CN109855526A - A kind of resistance-type flexibility strain transducer and preparation method thereof based on dry mediation self assembly - Google Patents
A kind of resistance-type flexibility strain transducer and preparation method thereof based on dry mediation self assembly Download PDFInfo
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Abstract
The resistance-type flexibility strain transducer and preparation method thereof of parallel crack is self-assembly of based on dry mediate of colloidal particle the present invention relates to a kind of, the flexibility strain transducer, including, it is from bottom to top arranged successively: flexible substrates, sensitive layer, conductive layer；The flexible substrates are the film of flexible material；The sensitive layer is made by the dry film generated of colloidal dispersion；Its upper surface has regular crack array structure；The conductive layer is equipped with a pair of of copper plate electrode, and two electrodes are located at the both ends of conductive layer；The electrode draws an enameled conducting wire.Flexibility strain transducer provided by the present invention can be affixed on human skin surface or be attached on clothing, realize the wearable monitorings such as human body respiration, pulse, gait, joint motions.The features such as flexibility strain transducer is realized that colloidal particle is self-assembly of parallel crack, had high sensitivity using dry mediated method, and quickly and efficiently, preparation process is simple and environmentally-friendly for preparation process, is conducive to large area and is manufactured, at low cost, has broad application prospects.
Description
Technical field
The present invention relates to a kind of based on the dry resistance-type flexibility strain transducer and preparation method thereof for mediating self assembly, belongs to
In flexible sensor technology.
Background technique
Sensor is the general name of a kind of Function detection device, can be converted external information to visual, readable, storable
The information output of electric signal or other required forms.Strain transducer be based on object receiving force generate strain and be converted into it is other can
A kind of sensor of read signal.In recent years, property of traditional strain transducer because of its own material, flexibility and detection accuracy
It is limited by very large, requires flexible emerging field more and more inadaptable many.Therefore, flexible strain transducer is answered
It transports and gives birth to.
A kind of flexible electronic device that sensitive body mechanically deform is converted into electrical signal of flexible strain transducer, can be attached
In surface curvature, complicated region, follow its realize it is corresponding stretch, bending, the deformation such as torsion, easily to spy
Different environment and the accurate quick measurement of signal progress, and in human body physical sign inspection (prison) survey, limbs joint movement, smart electronics, intelligence
The fields such as covering, which exist, is widely applied demand, so as to cause the more and more extensive concern of people.In recent years, related fields is ground
Study carefully personnel and be prepared for a variety of flexible strain transducers for the demand, mainly coats Strain sensing material on a flexible substrate, lead to
The resistance variations crossed in the course of work monitor coping behavior.From the point of view of current research, on the one hand, researcher endeavours to select
The excellent sensitive material of electric property, mechanical performance improves the sensitivity and stability of strain transducer, such as carbon nanotube, stone
Black alkene, PEDOT:PSS etc.；On the other hand, researcher realizes the optimization of sensor performance by introducing fine micro-nano structure,
Micro-nano structure reported at present includes layering, fold, fabric, crackle etc..However, the system of the materials such as graphene, carbon nanotube
Standby complicated, higher cost limits the development of flexible strain transducer.And crack structtire compared to other micro-nano structures due to knot
The acquisition of structure simple signal is easy the favor by researcher.
Flexible strain transducer working principle with crack structtire are as follows: process specific dimensions on flexible substrates surface
Crackle, faint deformation occurs for flexible substrates under the action of external load, and two wall spacing of crackle is caused to change, and then induces
Resistance, which changes, completes measurement.Many computer MSR Information systems are prepared for a variety of flexible strains with crack structtire in succession based on this and passed
Sensor effectively improves the sensitivity of flexible strain transducer.Sensor reported at present with crack structtire is main
It is divided into: generates size distribution irregular splitting with mechanical systems such as bending, tearing, stretchings.But the geometric parameter of crackle is
One of the deciding factor for influencing flexible strain transducer performance crack structtire size difference and is distributed unordered make in the course of work
Stability, the service life for obtaining the type sensor substantially reduce；Being processed with the methods of photoetching, oxidation, nano impression has
The template of regular crack structure, then pass through template for Array of Cracks column jump to flexible substrates surface.Using new processing technology
Spontaneous unordered crack structtire is changed into the crack structtire of controllable precise by such as photoetching, nano impression technology, though realize biography
The optimization of sensor performance, but the mold difficulty of processing with fine crack structtire is big, and the process-cycle is long, and processing cost is high, seriously
Constrain the commercialization process of the flexible strain transducer of the strain with crack structtire.Therefore it realizes based on the soft of crack structtire
Property strain transducer high efficiency, low cost technology of preparing be the key that realize that such flexible strain transducer promotes and applies.
Summary of the invention
(1) technical problems to be solved
In order to solve the flexible strain transducer long preparation period based on crack structtire of the prior art, processing difficulties, skill
Art requires high technological deficiency, the present invention provide it is a kind of based on the dry resistance-type flexibility strain transducer for mediating self assembly and its
Preparation method, processing technology is simple, preparation rapidly, can process that arranged in parallel, geometric parameter is uniform on a flexible substrate
Consistent crackle array.
(2) technical solution
In order to achieve the above object, the main technical schemes that the present invention uses include:
A kind of resistance-type flexibility strain transducer based on dry mediation self assembly, including,
It is from bottom to top arranged successively: flexible substrates, sensitive layer, conductive layer；
The flexible substrates are the film of flexible material；
The sensitive layer is made by the dry film generated of colloidal dispersion；Its upper surface has size relatively uniform, point
The uniform crackle array structure of cloth；The conductive layer is equipped with a pair of of copper plate electrode, and two electrodes are located at the two of conductive layer
End；
The electrode draws an enameled conducting wire.
Resistance-type flexibility strain transducer as described above, it is preferable that the crackle array structure is that colloidal dispersion is logical
Cross the parallel fracture that the dry mediation of orientation is self-assembly of.
Further, in a free state, the width of crackle is within the scope of 1~6 μm, crackle for the crackle array structure
Spacing in 10~40 μ ms, the depth of crackle is in 1~4 μ m.
Resistance-type flexibility strain transducer as described above, it is preferable that the colloidal dispersion of the sensitive layer is polyphenyl second
Any one of alkene latex particle, water-based acrylic resin, titania nanoparticles, nano SiO 2 particle.
In order to which self assembly generates parallel crack after colloidal particle drying, preferable particle size is 40~80nm water soluble acrylic acid tree
Rouge.
Resistance-type flexibility strain transducer as described above, it is preferable that the flexible material is polyamide, poly dimethyl silicon
One of oxygen alkane (PDMS), polyimides or polyethylene terephthalate (PET).
In order to avoid flexible substrates and human skin generate allergic reaction, flexible material is preferably poly terephthalic acid second two
Alcohol ester (PET) film, with a thickness of 100 μm.
Resistance-type flexibility strain transducer as described above, it is preferable that the material of the conductive layer is gold, silver, copper, chromium gold
Belong to nanoparticle, the conductive layer with a thickness of 40~50nm, its face crack geometric parameter and sensitive layer in its natural state
The geometric parameter of structure is essentially identical.
Further, thickness is about 9~18 μm after the sensitive layer is dry.
On the other hand, the present invention also provides a kind of as described above based on the dry resistance-type flexibility strain for mediating self assembly
The preparation method of sensor, comprising the following steps:
S1, preparation colloidal dispersion aqueous liquid dispersion；
The pretreatment of S2, flexible substrates；
S3, self-assembly method is mediated to prepare surface in the upper surface of flexible substrates using colloidal dispersion aqueous liquid dispersion is dry
Sensitive layer with regular crack array；
S4, on sensitive layer crack structtire surface, sputter coating prepares conductive layer；
S5, copper plate electrode is sticked at conductive layer both ends, and draws an enameled conducting wire respectively on copper plate electrode, obtained soft
Property strain transducer.
Preparation method as described above, it is preferable that the step S1 includes following operation: partial size being added into deionized water
For 40~80nm colloidal dispersion solute, certain density colloidal dispersion aqueous liquid dispersion is obtained；By configured gluey point
After granular media aqueous liquid dispersion sonic oscillation, filtering, and filtrate sealing and standing will be obtained by filtration to obtain colloidal dispersion overnight aqueous
Dispersion liquid.Concentration of the colloidal dispersion solute in ionized water is 0.1~0.3g/mL.
Preferably, the material of the colloidal dispersion solute is polystyrene latex particulate, water-based acrylic resin, dioxy
Change any one of titanium nano particle, nano SiO 2 particle.
Preparation method as described above, it is preferable that pre-processed in the step S2 are as follows:
Flexible substrates are successively used to water, acetone and isopropanol ultrasonic cleaning, are then dried to obtain ultra-clean flexible base with nitrogen
Bottom.
Further, the time of water, acetone and isopropanol ultrasonic cleaning is respectively 10~30 minutes.
Preparation method as described above, it is preferable that the step S3 includes following operation: being taken pre-configured in S1
Colloidal dispersion aqueous liquid dispersion sonic oscillation, and it is uniformly dripped into flexible substrates upper end；The flexible substrates are in certain angle
Slant setting is spent, colloidal dispersion aqueous solution, which freely trickles, under the effect of gravity covers flexible substrates surface；It is dried, glue
Moisture in shape dispersion aqueous liquid dispersion evaporates and gradually generates the crackle being parallel to each other on the surface contacted with air.
Further, it is preferable that when dry, flexible substrates can be placed under the isoperibol that temperature is 60~100 DEG C and be carried out；
Inclined angle is preferably 15~45 ゜.
To accelerate the speed that fissured structure generates, flexible substrates are heated using heated at constant temperature platform.Within 5 minutes,
Sensitive layer acrylic resin micelle is dry to be self-assembly of parallel fracture of uniform size, that distribution is orderly.
As above the preparation method of institute, it is preferable that in step s3, time of the sonic oscillation is 10~30 minutes, institute
State flexible substrates with a thickness of 100 μm, the thickness of the sensitive layer is about 15 μm, in step s 4, the thickness of the conductive layer
For 40~50nm.
The flexible strain transducer of above-mentioned preparation can be affixed on human skin surface or be attached on clothing, for realizing people
The wearable monitorings such as body breathing, pulse, gait, joint motions.The flexibility strain transducer realizes glue using dry mediated method
Body particle is self-assembly of parallel crack, has high sensitivity, and quickly and efficiently, preparation process is simple and environmentally-friendly for preparation process, is conducive to
The features such as large area manufactures, at low cost, has broad application prospects.
(3) beneficial effect
The beneficial effects of the present invention are:
(1) for relative to other based on crack structtire resistance strain, of the invention is dry using colloidal particle
The flexible strain transducer of dry self assembly preparation, the geometric parameter of crackle is highly controllable, while external force being avoided to destroy, to guarantee
The high sensitivity and stability of the sensor.
(2) in the present invention crack structtire be using gravity and it is dry act synergistically, realize colloidal particle self assembly, can be with
The crack of specific dimensions is processed according to the actual situation；Furthermore crack structtire generates rapidly, substantially reduces the preparation of sensor
Period.
(3) the flexible strain transducer preparation facilities in the present invention is simple, without complicated technologies such as photoetching；In addition it is fabricated to
This is low, has a extensive future.
Detailed description of the invention
Fig. 1 is the top view of resistance-type flexibility strain transducer；
Fig. 2 is the longitudinal sectional view of resistance-type flexibility strain transducer；
Fig. 3 is crackle array structure；
Fig. 4 is the preparation facilities schematic diagram for resistance-type flexibility strain transducer that an embodiment provides.
[description of symbols]
1: conductive layer；
2: sensitive layer；
3: flexible substrates；
4: first electrode；
5: second electrode；
6: enameled conducting wire；
7: plank；
8: glass slide；
9: dropper；
10: heated at constant temperature platform.
Specific embodiment
In order to preferably explain the present invention, in order to understand, with reference to the accompanying drawing, by specific embodiment, to this hair
It is bright to be described in detail.
Embodiment 1
It is a kind of based on the dry flexible strain transducer for mediating self assembly, as shown in Figure 1, 2 comprising, from top to bottom according to
Secondary arrangement: conductive layer 1, sensitive layer 2 and flexible substrates 3.
1 sputter coating of conductive layer is in the upper surface of sensitive layer 2.In its natural state conductive layer surface crack structtire parameter with
The structural parameters of sensitive layer are essentially identical.
It sets in conductive layer 1 there are two electrode (first electrode 4, second electrode 5), two electrodes draw an enameled conducting wire respectively
6 are used for the acquisition of electric signal.
Two electrodes are not in contact with each other.Preferably, first electrode 4 is located at one end of strain transducer, and second electrode 5, which is located at, answers
Become the other end of sensor, so that crack work area is maximum between two electrodes.
Sensitive layer upper surface has height rule crackle array structure.The crack structtire is that colloidal dispersion is dry by orientation
The dry parallel fracture for mediating the geometric parameter being self-assembly of highly controllable.
Specifically, crackle array structure pattern is as shown in Figure 3.In the present embodiment, phase in crackle array structure pattern is selected
To equivalent width, the higher regular crack of the depth of parallelism.
Preferably, under natural conditions, the width of crackle is in 1-6 μ m, the spacing of crackle for parallel crack array structure
In 10-40 μ m, the depth of crackle is between 1-4 μm.Flexible substrates 3 in flexible strain transducer of the invention use
Flexible material is made.Flexible material is polyamide (PA), dimethyl silicone polymer (PDMS), polyimides (PI) or poly- to benzene two
One of formic acid glycol ester (PET).
Allergy, inflammation, the flexible base of the embodiment of the present invention occurs after pliable pressure sensor and skin contact in order to prevent
Bottom uses polyethylene terephthalate (PET) film, and thickness is about 100 μm.The thickness too thick influence reaction time with it is sensitive
Degree, it is too thin, stability is influenced, so using with a thickness of 100 μm.
In order to guarantee that the crack structtire of flexible strain transducer has higher sensitivity, sensitive layer colloid film thickness is unsuitable
It is too low；In order to make flexible strain transducer have excellent flexibility and stability, sensitive layer colloid film thickness is unsuitable excessively high；It is excellent
It is selected as 15 μm.
Preferably, the material of conductive layer is silver-colored (Ag) nanoparticle；With a thickness of 50nm.
Embodiment 2
The present embodiment provides a kind of preparation method based on the dry resistance-type flexibility strain transducer for mediating self assembly, tools
Body, method includes the following steps:
S1, acrylic resin colloid water-borne dispersions are prepared.
In the present embodiment, the thin film thickness gradient formed under gravity stream effect using aqueous colloidal dispersion, using no instrument
Scalable technology is prepared for parallel crack array.
Specifically, step S1 includes:
S101, the water-based acrylic resin that partial size is 40-80nm is added into deionized water, obtaining concentration is 0.3g/mL
Acrylic resin water-borne dispersions.
S102, by configured acrylic resin water-borne dispersions sonic oscillation 30min, be then filtered, filtered
Liquid.
S103, the filtrate being obtained by filtration is sealed with air-tight bottle, stands overnight to obtain the dispersion of acrylic resin colloid
Body.
The pretreatment of S2, flexible substrates.
In the present embodiment, it in order to avoid substrate surface impurity effect sensitive layer fissured structure surface quality, needs making
Cleaning pretreatment operation is carried out to flexible substrates before standby, specific as follows:
S201, flexible substrates polyethylene terephthalate (PET) is cut into 8 × 3cm in advance2Rectangular block.
S202, successively use deionized water, acetone and isopropanol in the ultrasonic device of 300W the flexible substrates cut
Each ultrasonic 20 minutes, obtain ultra-clean flexible substrates.
S3, self-assembly method is mediated to prepare surface in the upper surface of flexible substrates using colloid dispersion aqueous solution is dry
Sensitive layer with regular crack array, as shown in Figure 4.
S301, the pre-configured acrylic resin colloid of 1ml step S1 and sonic oscillation 30 minutes are extracted.
S302, one piece of rectangle plank 7 is tilted to 30 ゜ placement, plank 7 will be attached to adhesive tape through the processed flexible substrates of S2
Surface takes one piece of clean laboratory glass slide 8 to be fixed on the lower end of flexible substrates 3, prevents colloid from overflowing under the effect of gravity
Flexible boundary out.
S303, one piece of clean laboratory glass slide 8 is taken vertically to be placed on the upper ends of flexible substrates 3, then with rubber head dropper 9
Or syringe by acrylic resin colloid, along glass slide 8, uniformly hold on a flexible substrate by drop coating.Under the effect of gravity, soft
Property the trickling of 3 upper end colloid of substrate, until entire 3 surface of flexible substrates of uniform fold.
S304, a heated at constant temperature platform 10 is placed below plank, and is set as 60 DEG C and flexible substrates is heated, to add
The dry speed of fast colloid.
Within 5 minutes, colloid is dry to be completed to will form one layer of sensitive layer film, and film surface can be (flexible along dry direction
The long side of substrate) there is size rule, orderly aligned crackle array structure.Linear distribution is integrally presented in this array, but
Starting occur the orthogonal crackle of fraction in dry region.In the present embodiment, 15 μm of the thickness ≈ of sensitive layer, crackle
Under natural conditions, width is in 1-6 μ m, and crack spacing is in 10-40 μ m, and crack depth is at 1-4 μm for array structure
Between.The principle that sensitive layer upper surface generates parallel crack is: the colloidal solid with liquid phase solvent is self-assembled into after the drying
A variety of ordered structures.It can be in a wide range of interior crackle knot for forming high-sequential by boundary appropriate and thickness gradient control
Structure.The formation of crack structtire is that stress relaxation caused by the increase of stress caused by solvent loss crack is opened causes with crack opening
Stress relaxation between the direct result that competes.Firstly, the evaporation of the moisture in colloidal aqueous dispersion is by colloid solute nanometer
Particulate condensation does not have crackle generation at one layer of fine and close film, this drying process.Moisture, which further evaporates, makes colloid and air
Contact line generates negative capillary pressure to contract, and the size of capillary pressure and the surface tension of water are directly proportional, half between particle
The radius of curvature of month plate is inversely proportional.Colloidal particle is further compacted by the pressure on vertical substrate direction, and then in parallel side
It is pulled up colloid film.When tensile stress is more than the yield stress of filling nanometer particle film, the strain that stores in film
It can be come out by creating new sediment-water interface release, to form crackle.When dry forward position is moved inward due to lasting evaporation
When, the crackle newly formed can be used as nucleation site, and propagate along the direction in dry forward position.Finally, altogether by gravity and drying
Under same-action, parallel crack, no significant defect are generated on the surface of flexible substrates.
Wherein, the width of crackle and crack spacing are related to the tilt angle of plank, and crack depth is related to width.It is logical
Thickness gradient can be formed in vertical direction by crossing the rationally control inclined angle of plank, and then generate the crackle of different in width with full
The different working condition requirement of foot.
S4, the nano grain of silver conducting layer of one layer of 50nm thickness of coating is sputtered on sensitive layer crack structtire surface.Conductive layer exists
The dimensional parameters of its face crack dimensional parameters and sensitive layer are essentially identical under natural conditions.
S5, the preferable region of the depth of parallelism is cut in sensitive layer surface selection crackle array structure, having a size of (l ×
w)30mm×10mm。
S6, copper plate electrode is sticked at conductive layer both ends, and draws an enameled conducting wire respectively, obtain flexible strain sensing
Device.Wherein, two electrodes mutually disjoint while guaranteeing the respectively both ends in sensitive layer as far as possible, to obtain maximum effective workspace
Domain.
Embodiment 3
The present embodiment additionally provides another system based on the dry resistance-type flexibility strain transducer for mediating self assembly
Preparation Method, specifically, method include the following steps:
S1, polystyrene colloid is prepared.
In the present embodiment, the thin film thickness gradient formed under gravity stream effect using aqueous colloidal dispersion, using no instrument
Scalable technology is prepared for parallel crack array.
Specifically, step S1 includes:
S101, the polystyrene latex particulate that partial size is 50nm is added into deionized water, obtaining concentration is 0.1g/mL's
Polystyrene latex water-borne dispersions.
S102, by configured polystyrene latex water-borne dispersions sonic oscillation 30min, be then filtered, obtain
Filtrate.
S103, the filtrate being obtained by filtration is sealed with air-tight bottle, stands overnight to obtain polystyrene colloid.
The pretreatment of S2, flexible substrates.
In the present embodiment, it in order to avoid substrate surface impurity effect sensitive layer fissured structure surface quality, needs making
Cleaning pretreatment operation is carried out to flexible substrates before standby, specific as follows:
S201, flexible substrates polyethylene terephthalate (PET) is cut into 8 × 3cm in advance2Rectangular block.
S202, successively use deionized water, acetone and isopropanol in the ultrasonic device of 300W the flexible substrates cut
Each ultrasonic 20 minutes, obtain ultra-clean flexible substrates.
S3, self-assembly method is mediated to prepare surface in the upper surface of flexible substrates using colloid dispersion aqueous solution is dry
Sensitive layer with regular crack array.
S301, the pre-configured polystyrene colloid of 1ml step S1 and sonic oscillation 20 minutes are extracted.
S302, one piece of rectangle plank 7 is tilted to 35 ゜ placement, plank 7 will be attached to adhesive tape through the processed flexible substrates of S2
Surface takes one piece of clean laboratory glass slide 8 to be fixed on the lower end of flexible substrates 3, prevents colloid from overflowing under the effect of gravity
Flexible boundary out.
S303, one piece of clean laboratory glass slide 8 is taken vertically to be placed on the upper ends of flexible substrates 3, then with rubber head dropper 9
Or syringe by polystyrene colloid, along glass slide 8, uniformly hold on a flexible substrate by drop coating.Under the effect of gravity, flexible
3 upper end colloid of substrate trickling, until entire 3 surface of flexible substrates of uniform fold.
S304, a heated at constant temperature platform 10 is placed below plank, and is set as 70 DEG C and flexible substrates is heated, to add
The dry speed of fast colloid.
Within 5 minutes, colloid is dry to be completed to will form one layer of sensitive layer film, and film surface can be (flexible along dry direction
The long side of substrate) there is size rule, orderly aligned crackle array structure.
S4, on sensitive layer crack structtire surface, sputter coating prepares silver conductive layer 40nm；
S5, copper plate electrode is sticked at conductive layer both ends, and draws an enameled conducting wire respectively on copper plate electrode, obtained soft
Property strain transducer.
The preparation method and photoetching, femtosecond laser, nano impression of flexible resistive strain transducer provided by the present invention
Etc. technologies compare, easy to operate, required equipment is the common instrument in laboratory, and the preparation of sensitive layer is at low cost within 5 minutes
And it is easily achieved large area manufacture.By taking photoetching as an example, general photoetching process will undergo substrate surface cleaning, drying, linging, rotation
Resist coating, it is soft dry, alignment exposure, it is rear dry, development, it is hard dry, etching, the processes such as detection, preparation process is complicated for operation, preparation week
Phase is long.Furthermore production line and the low side litho machine of research and development are close, contact photoetching machine, resolution ratio usually a few micrometers with
On, high-precision litho machine cost is high, it is difficult to accomplish the large area manufacture of strain transducer.It should be clear that the present invention is simultaneously
It is not limited to specific configuration described above and shown in figure and processing.For brevity, it is omitted here to known
The detailed description of method.
In the above-described embodiments, several specific steps have been described and illustrated as example.But method mistake of the invention
Journey is not limited to described and illustrated specific steps, and those skilled in the art can make after understanding spirit of the invention
Various changes, modification and addition out, or the sequence between changing the step.
Claims (10)
1. a kind of based on the dry resistance-type flexibility strain transducer for mediating self assembly, characterized in that it comprises:
It is from bottom to top arranged successively: flexible substrates, sensitive layer, conductive layer；
The flexible substrates are the film of flexible material；
The sensitive layer is made by the dry film generated of colloidal dispersion；Its upper surface has size relatively uniform, and distribution is equal
Even crackle array structure；
The conductive layer is equipped with a pair of of copper plate electrode, and two electrodes are located at the both ends of conductive layer；
The electrode draws an enameled conducting wire.
2. resistance-type flexibility strain transducer as described in claim 1, which is characterized in that the crackle array structure is gluey
Dispersion mediates the parallel fracture being self-assembly of by the way that orientation is dry；In a free state, the width of crackle is in 1~6 μm of model
In enclosing, the spacing of crackle is in 10~40 μ ms, and the depth of crackle is in 1~4 μ m.
3. resistance-type flexibility strain transducer as described in claim 1, which is characterized in that the colloidal dispersion of the sensitive layer
For any in polystyrene latex particulate, water-based acrylic resin, titania nanoparticles, nano SiO 2 particle
Kind.
4. resistance-type flexibility strain transducer as described in claim 1, which is characterized in that the flexible material be polyamide,
One of dimethyl silicone polymer, polyimides or polyethylene terephthalate.
5. resistance-type flexibility strain transducer as described in claim 1, which is characterized in that the material of the conductive layer be gold,
Silver, copper or chromium metal nanoparticle, the conductive layer with a thickness of 40~50nm, its face crack geometric parameters in its natural state
Number is essentially identical with the geometric parameter of sensitive layer structure；Thickness is about 9~18 μm after the sensitive layer is dry.
6. a kind of preparation method of resistance-type flexibility strain transducer, which comprises the following steps:
S1, preparation colloidal dispersion aqueous liquid dispersion；
The pretreatment of S2, flexible substrates；
S3, self-assembly method is mediated to prepare surface band in the upper surface of flexible substrates using colloid dispersion aqueous liquid dispersion is dry
The sensitive layer of regular crackle array；
S4, on sensitive layer crack structtire surface, sputter coating prepares conductive layer；
S5, copper plate electrode is sticked at conductive layer both ends, and draws an enameled conducting wire respectively on copper plate electrode, obtained flexibility and answer
Become sensor.
7. method as claimed in claim 6, which is characterized in that the step S1 includes following operation: being added into deionized water
Entering partial size is 40~80nm colloidal dispersion solute, obtains certain density colloidal dispersion aqueous liquid dispersion, after sonic oscillation,
Filtering, obtains required colloidal dispersion aqueous liquid dispersion for filtrate sealing and standing overnight；Colloidal dispersion solute is in ionized water
Concentration be 0.1~0.3g/mL；The material of the colloidal dispersion solute is polystyrene latex particulate, water soluble acrylic acid tree
Any one of rouge, titania nanoparticles, nano SiO 2 particle.
8. preparation method as claimed in claim 6, which is characterized in that the step S2 pretreatment is successively to use flexible substrates
Water, acetone and isopropanol ultrasonic cleaning, it is dry with nitrogen later.
9. preparation method as claimed in claim 6, which is characterized in that the step S3 includes following operation: taking in S1 in advance
Configured colloidal dispersion aqueous liquid dispersion sonic oscillation, and it is uniformly dripped into flexible substrates upper end；The flexible substrates
Slant setting at an angle, colloidal dispersion aqueous solution, which freely trickles, under the effect of gravity covers flexible substrates surface；Into
Row drying, moisture evaporation in colloidal dispersion aqueous solution simultaneously gradually generate splitting of being parallel to each other on the surface contacted with air
Line.
10. preparation method as claimed in any one of claims 7-9, which is characterized in that in step s3, it is described ultrasound when
Between be 10~30 minutes, the flexible substrates with a thickness of 100 μm, the sensitive layer with a thickness of 15 μm, in step s 4, institute
State conductive layer with a thickness of 40~50nm.
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| CN114459333A (en) * | 2022-01-26 | 2022-05-10 | 浙江大学 | Tensile strain sensor based on porous flexible material |
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