conductive metal, and carrying out ultrasonic cleaning to form a flexible interdigital electrode;
S5: and (4) fixing the MXene-based silica gel bionic layer obtained in the step (S3) on the flexible interdigital electrode obtained in the step (S4), then packaging and fixing the flexible interdigital electrode by adopting a packaging film, and leading the electrode by using a copper wire to obtain the MXene-based bionic piezoresistive sensor.
8. the method for preparing the high-sensitivity flexible piezoresistive sensor based on the MXene bionic skin structure according to claim 7, wherein the method comprises the following steps: the MAX phase precursor in step S1 is preferably Ti3AlC2The particle size is less than or equal to 38 mu m.
9. The method for preparing the high-sensitivity flexible piezoresistive sensor based on the MXene bionic skin structure according to claim 7, wherein the method comprises the following steps: the preferable choice of the dispersoid MXene in the MXene colloidal solution in the step S1 is Ti3C2Txa nano-sheet layer, wherein the MXene sheet layer size is 200-2000 nm.
10. Use of an MXene biomimetic skin structure based high-sensitivity flexible piezoresistive sensor according to any of claims 1-6 or an MXene biomimetic skin structure based high-sensitivity flexible piezoresistive sensor prepared by the method according to any of claims 7-9, characterized in that: can be used in electronic skin and wearable electronic devices.
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