CN109659153A - A kind of metal oxide and the compound micro comb energy storage electrode of carbon nanotube - Google Patents
A kind of metal oxide and the compound micro comb energy storage electrode of carbon nanotube Download PDFInfo
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- CN109659153A CN109659153A CN201811548345.5A CN201811548345A CN109659153A CN 109659153 A CN109659153 A CN 109659153A CN 201811548345 A CN201811548345 A CN 201811548345A CN 109659153 A CN109659153 A CN 109659153A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
- H01G11/00—Hybrid capacitors, i.e. capacitors having different positive and negative electrodes; Electric double-layer [EDL] capacitors; Processes for the manufacture thereof or of parts thereof
- H01G11/22—Electrodes
- H01G11/26—Electrodes characterised by their structure, e.g. multi-layered, porosity or surface features
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
- H01G11/00—Hybrid capacitors, i.e. capacitors having different positive and negative electrodes; Electric double-layer [EDL] capacitors; Processes for the manufacture thereof or of parts thereof
- H01G11/22—Electrodes
- H01G11/30—Electrodes characterised by their material
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
- H01G11/00—Hybrid capacitors, i.e. capacitors having different positive and negative electrodes; Electric double-layer [EDL] capacitors; Processes for the manufacture thereof or of parts thereof
- H01G11/22—Electrodes
- H01G11/30—Electrodes characterised by their material
- H01G11/32—Carbon-based
- H01G11/36—Nanostructures, e.g. nanofibres, nanotubes or fullerenes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
- H01G11/00—Hybrid capacitors, i.e. capacitors having different positive and negative electrodes; Electric double-layer [EDL] capacitors; Processes for the manufacture thereof or of parts thereof
- H01G11/22—Electrodes
- H01G11/30—Electrodes characterised by their material
- H01G11/46—Metal oxides
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/13—Energy storage using capacitors
Abstract
The invention discloses the compound micro comb energy storage electrodes of a kind of metal oxide and carbon nanotube that belong to micro- energy storage device field.The energy storage electrode is to sputter current collector layers on the glass substrate, and etch comb electrodes structure, and coating SU-8 glue forms comb teeth fluid channel, prepares metal oxide and metal oxide and carbon nano-tube combination electrode function film on comb structure electrode surface；Preparing the electrode is to obtain micro comb by etching first；Pass through cathode coelectrodeposition, in micro- comb electrodes surface depositing metal oxide and carbon nanotube complex function thin film, the electrode has unique microstructure, carbon nanotube forms loose porous spacial framework, metal oxide particle is evenly distributed in the surface of carbon nanotube spacial framework, is obviously improved the energy-storage property of electrode.Specific capacity is up to 208.5mF/cm2, capacitor energy density, power density are effectively promoted, can be used for electrode of super capacitor.
Description
Technical field
The invention belongs to micro- energy storage device field, in particular to a kind of metal oxide and the compound micro- comb of carbon nanotube
Toothing energy storage electrode.
Technical background
Electrode specific surface area is to influence one of the key factor of micro- energy devices such as supercapacitor, by researcher's
Extensive concern.The specific surface area for improving energy storage electrode mainly has two big technological approaches, one is electrode active material passes through to be formed
Loose porous spacial framework significantly increases the interfacial area that electrochemical reaction can occur, the second is electrode surface is logical
The micro-nano technologies technique such as over etching forms structure in the faces of shapes such as comb teeth, increases the specific surface area of electrode.Therefore, by this two
The item ingenious combination of technological approaches has loose and porous structure by electrodeposition technology preparation on the micro comb surface of electrode
Metal oxide and carbon nanotube complex function thin film, will effectively promoted energy storage electrode specific surface area and capacity density, promote
Into the broader applications of micro- energy storage device such as supercapacitor.
Summary of the invention
The object of the present invention is to provide a kind of metal oxides and the compound micro comb energy storage electrode of carbon nanotube；
It is characterized in that, sputtering Ti or Au current collector layers on the glass substrate, and comb electrodes structure is etched, in comb electrodes
In substrate of glass between comb teeth and other than comb electrodes structure, coating SU-8 glue forms comb teeth fluid channel, in comb structure electricity
Pole surface prepares metal oxide and metal oxide and carbon nano-tube combination electrode function film；Pass through comb teeth fluid channel
Supporting role, metal oxide and carbon nano-tube combination electrode function film can a large amount of depositions in comb electrodes, attachment jail
Gu due to will not largely fall off because of being vigorously stirred in deposition process；Simultaneously because the porous structure of carbon nanotube makes oxide material
Uniform deposition improves the energy-storage property of micro comb energy storage electrode；
The SU-8 glue prevents its short circuit, while SU-8 glue institute as the slider between micro comb energy storage electrode
Channel of the fluid channel of formation as metal oxide and carbon nano-tube combination electrode function film deposition, is metal oxide
Support is provided with carbon nano-tube combination electrode function film, the metal oxidation of higher thickness is obtained under the premise of preventing short circuit
Object and carbon nano-tube combination electrode function film, promote the specific capacity and energy density of device；Also, the structure is utmostly
Ground shortens electrolyte intermediate ion diffusion length, in limited package area, improves to amplitude peak effective electrode surface
Product.
The metal oxide includes ruthenium-oxide, manganese oxide, nickel oxide or cobalt oxide；It is preferred that ruthenium-oxide.
A kind of preparation method of metal oxide and the compound micro comb energy storage electrode of carbon nanotube, feature exist
In specific process step includes:
(a) Ti the or Au current collector layers of 40nm-120nm are sputtered on the glass substrate；
(b) by the method for graphical photoetching, comb electrodes structure is etched；
(c) spin coating SU-8 glue in the substrate of glass between the comb teeth of comb electrodes and other than comb electrodes structure, exposure
Development forms SU-8 glue comb teeth fluid channel；
(d) negative electrode electro-deposition function film is being combed by being co-deposited metal oxide and carbon nanotube in deposition liquid
Toothing electrode surface prepares metal oxide and carbon nanotube complex function thin film, promotes the energy storage characteristic of electrode；Specifically
Metal oxide and carbon nanotube complex function thin film preparation process are as follows:
It is carried out using multi-walled carbon nanotube (MCNT) and ruthenium-oxide compound；Carbon nanotube 1g, RuCl are taken in experiment3
0.05g, NaNO30.85g and 50mL deionized water are configured to be co-deposited solution, and ultrasonic vibration 30 minutes, so that Ru3+It is received by carbon
Mitron sufficiently adsorbs, based on the co-deposition solution after ultrasonic treatment, using bipolar electrode cathodic deposition, setting deposition electricity
Current density is 500mA/cm2, sedimentation time is 2000 seconds；
Obtained electrode microstructure surface is very smooth, and patterned SU-8 glue is very close in conjunction with substrate of glass, protects
It is vertical to hold side wall, does not tilt and splits, while its insulating properties and chemical stability are very high.
The ruthenium-oxide and carbon nano-tube coextruded film prepared in SU-8 glue comb teeth fluid channel, with deposition film
Thickness is continuously increased, the interlaced formation 3 D stereo helicoidal structure of carbon nanotube itself, support entire thin film system to
Upper growth, and will not fall off or crack；Found out by high resolution electron microscopy, carbon nano-tube coextruded film itself has
There is flourishing spacial framework, ruthenium-oxide particle is uniformly distributed on carbon nanotube porous structure；This space structure is not only
The complex function thin film deposition rate in micro-channel structure is improved, film inner nanotube network architecture is also more sent out
Up to it is uniform, also enhanced film activity, improve electrode specific capacity, reduce electrode impedance；And ion diffusion length is reduced, it is promoted
Electron-transport efficiency promotes conductivity, achievees the purpose that promote electrode activity.
The beneficial effects of the invention are as follows (1) by calculating, and obtained ruthenium-oxide electrode and combination electrode are in different scanning
Electrode specific capacity comparison under rate, in 10mV/s, the specific capacity measured is 208.5mF/cm2, when sweep speed increases to
When 100mV/s, specific capacity drops to 132mF/cm2, fall 36.6%.At the same time, pure zirconia ruthenium electrode scanning speed
During rate increases to 100mV/s from 10mV/s, specific capacity has dropped 55%.It is multiple that this also shows ruthenium-oxide/carbon nanotube
The stability that capacity is kept under composite electrode high power.
(2) relative to ruthenium-oxide electrode, composite film electrode, still can be real under the conditions of powerful discharge current
Existing stable discharging.Meanwhile the charging and discharging curve of composite film electrode can be calculated closer to ideal isosceles triangle, charge and discharge
Electrical efficiency reaches 93.7%.And ruthenium-oxide electrode charging and discharging curve symmetry and bad, efficiency for charge-discharge only has 67%.
(3) with the increase of power density, the rate of combination electrode energy density decline is slower, energy density and function
Rate density is better than ruthenium-oxide electrode.This addition for exactly having benefited from carbon nano-tube material is formed by reticulated porous structures, increases
Add deposit electrode material amount, improved conductivity, enhances electrode activity.
Detailed description of the invention
Fig. 1 is the comb teeth-shaped supercapacitor structures schematic diagram based on SU-8 glue fluid channel.
Fig. 2 is the micro super capacitor processing process based on comb structure；Wherein, (a) splashes on the glass substrate
Penetrate Au current collector layers；(b) by the method for graphical photoetching, comb electrodes structure is etched；(c) spin coating on the glass substrate
SU-8 glue, exposure development form SU-8 glue comb teeth fluid channel；(d) negative electrode electro-deposition function film.
Fig. 3 is the comb structure electron microscope before electro-deposition.
Fig. 4 is the ruthenium-oxide film electron microscope on comb structure, wherein the oxidation ruthenium film on (a) single electrode；(b) high
Multiplying power ruthenium-oxide film electron microscope.
Oxidation ruthenium film when Fig. 5 is sedimentation time 3000s.
Fig. 6 is ruthenium-oxide and carbon nano-tube coextruded film electron microscope, wherein the electrode material in (a) fluid channel scans electricity
Mirror figure；(b) carbon nanotube composite mesh structure electron microscope.
Fig. 7 is the transmission electron microscope picture of ruthenium-oxide and carbon nano tube compound material.
Fig. 8 is the ruthenium-oxide and carbon nano-tube coextruded film on two-dimensional surface.
Fig. 9 is combination electrode thin films growing microstructure schematic diagram: wherein (a) comb teeth plane electrode, (b) comb teeth fluid channel electricity
Pole, (C) comb teeth planar electrode surface structure chart, (d) comb teeth fluid channel electrode surface structures figure.
Figure 10 is that combination electrode specific capacity compares under different scanning rates.
Figure 11 is ruthenium-oxide electrode direct current charge-discharge test curve.
Figure 12 is composite electrode direct current charge-discharge test curve.
Specific embodiment
The present invention provides a kind of metal oxide and the compound micro comb energy storage electrode of carbon nanotube；Below with reference to
Attached drawing is explained.
Fig. 1 show the comb teeth-shaped supercapacitor structures schematic diagram based on SU-8 glue fluid channel.As shown in the figure, in glass
Ti or Au current collector layers are sputtered in glass substrate, and etch comb electrodes structure, and between the comb teeth of comb electrodes and comb teeth is electric
In substrate of glass other than the structure of pole, coating SU-8 glue forms comb teeth fluid channel, prepares metal oxygen on comb structure electrode surface
Compound and metal oxide and carbon nano-tube combination electrode function film；Pass through the supporting role of comb teeth fluid channel, metal oxidation
Object and carbon nano-tube combination electrode function film can a large amount of depositions in comb electrodes, adhesion-tight will not be because of deposition process
In be vigorously stirred and largely fall off；Simultaneously because the porous structure of carbon nanotube makes oxide material uniform deposition, improve micro- comb
The energy-storage property of toothing energy storage electrode.The metal oxide includes ruthenium-oxide, manganese oxide, nickel oxide or cobalt oxide；It is preferred that
Ruthenium-oxide.
Using SU-8 glue comb teeth micro-channel structure, ruthenium-oxide (RuO is prepared on comb structure electrode surface2·nH2) and oxygen O
Change ruthenium/carbon nanotube (RuO2·nH2O/CNT) combination electrode function film.Pass through the supporting role of comb teeth fluid channel, compound electric
Pole function film can largely deposit in comb electrodes, avoid electrode function film big because being vigorously stirred during the deposition process
Amount falls off, and it is very difficult to deposit, while using the porous structure of carbon nanotube, making ruthenium-oxide depositing homogeneous, to improve the storage of electrode
It can performance.
The present invention prevents electric pole short circuit as the slider between electrode by SU-8 glue, while SU-8 glue is formed by
Fluid channel can be used as the channel of combination electrode function film deposition, provide support for combination electrode function film, can be anti-
The preparation of the combination electrode function film of higher thickness is only realized under the premise of short circuit, specific capacity and the energy for promoting device are close
Degree.This structure also farthest shortens electrolyte intermediate ion diffusion length, in limited package area, most substantially
Improve the effective area of micro comb energy storage electrode to degree.
Metal oxide according to the present invention and the compound micro comb energy storage electrode processing technology stream of carbon nanotube
Journey is as shown in Fig. 2, concrete technology flow process includes:
(a) Ti the or Au current collector layers of 40nm-120nm are sputtered on the glass substrate (shown in such as Fig. 2 (a))；
(b) by the method for graphical photoetching, etch comb electrodes structure (shown in such as Fig. 2 (b))
(c) spin coating SU-8 glue in the substrate of glass between the comb teeth of comb electrodes and other than comb electrodes structure, exposure
Development forms SU-8 glue comb teeth fluid channel (shown in such as Fig. 2 (c))；
(d) negative electrode electro-deposition function film (such as Fig. 2 (d) shown in), by be co-deposited in deposition liquid metal oxide with
Carbon nanotube prepares metal oxide and carbon nanotube complex function thin film on comb structure electrode surface, promotes the storage of electrode
It can characteristic；Specific metal oxide and carbon nanotube complex function thin film preparation process are as follows:
It is carried out using multi-walled carbon nanotube (MCNT) and ruthenium-oxide compound；Carbon nanotube 1g, RuCl are taken in experiment3
0.05g, NaNO30.85g and 50mL deionized water are configured to be co-deposited solution, and ultrasonic vibration 30 minutes, so that Ru3+It is received by carbon
Mitron sufficiently adsorbs, based on the co-deposition solution after ultrasonic treatment, using bipolar electrode cathodic deposition, setting deposition electricity
Current density is 500mA/cm2, sedimentation time is 2000 seconds；As shown in figure 3, obtained electrode microstructure surface is very smooth, figure
The SU-8 glue of shape is very close in conjunction with substrate of glass, keeps side wall vertical, does not tilt and split, while its insulating properties
It is very high with chemical stability.
Electrode material is used as using ruthenium-oxide (RuO2nH2O), when sedimentation time is 2000s, prepared ruthenium-oxide
Shown in film such as Fig. 4 (a).For the ease of comparison, single-sided electrode only deposited.By the electro-deposition of 2000s, ruthenium film is aoxidized
Deposition thickness is less than 5 μm, height of 40 μm well below SU-8 glue fluid channel.(b) shown in Fig. 4 is high-resolution oxidation
Ruthenium film electron microscope, it can be seen that it is graininess that this method, which deposits obtained oxidation ruthenium film, partial size 30nm~
50nm.Since all active electrode materials are all gathered in electrode base, ion diffusion length is long, and electron-transport impedance is big, and
And active electrode material is very few, electrode capacity is relatively low.It solves these problems, the method for increasing sedimentation time can be used first.Increase
After adding sedimentation time to 3000s, prepared ruthenium-oxide electrode film causes electrode as shown in figure 5, sedimentation time is too long
It the cracking of surface film and falls off.
By the method for compound porous carbon nanotube, the present invention be prepared in SU-8 glue comb teeth fluid channel ruthenium-oxide with
Carbon nanotube complex function thin film, from fig. 6, it can be seen that being continuously increased with deposited film thickness, carbon nanotube itself phase
It mutually is staggered to form 3 D stereo helicoidal structure, entire thin film system is supported to grow up, and it is existing to fall off or chap
As.The thickness of complex function thin film is already close to 40 μm, close to the height of fluid channel.It can be seen by high resolution electron microscopy figure
Out, carbon nano-tube film itself has flourishing spacial framework, and ruthenium-oxide particle is uniformly distributed in the porous knot of carbon nanotube
On structure.This point can be also verified from transmission electron microscope (TEM) Fig. 7.This space structure not only can be improved in fluid channel
Complex function thin film deposition rate in structure, film inner nanotube network architecture is also more flourishing and uniform, can also
With enhanced film activity, improve electrode specific capacity, reduction electrode impedance.
As control, ruthenium-oxide and carbon nanotube complex function thin film are also prepared on two-dimensional surface electrode, as a result such as
Shown in Fig. 8.As can be seen that the not support of three-dimensional microstructures, carbon nanotube deposition is obviously insufficient, is randomly distributed in two dimension
On matrix.Just as stated earlier, the main problem of carbon nano-tube material deposition be with substrate contact and insecure, it is easy to fall off,
And three-dimensional micro-channel structure just provides supporting role for the deposition of composite nano materials, prevents film separation.
Based on fluid channel comb structure and the nano compound film of common plane structure growth schematic diagram as shown in figure 9, its
In (a) comb teeth plane electrode, (b) comb teeth fluid channel electrode, (C) comb teeth planar electrode surface structure chart, (d) comb teeth fluid channel
Electrode surface structures figure.Due to the supporting role of fluid channel, carbon nanotube can form interleaving network knot abundant in runner
Structure, ruthinium oxide material may be uniformly distributed among porous network structure.To reduce ion diffusion length, promotes electronics and pass
Defeated efficiency promotes conductivity, achievees the purpose that promote electrode activity.
By calculating, the electrode specific capacity pair of obtained ruthenium-oxide electrode and combination electrode under different scanning rates
Than as shown in Figure 10.In 10mV/s, the specific capacity measured is 208.5mF/cm2, when sweep speed increases to 100mV/s,
Specific capacity drops to 132mF/cm2, fall 36.6%.At the same time, pure zirconia ruthenium electrode sweep speed is from 10mV/s
During increasing to 100mV/s, specific capacity has dropped 55%.This also shows ruthenium-oxide/carbon nano-tube combination electrode Gao Gong
The stability that capacity is kept under rate.
The present invention machined MEMS comb teeth using metal oxide and the compound micro comb energy storage electrode of carbon nanotube
Structure ultracapacitor device has carried out direct current charge-discharge test.Simultaneously as a comparison with the test of ruthenium-oxide membrane electrode.It surveys
Test result is as is illustrated by figs. 11 and 12.As can be seen that composite film electrode is in powerful electric discharge relative to ruthenium-oxide electrode
Under current condition, stable discharging still may be implemented.Meanwhile the charging and discharging curve of composite film electrode is closer to ideal etc.
Lumbar triangle shape, can be calculated, and efficiency for charge-discharge reaches 93.7%.And ruthenium-oxide electrode charging and discharging curve symmetry and bad, it fills
Discharging efficiency only has 67%.
By calculating, the device specific capacities of two kinds of electrodes, energy density and power density are as shown in Table 1 and Table 2.For
Ruthenium-oxide electrode, it is 8mA/ in current density that in current density 120mA/cm2, power density highest, which is 44.04mW/cm2,
When cm2, specific capacitance is up to 42.45mF/cm2, and energy density reaches 20.26 mJ/cm2 of highest.For combination electrode, in electricity
When current density 120mA/cm2, specific capacitance still reaches 28.70 mF/cm2, at this time power density highest, reaches 46.92mW/
Cm2, when current density is 8mA/cm2, specific capacitance is up to 53.79mF/cm2, and energy density reaches highest 25.99mJ/
cm2.It can be seen that the increase with power density simultaneously, the rate of combination electrode energy density decline is slower, and energy is close
Degree and power density are better than ruthenium-oxide electrode.This addition for exactly having benefited from carbon nano-tube material is formed by mesh structural porous
Structure increases deposit electrode material amount, improves conductivity, enhances electrode activity.
Power density and energy density under 1 ruthenium-oxide electrode difference current density of table
Power density and energy density under 2 composite electrode difference current density of table
Claims (5)
1. a kind of metal oxide and the compound micro comb energy storage electrode of carbon nanotube；It is characterized in that, in substrate of glass
Upper sputtering Ti or Au current collector layers, and etch comb electrodes structure, between the comb teeth of comb electrodes and comb electrodes structure
In substrate of glass in addition, coating SU-8 glue formed comb teeth fluid channel, comb structure electrode surface prepare metal oxide and
Metal oxide and carbon nano-tube combination electrode function film；By the supporting role of comb teeth fluid channel, metal oxide and carbon
Nanometer tube combination electrode function film can a large amount of depositions in comb electrodes, adhesion-tight will not be because of the play in deposition process
It is strong stirring and largely fall off；Simultaneously because the porous structure of carbon nanotube makes oxide material uniform deposition, improve micro comb
The energy-storage property of energy storage electrode.
2. metal oxide and the compound micro comb energy storage electrode of carbon nanotube according to claim 1；Its feature exists
In the SU-8 glue prevents its short circuit as the slider between micro comb energy storage electrode, while SU-8 glue is formed by
Channel of the fluid channel as metal oxide and carbon nano-tube combination electrode function film deposition, is metal oxide and carbon nanometer
Pipe combination electrode function film provides support, and the metal oxide and carbon nanometer of higher thickness are obtained under the premise of preventing short circuit
Pipe combination electrode function film promotes the specific capacity and energy density of device；Also, the structure farthest shortens electrolysis
Liquid intermediate ion diffusion length improves to amplitude peak effective electrode area in limited package area.
3. metal oxide and the compound micro comb energy storage electrode of carbon nanotube according to claim 1；Its feature exists
In the metal oxide includes ruthenium-oxide, manganese oxide, nickel oxide or cobalt oxide；It is preferred that ruthenium-oxide.
4. the preparation method of a kind of metal oxide and the compound micro comb energy storage electrode of carbon nanotube, which is characterized in that
Specific process step includes:
(a) Ti the or Au current collector layers of 40 nm-120 nm are sputtered on the glass substrate；
(b) by the method for graphical photoetching, comb electrodes structure is etched；
(c) spin coating SU-8 glue in the substrate of glass between the comb teeth of comb electrodes and other than comb electrodes structure, exposure development,
Form SU-8 glue comb teeth fluid channel；
(d) negative electrode electro-deposition function film, by being co-deposited metal oxide and carbon nanotube in deposition liquid, in comb structure
Electrode surface prepares metal oxide and carbon nanotube complex function thin film, promotes the energy storage characteristic of electrode；Specific metal oxygen
Compound and carbon nanotube complex function thin film preparation process are as follows:
It is carried out using multi-walled carbon nanotube (MCNT) and ruthenium-oxide compound；1 g of carbon nanotube, RuCl are taken in experiment3 0.05 g,
NaNO3 0.85 g and 50 mL deionized waters be configured to be co-deposited solution, ultrasonic vibration 30 minutes so that Ru3+By carbon nanotube
It sufficiently adsorbs, depositing current density is set using bipolar electrode cathodic deposition based on the co-deposition solution after ultrasonic treatment
For 500 mA/cm2, sedimentation time is 2000 seconds；
Obtained electrode microstructure surface is very smooth, and patterned SU-8 glue is very close in conjunction with substrate of glass, keeps side
Wall is vertical, does not tilt and splits, while its insulating properties and chemical stability are very high.
5. the preparation of a kind of metal oxide and the compound micro comb energy storage electrode of carbon nanotube according to claim 4
Method, which is characterized in that the ruthenium-oxide and carbon nano-tube coextruded film prepared in SU-8 glue comb teeth fluid channel, with heavy
Product film thickness is continuously increased, and the interlaced formation 3 D stereo helicoidal structure of carbon nanotube itself supports entire film
System is grown up, and will not be fallen off or crack；Found out by high resolution electron microscopy, carbon nano-tube coextruded film sheet
Body has flourishing spacial framework, and ruthenium-oxide particle is uniformly distributed on carbon nanotube porous structure；This space structure
Not only improve the complex function thin film deposition rate in micro-channel structure, film inner nanotube network architecture is also more
Flourishing and uniform, also enhanced film is active, improves electrode specific capacity, reduces electrode impedance；And ion diffusion length is reduced, it is promoted
Electron-transport efficiency promotes conductivity, achievees the purpose that promote electrode activity.
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