CN109428511A - A kind of vibrational energy collector of multistage coupled structure - Google Patents

A kind of vibrational energy collector of multistage coupled structure Download PDF

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Publication number
CN109428511A
CN109428511A CN201710742799.5A CN201710742799A CN109428511A CN 109428511 A CN109428511 A CN 109428511A CN 201710742799 A CN201710742799 A CN 201710742799A CN 109428511 A CN109428511 A CN 109428511A
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CN
China
Prior art keywords
cantilever beam
mass block
vibrational energy
cantilever
energy collector
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CN201710742799.5A
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Chinese (zh)
Inventor
牟笑静
周鸿�
尚正国
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Qingdao Feinisi Microelectronics Technology Co Ltd
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Qingdao Feinisi Microelectronics Technology Co Ltd
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Priority to CN201710742799.5A priority Critical patent/CN109428511A/en
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    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/18Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing electrical output from mechanical input, e.g. generators
    • H02N2/186Vibration harvesters

Abstract

The invention discloses a kind of vibrational energy collectors of multistage coupled structure, including cantilever beam structure, the cantilever beam structure to be mainly made of cantilever beam, mass block and piezoelectric layer, and the piezoelectric layer successively includes top electrode, piezoelectric material and lower electrode from top to bottom;The piezoelectric layer is set to the surface of the cantilever beam, and the mass block is connected to the cantilever beam;The vibrational energy collector includes at least two cantilever beam structures, is coupled between each cantilever beam structure.The connection type that the present invention is coupled by using cantilever beam multistage, and make the coefficient of elasticity between not at the same level different, to widen the frequency range of energy harvester.

Description

A kind of vibrational energy collector of multistage coupled structure
Technical field
The present invention relates to collection of energy fields, and in particular to a kind of vibrational energy collector of multistage coupled structure.
Background technique
With the development of science and technology, the improvement of people's living standards and the support energetically of country, Internet of Things achieve greatly Development, also become each colleges and universities, research institution and company research hot spot.Wherein, wireless sensor network (WSN) is Internet of Things Key provides the information of substance for Internet of Things.The sensor node of wireless sensor network has the characteristics that quantity is big, small in size, Need energy supply module that is small-sized, persistently energizing.And the MEMS of (Energy Harvesting) is collected based on environmental energy Micro- energy theoretically, can provide inexhaustible energy for wireless sensor node, therefore either academia is still Industry all produces great interest to the confession power technology based on micro-nano collection of energy.
In addition, vibrational energy is a kind of energy most generally existing in nature, the mode of collection includes piezoelectric type, electromagnetism Formula is electrostatic etc..Piezoelectric type energy collector generally uses cantilever beam structure, compared with the collection mode of other modes, has phase The advantages that when simple structure, energy density is high, and the production of micromechanics (MEMS) processing technology can be used, becomes collection of energy in recent years The hot spot in device field.
All there is some disadvantages for the current vibrational energy collector for being mostly based on piezoelectric effect: (1) existing at present Output voltage/power of piezoelectric energy collector is too low, it is difficult to meet the requirement of energy stores and driving element;(2) work belt Width is relatively narrow, can only very a small range just has larger output near resonant frequency.Based on this, some patents also proposed some solutions Certainly method.Such as Chinese patent CN103647475A(publication date: 2014.03.19) it is deformed using tip with Basement collision, from And piezoelectric patches is driven to deform, and then the mode for generating charge carries out collection of energy.The tip of the collector need to be sent out with substrate Raw collision, tip strength is originally smaller, and multiple impacts will lead to damage.Chinese patent CN105262371A(publication date: 2016- Frequency range 01-20) is widened using the collector unit array of different parameters structure.Each receipts of the energy harvester of which It is different to collect unit resonance frequency, therefore no matter works in which frequency, other energy collection units are due to vibration in array Frequency be not its resonance frequency and in working condition is stagnated, so the general work efficiency of the energy harvester is lower.
Summary of the invention
In view of the deficiencies of the prior art, the present invention is intended to provide a kind of vibrational energy collector of multistage coupled structure, is adopted The connection type coupled with cantilever beam multistage, and make the coefficient of elasticity between not at the same level different, to widen energy harvester Frequency range.
To achieve the goals above, the present invention adopts the following technical scheme:
A kind of vibrational energy collector of multistage coupled structure, including cantilever beam structure, the cantilever beam structure is mainly by cantilever Beam, mass block and piezoelectric layer composition, the piezoelectric layer successively include top electrode, piezoelectric material and lower electrode from top to bottom;It is described Piezoelectric layer is set to the surface of the cantilever beam, and the mass block is connected to the cantilever beam;The vibrational energy collector is at least Including two cantilever beam structures, it is coupled between each cantilever beam structure.
Further, the overarm arm on each suspension beam structure is coupled by crossbeam, and the crossbeam is connected to secondary cantilever One end of beam;The secondary cantilever beam is equipped with piezoelectric layer, and the other end is connected with another mass block.
As one of embodiment, the overarm arm on each suspension beam structure is coupled by crossbeam, the crossbeam It is also attached to one end of secondary cantilever beam;The secondary cantilever beam is equipped with piezoelectric layer, and the other end is connected with another quality Block;The cantilever beam of each cantilever beam structure is connected to same mass block, which is also attached to the crossbeam.
As another embodiment, the cantilever beam of one of cantilever design is the frame-like of outer rim structure triangular in shape The cantilever beam of structure, the structure triangular in shape of another cantilever design is located in its frame-like structure;The outer rim knot triangular in shape The free end of the cantilever beam of the frame-like structure of structure is connected to a mass block, and the fixing end of the cantilever beam of another triangular structure Fixing end be connected to the mass block, free end is then connected with another mass block.
As another embodiment, cantilever beam structure triangular in shape, the free end side of being connected to of one of cantilever beam The mass block of frame shape is connected to the fixing end of the cantilever beam of another triangular structure in the mass block of the block form, should The free end of cantilever beam is connected with mass block.
As another embodiment, in parallel between each cantilever beam structure, the mass block connection of each cantilever beam structure In the free end of the cantilever beam and the free end of each cantilever beam is by spring connection, and the coefficient of elasticity ratio of the spring is every The coefficient of elasticity of a cantilever beam is small, and resonance frequency is different.Further, the spring shape is S-shaped bending or rectangle Frame-like.
As another embodiment, in parallel by spring between each cantilever beam structure, and each cantilever beam structure Mass block is set to the middle part of cantilever beam, and the both ends of the spring are connected to the cantilever of two coupled cantilever beam structures The middle part of beam;The piezoelectric layer is covered with the surface of the cantilever beam;The coefficient of elasticity of the spring is less than the bullet of the cantilever beam Property coefficient.Further, the spring is S-shaped bending or rectangle frame rack-like.
As another embodiment, all cantilever beam structures form an array, lead between each cantilever beam structure Lintel connection.
The beneficial effects of the present invention are: the connection type coupled using cantilever beam multistage, and make between not at the same level Coefficient of elasticity is different, to widen the frequency range of energy harvester.
Detailed description of the invention
Fig. 1 is that schematic diagram is conceived in the overall design of structure of the invention;
Fig. 2 is AA ' sectional view in Fig. 1;
Fig. 3 is the electric energy schematic diagram of the collection of energy output of structure shown in Fig. 1.
Fig. 4-Figure 13 is the structural schematic diagram of embodiment 1-10;
Figure 14-15 is the simulation result schematic diagram of embodiment 1;
Figure 16-17 is the simulation result schematic diagram of embodiment 3;
Figure 18-19 is the simulation result schematic diagram of embodiment 4;
Figure 20-21 is the simulation result schematic diagram of embodiment 5;
Figure 22-23 is the simulation result schematic diagram of embodiment 8;
Figure 24-25 is the simulation result schematic diagram of embodiment 9;
Figure 26-27 is the simulation result schematic diagram of embodiment 10.
Specific embodiment
Below with reference to attached drawing, the invention will be further described, it should be noted that the present embodiment is with this technology side Premised on case, the detailed implementation method and specific operation process are given, but protection scope of the present invention is not limited to this reality Apply example.
As shown in Figure 1 and Figure 2, a kind of vibrational energy collector of multistage coupled structure, including cantilever beam structure 1, it is described outstanding Arm girder construction 1 is mainly made of cantilever beam 11, mass block 12 and piezoelectric layer, and the piezoelectric layer successively includes top electrode from top to bottom 13, piezoelectric material 14 and lower electrode 15,16 show the fixing end of cantilever beam 11, for cantilever beam structure to be fixed on carrier On;The piezoelectric layer is set to the surface of the cantilever beam 11, and the mass block 12 is connected to the cantilever beam 11;The vibrational energy It measures collector and includes at least two cantilever beam structures 1, be coupled between each cantilever beam structure 1.
It should be noted that the material of cantilever beam, secondary cantilever beam and mass block can be silicon Si, top electrode and lower electrode can Using aluminium Al, nickel, molybdenum Mo etc., PZT thin film PZT, aluminium nitride film AlN, zinc-oxide film is can be used in piezoelectric material ZnO, aluminium nitride scandium film ScxAl1-xN, PVDF thin film, PVDF-TrFE film and PDMS film etc..
When vibrational energy collector senses outside energy and mass block vibration is made to get up, mass block drives cantilever beam Vibration, cantilever beam and then drives piezoelectric material to occur bending and deformation, and piezoelectric material will appear the phenomenon of piezoelectricity, and upper/lower electrode is by piezoelectricity Material electric charge transfer generated is gone out, to realize energy acquisition function.
Wideband principle: when two cantilever beam as shown in Figure 1 is connected using crossbeam 2, and two beams resonance frequency it is different but When close, two cantilever beams will generate coupling phenomenon, and side vibration will drive another party's vibration, and this to be coupled in collection of energy defeated It will appear phenomenon as shown in Figure 3 on electric energy out.In Fig. 3, all there are two wave crests in every curve, and in broader frequency It can be collected into energy within the scope of rate, realize wideband effect.In addition, the vibration with external environment is more violent, appearance Wave crest amplitude is bigger, and the energy being collected into is also bigger.
Embodiment 1
As shown in figure 4, the overarm arm 11 on each suspension beam structure 1 is coupled by crossbeam 2, mass block is connected on free end 12.The crossbeam 2 is connected to one end of secondary cantilever beam 3;Overarm arm 11 is equipped with piezoelectric layer, and composition is as shown in Figure 2.Described time Grade cantilever beam 3 is equipped with piezoelectric layer, and the other end is connected with another mass block 31.As shown in Figure 4.The secondary cantilever beam The composition of piezoelectric layer is identical with the piezoelectric layer set-up mode of cantilever design shown in Fig. 2.It in the present embodiment further include having outline border Frame 101, the fixing end of the cantilever beam of each cantilever design are both secured to the outer framework 101.
As shown in figs. 14-15, Figure 14 show the model of embodiment 1 by obtained by emulation to the simulation result of embodiment 1 Deformation map share at two that there are resonance according to showing in Figure 14, respectively in cantilever beam end and beam-ends (such as figure institute Show).Figure 15 is the simulation result diagram of Figure 14 institute representation model, and the abscissa in figure is frequency, and ordinate is amplitude.It can be with from figure Find out that there are resonance points at two, and in the frequency separation between resonance point twice, the output electric energy of energy harvester all compares Greatly, reach wideband purpose.
Embodiment 2
As shown in figure 5, the overarm arm 11 on each suspension beam structure 1 is coupled by crossbeam 2, being also attached to for the crossbeam 2 is secondary One end of grade cantilever beam 3;The secondary cantilever beam 3 is equipped with piezoelectric layer, and the other end is connected with another mass block 31;Each The cantilever beam 11 of cantilever beam structure 1 is connected to same mass block 12, which is also attached to the crossbeam 2.Overarm arm 11 It is equipped with piezoelectric layer, composition is as shown in Figure 2.The set-up mode of the piezoelectric layer of the secondary cantilever beam and cantilever knot shown in Fig. 2 The piezoelectric layer set-up mode of structure is identical.In the present embodiment, the free end of the 2 connecting cantilever beam of crossbeam, and mass block 12 It is superimposed on crossbeam.It in the present embodiment further include having outer framework 101, the fixing end of the cantilever beam of each cantilever design is fixed In the outer framework 101.
Embodiment 3
The present embodiment principle is similar to Example 2, as shown in fig. 6, being essentially to further increase on the basis of embodiment 2 The quantity of cantilever beam 11 and secondary cantilever beam 3 (cantilever beam quantity is four, and secondary cantilever beam quantity is two), cantilever beam 11 Fixing end be connected to frame 101, free end is commonly connected to crossbeam 2, and shares same mass block 12.In the present embodiment In, the mass block 12 is superimposed on the free end and crossbeam 2 of cantilever beam 11.Overarm arm 11 is equipped with piezoelectric layer, composition such as Fig. 2 It is shown.
Shown in the simulation result diagram 16-17 of embodiment 3, the model that Figure 16 show embodiment 1 is obtained by emulating Deformation map, Figure 17 for Figure 16 institute representation model simulation result diagram.
Embodiment 4
In the present embodiment, the cantilever beam 11 structure triangular in shape.As shown in fig. 7, the cantilever of one of cantilever design Beam 11 is the frame-like structure of outer rim structure triangular in shape, and the cantilever beam 11 of the structure triangular in shape of another cantilever design is located at it In frame-like structure;The free end of the cantilever beam 11 of the frame-like structure of the outer rim structure triangular in shape is connected to a mass block 12, and the fixing end of the fixing end of the cantilever beam 11 of another triangular structure is connected to the mass block 12, free end is then connected with Another mass block 12.The fixing end of cantilever beam 11 is connected to outer framework 101.Overarm arm 11 is equipped with piezoelectric layer, forms such as Fig. 2 institute Show.
For the simulation result diagram of embodiment 4 as shown in 18-19, Figure 18 show the model of embodiment 1 by obtained by emulation Deformation map, Figure 19 for Figure 18 institute representation model simulation result diagram.
Embodiment 5
In the present embodiment, as shown in figure 8, the structure triangular in shape of cantilever beam 11.The free end of cantilever beam 11 is connected to square frame-shaped The mass block 12 of shape, is connected to the fixing end of the cantilever beam 11 of triangular structure in the mass block 12, the cantilever beam 11 from Mass block 12 is connected with by end.The mass block 12 is equivalent to crossbeam and has coupled two cantilever beams 11.Positioned at the matter of block form The fixing end of cantilever beam 11 outside gauge block 12 is connected to outer framework 101.Overarm arm 11 is equipped with piezoelectric layer, and composition is as shown in Figure 2.
As shown in figures 20-21, Figure 20 show the model of embodiment 1 by obtained by emulation to the simulation result of embodiment 5 Deformation map, Figure 21 for Figure 20 institute representation model simulation result diagram.
Embodiment 4 and the structure of implementation 5 belong to cantilever beam tandem connection type, and two cantilever beams are not directly connected, and second Grade cantilever beam is fixed on first order mass block (resistance cascade in similar circuit), and has piezoelectricity function on each cantilever beam Vibrational energy is switched to electric energy by energy thin-film material.
Embodiment 6
As shown in figure 9, in parallel between each cantilever beam structure 11, the mass block 12 of each cantilever beam structure 11 is connected to described outstanding The free end of arm beam 11 and the free end of each cantilever beam 11 pass through spring 5 and connect, it is contemplated that two cantilever beams elastic must connect It connects just to be able to achieve and opens up yupin effect, the coefficient of elasticity of the spring must be smaller than the coefficient of elasticity of each cantilever beam.It is outstanding by controlling Arm beam improve quality block size it is different so that the natural resonance frequency of two cantilever beams is different.Piezoelectric layer 4 is set to cantilever beam 11 Surface, composition is as shown in Figure 2.The fixing end of cantilever beam 11 is connected to outer framework 101.Further, 5 shape of spring is S-shaped bending.
Embodiment 7
The structure of the present embodiment and the structure of embodiment 6 are essentially identical, but 5 shape of the spring is rectangle frame rack-like, is such as schemed Shown in 10.
Embodiment 8
As shown in figure 11, in parallel by spring 5 between each cantilever beam structure, and the mass block 12 of each cantilever beam structure is all provided with In the middle part of cantilever beam 11, the both ends of the spring 5 are connected to the cantilever beam 11 of two coupled cantilever beam structures Middle part;The piezoelectric layer 4 is covered with the surface of the cantilever beam (composition is as shown in Figure 2);The coefficient of elasticity of the spring 5 is less than institute State the coefficient of elasticity of cantilever beam 11.The fixing end of cantilever beam 11 is connected to outer framework 101.Further, the spring is that S-shaped is curved Curved or rectangle frame rack-like (being S-shaped bending in the present embodiment).
Shown in the simulation result diagram 22-23 of embodiment 8, the model that Figure 22 show embodiment 1 is obtained by emulating Deformation map, Figure 23 for Figure 22 institute representation model simulation result diagram.
Embodiment 9
The present embodiment and the structure of embodiment 8 are essentially identical, and difference essentially consists in there are three cantilever beam structures in parallel, such as Figure 12 It is shown.
Shown in the simulation result diagram 24-25 of embodiment 9, the model that Figure 24 show embodiment 1 is obtained by emulating Deformation map, Figure 24 for Figure 25 institute representation model simulation result diagram.
Embodiment 10
All cantilever beam structures 1 form an array, are connected between each cantilever beam structure 1 by beam 6.As shown in figure 13.
Shown in the simulation result diagram 26-27 of embodiment 10, the model that Figure 26 show embodiment 1 is obtained by emulating Deformation map, Figure 26 for Figure 27 institute representation model simulation result diagram.
For those skilled in the art, it can be made various corresponding according to above technical solution and design Change and modification, and all these change and modification should be construed as being included within the scope of protection of the claims of the present invention.

Claims (10)

1. a kind of vibrational energy collector of multistage coupled structure, including cantilever beam structure, the cantilever beam structure is mainly by hanging Arm beam, mass block and piezoelectric layer composition, the piezoelectric layer successively include top electrode, piezoelectric material and lower electrode from top to bottom;Its It is characterized in that, the piezoelectric layer is set to the surface of the cantilever beam, and the mass block is connected to the cantilever beam;The vibrational energy It measures collector and includes at least two cantilever beam structures, be coupled between each cantilever beam structure.
2. the vibrational energy collector of multistage coupled structure according to claim 1, which is characterized in that each suspension beam structure On overarm arm be coupled by crossbeam, the crossbeam is connected to one end of secondary cantilever beam;The secondary cantilever beam is equipped with Piezoelectric layer, and the other end is connected with another mass block.
3. the vibrational energy collector of multistage coupled structure according to claim 1, which is characterized in that each suspension beam structure On overarm arm be coupled by crossbeam, one end for being also attached to secondary cantilever beam of the crossbeam;On the secondary cantilever beam Equipped with piezoelectric layer, and the other end is connected with another mass block;The cantilever beam of each cantilever beam structure is connected to same mass block, The mass block is also attached to the crossbeam.
4. the vibrational energy collector of multistage coupled structure according to claim 1, which is characterized in that one of cantilever The cantilever beam of structure is the frame-like structure of outer rim structure triangular in shape, the cantilever beam of the structure triangular in shape of another cantilever design In its frame-like structure;The free end of the cantilever beam of the frame-like structure of the outer rim structure triangular in shape is connected to a matter Gauge block, and the fixing end of the fixing end of the cantilever beam of another triangular structure is connected to the mass block, free end is then connected with separately One mass block.
5. the vibrational energy collector of multistage coupled structure according to claim 1, which is characterized in that cantilever beam is in triangle Shape structure, the free end of one of cantilever beam are connected to the mass block of block form, connect in the mass block of the block form It is connected to the fixing end of the cantilever beam of another triangular structure, the free end of the cantilever beam is connected with mass block.
6. the vibrational energy collector of multistage coupled structure according to claim 1, which is characterized in that each cantilever beam knot In parallel between structure, the mass block of each cantilever beam structure is connected to the freedom of the free end of the cantilever beam and each cantilever beam End is connected by spring, and the coefficient of elasticity of the spring is smaller than the coefficient of elasticity of each cantilever beam, and resonance frequency is different.
7. the vibrational energy collector of multistage coupled structure according to claim 6, which is characterized in that the spring shape For S-shaped bending or rectangle frame rack-like.
8. the vibrational energy collector of multistage coupled structure according to claim 1, which is characterized in that each cantilever beam knot By spring parallel connection between structure, and the mass block of each cantilever beam structure is set to the middle part of cantilever beam, the both ends of the spring It is connected to the middle part of the cantilever beam of two coupled cantilever beam structures;The piezoelectric layer is covered with the table of the cantilever beam Face;The coefficient of elasticity of the spring is less than the coefficient of elasticity of the cantilever beam.
9. the vibrational energy collector of multistage coupled structure according to claim 8, which is characterized in that the spring is S Shape bending or rectangle frame rack-like.
10. the vibrational energy collector of multistage coupled structure according to claim 1, which is characterized in that all cantilevers Girder construction forms an array, is connected between each cantilever beam structure by beam.
CN201710742799.5A 2017-08-25 2017-08-25 A kind of vibrational energy collector of multistage coupled structure Pending CN109428511A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109889097A (en) * 2019-03-26 2019-06-14 西北工业大学 A kind of multistable energy capture device with connected effect

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Publication number Priority date Publication date Assignee Title
CN102170248A (en) * 2011-04-22 2011-08-31 中南大学 Ambient vibration energy collecting device based on two-DOF (Degree of Freedom) piezoelectric vibrator
WO2014170922A1 (en) * 2013-04-15 2014-10-23 Politecnico Di Torino Multi-frequency vibration piezoelectric harvester device
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Application publication date: 20190305