CN108400019B - Flexible miniature supercapacitor and preparation method thereof - Google Patents
Flexible miniature supercapacitor and preparation method thereof Download PDFInfo
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- CN108400019B CN108400019B CN201810182715.1A CN201810182715A CN108400019B CN 108400019 B CN108400019 B CN 108400019B CN 201810182715 A CN201810182715 A CN 201810182715A CN 108400019 B CN108400019 B CN 108400019B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
- H01G11/00—Hybrid capacitors, i.e. capacitors having different positive and negative electrodes; Electric double-layer [EDL] capacitors; Processes for the manufacture thereof or of parts thereof
- H01G11/22—Electrodes
- H01G11/24—Electrodes characterised by structural features of the materials making up or comprised in the electrodes, e.g. form, surface area or porosity; characterised by the structural features of powders or particles used therefor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
- H01G11/00—Hybrid capacitors, i.e. capacitors having different positive and negative electrodes; Electric double-layer [EDL] capacitors; Processes for the manufacture thereof or of parts thereof
- H01G11/84—Processes for the manufacture of hybrid or EDL capacitors, or components thereof
- H01G11/86—Processes for the manufacture of hybrid or EDL capacitors, or components thereof specially adapted for electrodes
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/13—Energy storage using capacitors
Abstract
The present invention provides a kind of flexible miniature supercapacitors and preparation method thereof, hydrophobic electrode isolation pattern and hydrophilic interdigital electrode are successively printed in hydrophilic flexible substrates, the two sides of electrode isolation pattern are arranged in the interdigital electrode, finally successively scratch gel electrolyte layer on the surface of electrode isolation pattern and interdigital electrode and encapsulated layer forms flexible miniature supercapacitor；The present invention can be simplified preparation process and be reduced production cost with the structural parameters of accuracy controlling interdigital electrode.
Description
Technical field
The present invention relates to field of semiconductor devices more particularly to a kind of flexible miniature supercapacitor and preparation method thereof.
Background technique
Supercapacitor is a kind of novel energy storage apparatus, it has, and the charging time is short, long service life, good temp characteristic,
The features such as energy saving and environmentally protective.
Supercapacitor includes sandwich type supercapacitor and plane supercapacitor.With sandwich type super capacitor
Device is compared, and plane supercapacitor can significantly reduce the thickness of supercapacitor, can also pass through the structure of interdigital electrode
Parameter is designed optimization, promotes the energy density and power density of supercapacitor, at the same have well it is flexible with it is portable
Property.The difficult point of plane supercapacitor preparation is the preparation of interdigital electrode.Mask plate photoetching process is usually utilized at present and is swashed
Photoetch method prepares interdigital electrode.When preparing interdigital electrode, the photolithographic preparation process of mask plate is complicated, it is difficult to realize customization
Change, and laser ablation method may cause certain destruction to interdigital electrode, influence the stability of interdigital electrode, while source, laser apparatus
Standby is costly, increases the preparation cost of supercapacitor.
Summary of the invention
In view of this, the present invention provides a kind of flexible miniature supercapacitor and preparation method thereof, fork can be accurately controlled
Refer to the structural parameters of electrode, simplifies the preparation process of supercapacitor.
According to the first aspect of the invention, a kind of flexible miniature supercapacitor is provided, comprising:
Flexible substrates；
Electrode isolation pattern is set in the flexible substrates, forms scheduled pattern；
Two interdigital electrodes are respectively arranged at the two sides of the electrode isolation pattern；
Gel electrolyte layer covers the interdigital electrode and the electrode isolation pattern；And
Encapsulated layer, for sealing the gel electrolyte layer；
Wherein, the electrode isolation pattern is printed by hydrophobicity electrically insulating material forms, and the interdigital electrode is by hydrophily
Conductive electrode material prints to be formed.
Preferably, the hydrophobicity electrically insulating material is hydrophobic silicones glue, epoxy glue or fluoro-containing macromolecule material.
Preferably, the conductive hydrophilic electrode material is the parent of the nano-carbon materials such as graphene, carbon nanotube, porous carbon
Aqueous electrode ink.
Preferably, the material of the flexible substrates is hydrophilic plastic film or the plastic film by hydrophilic modifying.
Preferably, the line width of the electrode isolation pattern is 100-600um, and the spacing of the electrode isolation pattern is 1-
4mm。
Second aspect provides a kind of preparation method of flexible miniature supercapacitor, which comprises
Hydrophobicity electrically insulating material is printed with the first print speed on the surface of flexible substrates, forms electrode isolation pattern；
Conductive hydrophilic electrode material is printed with the second print speed in the two sides of the electrode isolation pattern, is formed interdigital
Electrode；
Gel electrolyte mixed solution is scratched on the surface of the electrode isolation pattern and the interdigital electrode, is formed by curing
Gel electrolyte layer；
Packaging plastic is scratched on the surface of the gel electrolyte layer, is formed by curing encapsulated layer.
Preferably, the surface of flexible substrates with the first print speed print hydrophobicity electrically insulating material, formed electrode every
Include: from pattern
Hydrophobicity electrically insulating material is printed with the print speed of 1-8mm/s on the surface of flexible substrates, forms electrode isolation
Pattern；
Wherein, the line width of the electrode isolation pattern is 100-600um, and the spacing of the electrode isolation pattern is 1-4mm.
Preferably, the hydrophobicity electrically insulating material is hydrophobic silicones glue, epoxy glue or fluoro-containing macromolecule material.
Preferably, conductive hydrophilic electrode material is printed with the second print speed in the two sides of the electrode isolation pattern,
Forming interdigital electrode includes:
Conductive hydrophilic electrode material, shape are printed with the print speed of 1-10mm/s in the two sides of the electrode isolation pattern
At interdigital electrode；
Wherein, the conductive hydrophilic electrode material is the hydrophilic of the nano-carbon materials such as graphene, carbon nanotube, porous carbon
Property electrode ink.
Preferably, the interdigital electrode is formed by the way that printing electrode ink is repeated several times.
The present invention provides a kind of flexible miniature supercapacitors and preparation method thereof, in hydrophilic flexible substrates according to
Electrode isolation pattern is arranged in the hydrophobic electrode isolation pattern of secondary printing and hydrophilic interdigital electrode, the interdigital electrode
Two sides are finally successively formed in the surface of electrode isolation pattern and interdigital electrode blade coating gel electrolyte layer and encapsulated layer flexible micro-
Type supercapacitor；The present invention can simplify preparation process and reduction is produced into the structural parameters of accuracy controlling interdigital electrode
This.
Detailed description of the invention
By referring to the drawings to the description of the embodiment of the present invention, the above and other purposes of the present invention, feature and
Advantage will be apparent from, in the accompanying drawings:
Fig. 1 is the full sectional view of the flexible miniature supercapacitor of the embodiment of the present invention；
Fig. 2 is the cross-sectional view along the direction A-A of the flexible miniature supercapacitor of the embodiment of the present invention；
Fig. 3 is the flow diagram of the preparation method of the flexible miniature supercapacitor of the embodiment of the present invention；
Fig. 4 is that cyclic voltammetric of the flexible miniature supercapacitor of preparation of the embodiment of the present invention under different scanning rates is bent
Line schematic diagram；
Fig. 5 is that constant current charge-discharge of the flexible miniature supercapacitor of preparation of the embodiment of the present invention under 0.2mA electric current is bent
Line schematic diagram.
Specific embodiment
Below based on embodiment, present invention is described, but the present invention is not restricted to these embodiments.Under
Text is detailed to describe some specific detail sections in datail description of the invention.Do not have for a person skilled in the art
The present invention can also be understood completely in the description of these detail sections.In order to avoid obscuring essence of the invention, well known method, mistake
There is no narrations in detail for journey, process, element and circuit.
In addition, it should be understood by one skilled in the art that provided herein attached drawing be provided to explanation purpose, and
What attached drawing was not necessarily drawn to scale.
Unless the context clearly requires otherwise, "include", "comprise" otherwise throughout the specification and claims etc. are similar
Word should be construed as the meaning for including rather than exclusive or exhaustive meaning；That is, be " including but not limited to " contains
Justice.
In the description of the present invention, it is to be understood that, term " first ", " second " etc. are used for description purposes only, without
It can be interpreted as indication or suggestion relative importance.In addition, in the description of the present invention, unless otherwise indicated, the meaning of " multiple "
It is two or more.
Unless otherwise clearly defined and limited, the terms such as term " installation ", " connected ", " connection ", " fixation " should be done extensively
Reason and good sense solution may be a detachable connection for example, it may be being fixedly connected, or integral；It can be mechanical connection, it can also be with
It is electrical connection；Can be directly connected, can also indirectly connected through an intermediary, can be connection inside two elements or
The interaction relationship of two elements, unless otherwise restricted clearly.For the ordinary skill in the art, Ke Yigen
The concrete meaning of above-mentioned term in the present invention is understood according to concrete condition.
With reference to the accompanying drawing and specific embodiment the invention will be further described.
Fig. 1 is the full sectional view of the flexible miniature supercapacitor of the embodiment of the present invention, and Fig. 2 is the soft of the embodiment of the present invention
The cross-sectional view along the direction A-A of property micro super capacitor.As depicted in figs. 1 and 2, flexible miniature supercapacitor includes flexibility
Substrate 1,2, two interdigital electrodes 3 of electrode isolation pattern, gel electrolyte layer 4 and encapsulated layer 5.Electrode isolation pattern 2 is set to
In flexible substrates 1, scheduled pattern is formed.Two interdigital electrodes 3 are respectively arranged at the two sides of electrode isolation pattern 2.In electrode
It is covered with gel electrolyte layer 4 in isolation pattern 2 and interdigital electrode 3, encapsulates gel electrolyte layer 4 finally by encapsulated layer 5,
Form flexible miniature supercapacitor.
The material of flexible substrates 1 is hydrophilic plastic film, has electrical insulation capability, including polyethylene naphthalate
(PEN), polyethylene terephthalate (PET), polyimides (PI) etc..Preferably, polyethylene naphthalate (PEN) has
There are superior barrier properties for gases, ultraviolet radiation preventing performance and heat resistance, and PEN is in toughness, wrinkle resistance and heatproof
Property etc. various aspects of performance it is relatively more balanced, can be 121 DEG C of heatproof, thus be more suitable for large area preparation flexible miniature it is super
The base material of capacitor uses.
Electrode isolation pattern 2 is by dispenser by the material of electrode isolation pattern 2 according to scheduled pattern and scheduled
Position printing is formed in flexible substrates 1.Dispenser is also known as glue spreader, adhesive dripping machine, adhesive supplier, glue pouring machine etc., is special convection current
Body is controlled, and by fluid drop, the automatic machinery coated on product surface or interiors of products.It can be achieved three-dimensional, four-dimensional
Path dispensing is accurately positioned, precisely controls glue, not leak adhesive, rubber drop-free.Dispenser is mainly used for glue, paint in Product Process
And other liquid Accurate Points, note, painting, point drip to each product exact position, can be used to realize get ready, draw lines, it is round or
Camber.The material of electrode isolation pattern 2 is hydrophobicity electrically insulating material, can use organic silica gel, epoxy glue or fluorine-containing height
The high-hydrophobic materials such as molecular material.Preferably, organic silica gel has temperature-resistance characteristic, electrical insulation properties, weatherability, physiology lazy
The excellent characteristics such as property, are consequently adapted to the printed material as electrode isolation pattern 2.When printing electrode isolation pattern 2, dispenser can
To be printed with the print speed of 1-8mm/s, the electrode isolation pattern 2 of better quality can be obtained.Electrode isolation pattern 2 can
To do the variation of adaptability according to the structure of interdigital electrode 3, to satisfy the use demand.
Two interdigital electrodes 3 include interdigital electrode 3a and interdigital electrode 3b, by dispenser by conductive hydrophilic electrode material
Material printing is formed in the two sides of electrode isolation pattern 2.Since the material of interdigital electrode 3 is conductive hydrophilic electrode material,
According to different characteristics of the interdigital electrode material in hydrophilic and hydrophobic interfaces, the material of interdigital electrode 3 can concentrate on flexible substrates 1
On.The material of the present embodiment interdigital electrode 3 is carbon nanotube water system ink.When printing interdigital electrode 3, dispenser can be with 1-
The print speed of 10mm/s is printed.Meanwhile when printing interdigital electrode 3, printing can be repeated as many times to improve interdigital electricity
The unit area load capacity of pole 3.Needed after the completion of the printing of interdigital electrode 3 120 DEG C at a temperature of it is 1 hour dry.Interdigital electrode 3
Basic structure have circle, rectangle etc., and every interdigital shape can also have round or rectangle prominent in addition to simple rectangle
It rises.According to the difference of application field, the shape of interdigital electrode 3 can be different.Interdigital electrode 3 described in the present embodiment is formed as square
The zigzag fashion of shape.
The performance for influencing interdigital electrode 3 mainly includes four structural parameters, is respectively as follows: the logarithm, interdigital of interdigital electrode pair
Width, it is adjacent it is interdigital between clearance distance and interdigital electrode thickness.According to the preparation work of flexible miniature supercapacitor
The structural parameters of accuracy controlling interdigital electrode 3 can be realized in skill, the parameter by changing electrode isolation pattern 2, and then change soft
The electrical characteristic of property micro super capacitor.In the present embodiment, electrode isolation pattern 2 line width (it is adjacent it is interdigital between
Stand-off distance from) be 100-600um, the spacing (interdigital width) of electrode isolation pattern 2 is 1-4mm.
Gel electrolyte layer 4 is the polymer based electrolyte of organic system, covers the interdigital electrode 3 and electrode isolation figure
Case 2 is by being formed after the upper surface of interdigital electrode 3 and electrode isolation pattern 2 scratches the solidification of gel electrolyte mixed solution.
Gel electrolyte layer is the important component of supercapacitor.Supercapacitor is also referred to as electrochemical capacitor.Work as super capacitor
After applying electric field on two electrodes of device, the anions and canons in gel electrolyte layer are migrated to positive and negative electrode respectively, in gel
The interface of electrolyte layer and electrode forms opposite charge, with the internal electric field of balanced electrolyte；After cancelling electric field, on electrode just
Negative electrical charge mutually attracts with the counterions in gel electrolyte layer and stablizes electric double layer, generates in positive and negative interpolar relatively steady
Fixed potential difference.Gel electrolyte mixed solution includes polymethyl methacrylate (PMMA), lithium perchlorate (LiClO4), carbonic acid
Acrylic ester and ethyl acetate.Lithium perchlorate is dissolved in the mixed solution with propene carbonate and ethyl acetate as electrolysis
Matter, add PMMA make the solution scratch after have preferable film forming, in order to which large area is at film preparation supercapacitor
Gel electrolyte layer.
Encapsulated layer 5 is formed in gel electrolyte layer 4, to realize the encapsulation of flexible miniature supercapacitor.It may be used as
The material for forming encapsulated layer 5 includes epoxide-resin glue and organic silica gel.Encapsulated layer 5 has insulating, can be by gel electricity
Packaging plastic is scratched on solution matter layer 4 and is obtained after solidifying.
The embodiment of the invention also provides the preparation methods of above-mentioned flexible miniature supercapacitor, as shown in figure 3, this method
Include:
Step S100, flexible substrates and gel electrolyte mixed solution are prepared.
In the present embodiment, uses polyethylene naphthalate (PEN) film as flexible base material, obtained by cutting
Obtain the flexible substrates 1 of suitable dimension.
Gel electrolyte mixed solution includes polymethyl methacrylate (PMMA), lithium perchlorate (LiClO4), carbonic acid third
Enester and ethyl acetate.Specifically, the preparation method of gel electrolyte mixed solution by illustrating as follows: firstly, to containing
Have and 2g lithium perchlorate is added in the mixed solution of 8g propene carbonate and 14g ethyl acetate and is sufficiently stirred, at room temperature
Stirring duration should continue two hours or more, to achieve the purpose that be sufficiently stirred；Then, 3g polymethyl methacrylate is added,
It is stirred overnight under conditions of 90 DEG C, obtains gel electrolyte mixed solution.
Step S200, hydrophobicity electrically insulating material is printed with the first print speed on the surface of flexible substrates, forms electrode
Pattern is isolated.
Hydrophobicity electrically insulating material (organic silica gel) is layed in the surface of PEN flexible substrates 1, dispenser is with the first printing
Speed prints hydrophobicity electrically insulating material according to scheduled pattern and scheduled position, forms electrode isolation pattern 2.It is preferred that
Ground, the first print speed are 1-8mm/s, and the line width of electrode isolation pattern 2 is 100-600um, and the spacing of electrode isolation pattern 2 is
1-4mm。
Step S300, conductive hydrophilic electrode material is printed with the second print speed in the two sides of the electrode isolation pattern
Material forms interdigital electrode.
Dispenser is with the second print speed according to the pattern of scheduled interdigital electrode 3 by conductive hydrophilic electrode material (carbon
Nanotube water system ink) it is printed respectively in the two sides of electrode isolation pattern 2, form interdigital electrode 3.Since water system ink exists
Different characteristics in hydrophilic and hydrophobic interfaces, carbon nanotube water system ink can concentrate in flexible substrates 1, thin without being attached to
On the electrode isolation pattern 2 that water-based material is formed, the insulating properties of two lateral electrodes has been fully ensured that.It preferably, is the interdigital electricity of raising
The unit area load capacity of pole 3, dispenser is repeated as many times with the second print speed of 1-10mm/s carries out printing interdigital electrode 3.
It is 1 hour dry at a temperature of 120 DEG C after the completion of printing.
Step S400, molten in the blade coating gel electrolyte mixing of the surface of the electrode isolation pattern and the interdigital electrode
Liquid is formed by curing gel electrolyte layer.
The gel electrolyte mixed solution prepared in above-mentioned steps S100 is scratched in electrode isolation pattern 2 and interdigital electrode
3 surface forms gel electrolyte layer 4 after solidification.
Step S500, packaging plastic is scratched on the surface of the gel electrolyte layer, is formed by curing encapsulated layer.
The flexible miniature supercapacitor that the preparation method provided through the embodiment of the present invention obtains, can be by two electrode
End is connected to electrochemical workstation, tests its charge-discharge performance by the methods of constant current charge-discharge, cyclic voltammetric.
The cyclic voltammetry curve of flexible miniature supercapacitor is as shown in figure 4, scanning potential region is 0~1.5V, low
Curve shows quasi- rectangular shape when scanning speed, it is shown that typical electric double layer capacitance behavior, as scanning speed increases
There is different degrees of polarization.Meanwhile constant current charge-discharge performance test, charge and discharge are carried out to the flexible miniature supercapacitor
Electric current is 0.2mA, and potential region is 0~1.5V, as a result as shown in figure 5, curve shows quasi- symmetric triangular type shape as the result is shown
Shape shows typical electric double layer behavior, and calculating gained face amount is 0.82mF/cm2。
The present invention provides a kind of flexible miniature supercapacitors and preparation method thereof, in hydrophilic flexible substrates according to
Electrode isolation pattern is arranged in the hydrophobic electrode isolation pattern of secondary printing and hydrophilic interdigital electrode, the interdigital electrode
Two sides are finally successively formed in the surface of electrode isolation pattern and interdigital electrode blade coating gel electrolyte layer and encapsulated layer flexible micro-
Type supercapacitor；The present invention can be with the structural parameters of accuracy controlling interdigital electrode, reducer preparation process and reduction production
Cost.
The above description is only a preferred embodiment of the present invention, is not intended to restrict the invention, for those skilled in the art
For, the invention can have various changes and changes.All any modifications made within the spirit and principles of the present invention are equal
Replacement, improvement etc., should all be included in the protection scope of the present invention.
Claims (8)
1. a kind of flexible miniature supercapacitor, comprising:
Flexible substrates；
Electrode isolation pattern is set in the flexible substrates, forms scheduled pattern；
Two interdigital electrodes are respectively arranged at the two sides of the electrode isolation pattern；
Gel electrolyte layer covers the interdigital electrode and the electrode isolation pattern；And
Encapsulated layer, for sealing the gel electrolyte layer；
Wherein, the electrode isolation pattern is printed by hydrophobicity electrically insulating material forms, and the interdigital electrode is by conductive hydrophilic
Electrode material prints to be formed；
Wherein, the hydrophobicity electrically insulating material is organic silica gel or fluoro-containing macromolecule material.
2. flexible miniature supercapacitor according to claim 1, which is characterized in that the conductive hydrophilic electrode material
For carbon nanotube water system ink.
3. flexible miniature supercapacitor according to claim 1, which is characterized in that the material of the flexible substrates is parent
Water-based plastic film or the plastic film for passing through hydrophilic modifying.
4. flexible miniature supercapacitor according to claim 1, which is characterized in that the line width of the electrode isolation pattern
For 100-600um, the spacing of the electrode isolation pattern is 1-4mm.
5. a kind of preparation method of flexible miniature supercapacitor, which is characterized in that the described method includes:
Hydrophobicity electrically insulating material is printed with the first print speed on the surface of flexible substrates, forms electrode isolation pattern；
Conductive hydrophilic electrode material is printed with the second print speed in the two sides of the electrode isolation pattern, forms interdigital electricity
Pole；
Gel electrolyte mixed solution is scratched on the surface of the electrode isolation pattern and the interdigital electrode, is formed by curing gel
Electrolyte layer；
Packaging plastic is scratched on the surface of the gel electrolyte layer, is formed by curing encapsulated layer；
Wherein, the hydrophobicity electrically insulating material is organic silica gel or fluoro-containing macromolecule material.
6. preparation method according to claim 5, which is characterized in that beaten on the surface of flexible substrates with the first print speed
Hydrophobicity electrically insulating material is printed, forming electrode isolation pattern includes:
Hydrophobicity electrically insulating material is printed with the print speed of 1-8mm/s on the surface of flexible substrates, forms electrode isolation pattern；
Wherein, the line width of the electrode isolation pattern is 100-600um, and the spacing of the electrode isolation pattern is 1-4mm.
7. preparation method according to claim 5, which is characterized in that in the two sides of the electrode isolation pattern with second dozen
Print-out rate prints conductive hydrophilic electrode material, forms interdigital electrode and includes:
Conductive hydrophilic electrode material is printed with the print speed of 1-10mm/s in the two sides of the electrode isolation pattern, forms fork
Refer to electrode；
Wherein, the conductive hydrophilic electrode material is carbon nanotube water system ink.
8. preparation method according to claim 7, which is characterized in that the interdigital electrode is received by the way that printing carbon is repeated several times
Mitron water system ink is formed.
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| CN108983527A (en) * | 2018-08-28 | 2018-12-11 | 上海幂方电子科技有限公司 | A kind of self-powered type electrochromic device and preparation process |
| CN110085444A (en) * | 2019-04-23 | 2019-08-02 | 西北工业大学深圳研究院 | Flexible miniature supercapacitor and preparation method thereof based on electrochemistry increasing material manufacturing |
| CN110634686B (en) * | 2019-08-14 | 2022-04-08 | 温州大学激光与光电智能制造研究院 | Method for rapidly preparing planar super capacitor |
| CN110808405A (en) * | 2019-11-15 | 2020-02-18 | 五邑大学 | Lithium battery based on interdigital electrode structure |
| CN112713010A (en) * | 2020-12-21 | 2021-04-27 | 浙江理工大学 | Method for preparing flexible planar micro energy storage device by laser printing sacrificial pattern and flexible planar micro energy storage device |
| CN113451055A (en) * | 2021-06-28 | 2021-09-28 | 中国电子科技集团公司第十八研究所 | Integrated preparation method of flexible interdigital micro capacitor |
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