CN108007480B - Preparation method of flexible sensor - Google Patents
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- CN108007480B CN108007480B CN201711193503.5A CN201711193503A CN108007480B CN 108007480 B CN108007480 B CN 108007480B CN 201711193503 A CN201711193503 A CN 201711193503A CN 108007480 B CN108007480 B CN 108007480B
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- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/16—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying resistance
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/08—Detecting, measuring or recording devices for evaluating the respiratory organs
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- A61B5/6801—Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient specially adapted to be attached to or worn on the body surface
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- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
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- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
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Abstract
The invention relates to a preparation method of a flexible sensor, which comprises the following steps: modifying a part of the surface of the flexible substrate with a carbonizable polymer to form a carbonizable polymer layer; irradiating at least a portion of the carbonizable polymer layer with a laser to effect in situ carbonization, forming a sensing element; and electrically connecting at least two positions of the sensing element to form electrodes to obtain the flexible sensor. The method has the advantages of low cost, strong universality, flexible design, simple and convenient manufacture, automatic processing means and good process controllability, and the prepared flexible sensor has multiple functions and high sensitivity.
Description
Technical Field
The invention relates to the technical field of sensors, in particular to a preparation method of a flexible sensor.
Background
With the ever-increasing demand for flexible and soft electronic devices, wearable flexible sensors have important applications in the fields of personalized health monitoring, human motion detection, human-computer interaction, soft robots, and the like. The flexible sensor device mainly comprises a sensing element and a flexible substrate. The flexible substrate is generally selected from a ductile plastic such as PET and a rubber such as PDMS. In addition, environmentally friendly and low-cost base materials such as paper and fabric have attracted much attention.
At present, the flexible sensing technology is mainly characterized in that materials such as carbon nanotubes, porous silicon, porous alumina, zinc oxide nanorods, graphite, gold nano films and the like are compounded with a flexible substrate through technologies such as drop coating, ink pen writing, pencil writing, ink jet printing, silk screen printing and the like. Such as carbon nanotubes or graphite nanoplates, on Paper (Han, J-W.; Kim, B.; Li J.; Meyyappan, M.Carbon Nanotube Based Paper. J.Phys.Chem.C2012,116, 22094-22097; Zhao, H.; Zhang, T.; Qi, R.; Dai, J.; Liu, S.; Fei, T.Drawn on Paper: AREPRODUC Humidity Sensitive Device by Handwrite.ACSAPPL.Mater.Interfacess 2017,9, 28002-; Liao, X.; Zhang, Z.; Liao, Q.; Q.Q.; OXhang, Xhang, Li, M.28002; Zone, Z.. Or a technique of spraying nanoparticles of metals and their oxides onto Paper (Balde, M.; Vena, A.; Sorli, B.Fabriciono f Porous inorganic Aluminum oxides on Paper for Humidity sensors. Sensorsand reactors B,2015,220, 829-. Also, there are conventional techniques for printing, writing on Paper, including direct Pencil writing, silver pen writing, etc. (Liao, X.Q.; Liao, Q.L.; Yan X.Q.; Liang, Q.J.; Si, H.N.; Li, M.H.; Wu, H.L.Cao, S.Y.; Zhang, Y.Flexle and Highly Sensitive strand fabrics woven by Pen Dry for Wearable monitor. adv. Funct. Mater.2015,25, 2395-2401; Kurra N.; Kuarni, G.U.Pen-on-Paper 2012-12, Electronic devices. Lab Chi p.2013,13, 2873; T.2873; T.T.L.; Ti. T.L.; Pen H., Y. S. 94, tension W.D. K.; P.S. K.S. K.; P.S.S. K. K.; P.S. K. P.S. K. Pat. K. 6612, K. Pat. K. S. pat.
In the above processes, the cost of the used nano material is high, and the optimization of the process parameters is difficult; the physical and chemical compatibility of the nano material and the matrix is poor, and the chemical and mechanical stability is not high; the manufacturing cost is high, and the base material cannot be flexibly selected.
Disclosure of Invention
In order to solve the technical problems, the invention aims to provide a preparation method of a flexible sensor, which has the advantages of low cost, strong universality, flexible design, simple and convenient manufacture, automatic processing means and good process controllability, and the prepared flexible sensor has multiple functions and high sensitivity.
The invention provides a preparation method of a flexible sensor, which comprises the following steps:
(1) modifying a part of the surface of the flexible substrate with a carbonizable polymer to form a carbonizable polymer layer;
(2) irradiating at least a portion of the carbonizable polymer layer with a laser to effect in situ carbonization, forming a sensing element;
(3) and electrically connecting at least two positions of the sensing element to form electrodes to obtain the flexible sensor.
Further, in the step (1), the following steps are included:
modifying the precursor solution of the carbonizable macromolecule on part of the surface of the flexible matrix, and carrying out heat treatment at the temperature of 100-300 ℃ to form the carbonizable macromolecule layer.
Further, the precursor solution is an organic solution of polyamic acid, and the carbonizable polymer is polyimide, wherein the organic solution adopts N, N '-dimethylformamide or N, N' -dimethylacetamide as a solvent. During the heat treatment, the solvent in the precursor solution can be removed, and the polyamic acid can be amidated to form polyimide.
Further, the heat treatment time is 0.5-5 h.
Further, in the step (1), the following steps are included:
modifying the organic solution of the carbonizable macromolecule on part of the surface of the flexible substrate, and carrying out heat treatment at the temperature of 100-300 ℃ to form the carbonizable macromolecule layer, wherein the organic solvent used by the organic solution is N, N' -dimethylformamide, dimethyl sulfoxide, sulfolane, ethylene nitrate or the like. In the heat treatment, the solvent in the organic solution can be removed, and the carbonizable polymer can be oxidized, crosslinked, cyclized, or the like.
Further, the carbonizable polymer is polyacrylonitrile, polyurethane, or cellulose.
Further, in the step (1), a part of the surface of the flexible substrate is modified with the carbonizable polymer by spin coating, blade coating, drop coating, spray coating, soaking or in-situ growth.
Further, in step (1), the carbonizable polymer is bonded to the flexible substrate to such an extent that the surface is covered, partially compounded, or completely compounded. Surface coating means that the carbonizable polymer only generates simple physical bonding with the surface of the flexible substrate; compounding refers to the chemically bonding of the carbonizable polymer to the flexible matrix or the penetration of the carbonizable polymer into the interior of the porous matrix. By fully compounded, it is meant that the microscale pores on the surface of the flexible substrate are completely filled with carbonizable polymers.
Further, in step (1), the flexible substrate is paper (such as a4 paper, coated paper, filter paper or kraft paper), high temperature resistant fabric (such as aramid), plastic with ductility (such as PET), thin metal sheet (such as steel sheet or aluminum foil), glass or ceramic.
Further, in the step (1), the flexible substrate is in the shape of a sheet, a block, a sphere or a tube.
Further, in the step (1), the carbonizable polymer layer has a thickness of 20 to 500 μm.
In step (1), the carbonizable polymer layer may be designed to have different patterns according to actual needs.
Further, in the step (2), the laser light source used for laser irradiation is a solid laser, a gas laser, or the like.
Further, in the step (2), the wavelength of the laser light source used for laser irradiation is 10nm to 1 mm. Preferably, the wavelength of the laser light source used in the laser irradiation is 193-1064 nm. The laser light source and its wavelength can be chosen differently depending on the absorption capacity of the flexible substrate. The shape of the laser-irradiated area can be a point, a line, a rectangle, a circle and a geometric figure formed by one or a combination of the points, the lines, the rectangles and the circles.
Further, in the step (2), the power at the time of laser irradiation is 200mW to 10W. Preferably, the power at the time of laser irradiation is 500mW to 1W.
Further, in the step (2), the sensing element is a resistor, a capacitor or an inductor. And (4) when the sensing element is a resistor, obtaining the piezoresistive flexible sensor correspondingly after the step (3).
In the step (2), after laser irradiation, the structure of the carbonizable polymer layer is changed to generate a porous carbon structure, the processing parameters of laser are adjusted, the porosity, size and distribution of the carbon material can be regulated, and the size, shape and structure of the in-situ carbonization area are controlled by controlling the laser irradiation area, so that the resistance, capacitance or inductance sensing element is obtained.
Further, in the step (3), the electrical connection is made using a silver paste curing method or a soldering method.
Further, the silver adhesive curing method is to connect two points of the sensing element by using a lead, and to point the conductive silver adhesive at the connection point, and then to heat and cure the conductive silver adhesive, wherein the curing temperature is 50-200 ℃. The soldering method is soldering using solder.
The piezoresistive flexible sensor can be prepared by the method, and the sensitivity of the piezoresistive flexible sensor is 1-5000. Sensitivity refers to the relative change in resistance per unit strain. The sensitivity depends on the size, distribution, porosity, contact strength of the structural units, etc. of the carbon structures of the laser carbonized array. In addition, the sensitivity can be changed by changing the heat treatment temperature of the polymer base material, because the cross-linking and condensed structure of the polymer is changed by the heat treatment temperature of the polymer material, and the carbon structure formed by subsequent laser carbonization can be regulated and controlled.
The principle of the sensor manufactured by the method for responding to the stimulation is as follows:
the two materials (the polymer after in-situ carbonization and the flexible matrix) are combined in a hybrid mode, and deformation signals are converted into electric signals to be output by utilizing the difference of physical and chemical properties such as thermal expansion coefficient, hygroscopicity and the like. The corresponding difference can be detected by the electric signal generated by deformation, thereby endowing the sensor with multiple functions.
The sensor is suitable for various high-sensitivity sensing application occasions, and the physical parameters capable of responding are force or other physical parameters capable of being converted into stress (such as displacement, inclination, stress, strain, viscosity, humidity, acceleration, frequency and weight), and can also be other application fields capable of being converted into the physical parameters, and the sensor is used for respiratory monitoring and the like.
By the scheme, the invention at least has the following advantages:
according to the invention, the carbonizable polymer is compounded with the low-cost and environment-friendly flexible substrates such as paper/fabric in situ, and the sensing elements are written on the surface of the flexible substrate by writing the carbonizable polymer through laser (namely laser irradiation), so that an environment-friendly and low-cost flexible sensor preparation scheme is provided for the preparation of the flexible sensor. Meanwhile, the sensing element and the flexible substrate are well combined, and the stability of the whole structure is improved. The size, the structure and the shape of the sensor are flexible and controllable, and the sensor is compatible with the existing sensor manufacturing equipment and can realize large-scale processing. The obtained sensor has multiple functions, flexibly regulates and controls the physical and chemical structure in the composite structure, and can obtain a sensor with response to various physical parameters such as force, humidity and the like.
The foregoing description is only an overview of the technical solutions of the present invention, and in order to make the technical solutions of the present invention more clearly understood and to implement them in accordance with the contents of the description, the following detailed description is given with reference to the preferred embodiments of the present invention and the accompanying drawings.
Drawings
FIG. 1 is a flow chart of the production of a piezoresistive flexible sensor in example 1 of the present invention;
FIG. 2 is a cross-sectional scanning electron micrograph of a polyimide-A4 paper composite substrate according to example 1 of the present invention;
FIG. 3 is a microscopic electron microscope of the carbonized pattern in example 1 of the present invention;
FIG. 4 is a graph of the cyclic strain applied to a piezoresistive flexible sensor in example 1 of the present invention;
FIG. 5 is a graph of the change in resistance of a piezoresistive flexible sensor made in example 1 of the invention under the strain shown in FIG. 4;
FIG. 6 is a graph of the change in resistance of a piezoresistive flexible sensor made in example 2 of the invention under the strain shown in FIG. 4;
FIG. 7 is a schematic structural diagram of a piezoresistive sensor array prepared in example 3 of the present invention;
FIG. 8 is a graph of humidity applied to a paper-based sensor prepared in accordance with example 4 of the present invention as a function of time;
FIG. 9 is a graph of the resistance of the paper-based sensor prepared in example 4 of the present invention as a function of the humidity change shown in FIG. 8;
FIG. 10 is a sensor for monitoring respiratory resistance over time;
description of reference numerals:
1-a4 paper; 2-polyamic acid-A4 paper composite substrate; 3-polyimide-A4 paper composite substrate.
Detailed Description
The following detailed description of embodiments of the present invention is provided in connection with the accompanying drawings and examples. The following examples are intended to illustrate the invention but are not intended to limit the scope of the invention.
Example 1
Fig. 1 is a flowchart of a process for manufacturing a piezoresistive flexible sensor according to this embodiment, and the specific steps are as follows:
first, spin-coat 1.5g of precursor solution, which is a solution of polyamic acid in N, N' -dimethylacetamide, onto a4 paper 1 to form a polyamic acid-a 4 paper composite substrate 2.
The polyamic acid-A4 paper composite substrate 2 after spin coating is subjected to heat treatment, specifically, water is removed at 100 ℃ for 0.5h, and then the solvent is removed at 150 ℃ for 1.5 h. In order to prevent the A4 paper 1 from being heated and curled to cause uneven heating, a temperature-resistant adhesive tape can be used for fixing the A4 paper 1. After heat treatment, the polyamic acid is amidated to form polyimide, forming polyimide-a 4 paper composite substrate 3. FIG. 2 is a cross-sectional scanning electron micrograph of a polyimide-A4 paper composite substrate 3 in which the portion above the solid line a-a ' is A4 paper 1 and the portion between the solid line a-a ' and the solid line b-b ' is polyimide.
Putting the polyimide-A4 paper composite matrix 3 in a laser cutting machine for laser scanning carbonization, wherein the used laser light source is CO2The laser power was controlled at 1W, the laser scanning speed was 20mm/s, the laser irradiation was performed at intervals of 0.13mm in the vertical direction, the irradiated regions roughly constituted a U-shaped pattern (FIG. 3), and the formed carbonized pattern was a resistor. And (3) a small amount of conductive silver adhesive is arranged at the two ends a and b of the carbonized pattern shown in the figure 3, the conductive silver adhesive is used for fixing a lead to form an electrode of the piezoresistive sensor, and the conductive silver adhesive is heated at the temperature of 200 ℃ for 0.5h to be cured, so that the piezoresistive flexible sensor is prepared.
Testing the piezoresistive flexible sensor obtained by the method: the sample is bonded on a steel sheet with the thickness of 0.2mm, then a single cantilever amount bending test is carried out by using a DMA (dynamic mechanical analyzer), the static force is 1N, and the corresponding change of the resistance is measured by using a two-point method. The sensitivity (GF) is the relative change in resistance per unit strain and is calculated by:
GF is (Δ R/R)/∈, where Δ R represents the resistance difference before and after application of the static force, and R represents the resistance value before application of the static force.
Fig. 4-5 are graphs of the periodic strain applied to the piezoresistive flexible sensor described above and the change in resistance of the piezoresistive flexible sensor under the strain shown in fig. 4, respectively. It can be seen that the sensor resistance changes periodically under periodic strain. From the figure, the sensitivity can be calculated to reach 13 according to the calculation formula of the sensitivity.
Example 2
First, 1.5g of precursor solution, which is an N, N' -dimethylacetamide solution of polyamic acid, is blade-coated on A4 paper to form a polyamic acid-A4 paper composite substrate.
And (3) carrying out heat treatment on the drawdown polyamic acid-A4 paper composite substrate, specifically, removing water at 100 ℃ for 0.5h, and then removing the solvent at 150 ℃ for 1.5 h. In order to prevent the A4 paper from being heated and curled to cause uneven heating, a temperature-resistant adhesive tape can be used for fixing the A4 paper. After heat treatment, the polyamic acid is amidated to form polyimide-A4 paper composite substrate.
Putting the polyimide-A4 paper composite substrate in a laser cutting machine for laser scanning carbonization, wherein the used laser light source is CO2The laser power was controlled at 1W, the laser scanning speed was 20mm/s, the laser irradiation was performed at intervals of 0.13mm in the vertical direction, the irradiated regions roughly constituted a U-shaped pattern (FIG. 3), and the formed carbonized pattern was a resistor. And (3) a small amount of conductive silver adhesive is arranged at the two ends a and b of the carbonized pattern shown in the figure 3, the conductive silver adhesive is used for fixing a lead to form an electrode of the piezoresistive sensor, and the conductive silver adhesive is heated at 175 ℃ for 0.5h to be cured to prepare the piezoresistive flexible sensor.
Testing the piezoresistive flexible sensor obtained by the method: the sample is adhered to a steel sheet with the thickness of 0.2mm, and then a single cantilever amount bending test is carried out by using DMA, the static force is 1N, and the corresponding change of the resistance is measured by using a two-point method. The strain shown in fig. 4 is used to apply periodic strain to the piezoresistive flexible sensor, and under the condition, the resistance change of the piezoresistive flexible sensor is shown in fig. 6, and the sensitivity can be calculated to reach 1.6 according to a calculation formula of the sensitivity in the graph.
Example 3
Firstly, 0.5g of precursor solution, which is N, N' -dimethylacetamide solution of polyamic acid, is spin-coated on A4 paper, the spin-coating speed is 1000rpm (at which the A4 paper can be completely soaked), the spin-coating time is 1min, and the same method is adopted to spin-coat for 3 times, so that the polyamic acid-A4 paper composite substrate is formed.
And (3) carrying out heat treatment on the polyamic acid-A4 paper composite substrate after spin coating, specifically, removing water at 100 ℃ for 0.5h, and then removing the solvent at 150 ℃ for 1.5 h. In order to prevent the A4 paper from being heated and curled to cause uneven heating, the paper can be pressed by a proper weight after water removal. After heat treatment, the polyamic acid is amidated to form polyimide-A4 paper composite substrate.
The polyimide-a 4 paper composite substrate was placed in a laser cutter, laser spot carbonization was performed using a carbon dioxide laser as a laser light source, the laser power was controlled at 0.8W, the laser spot velocity was 20mm/s, the formed carbonized pattern was a resistance, and the pattern after carbonization was a 3 × 3 array in a substantially 2-letter shape (fig. 7). Directly cutting the substrate by laser to obtain cantilever beams, applying a small amount of conductive silver adhesive on the head end and the tail end of each 2-shaped pattern, fixing the wires by the conductive silver adhesive to form electrodes of the piezoresistive sensors, heating at 175 ℃ for 0.5h to solidify the conductive silver adhesive, and obtaining several arrays of single cantilever beam sensors on a flexible substrate (figure 7). In fig. 7, partial curling of the array of sensors occurs due to the release of paper tension during heating.
Example 4
Firstly, 0.5g of precursor solution which is a DMF solution of polyamic acid is spin-coated on A4 paper, the spin-coating rotation speed is 500-1000rpm, the spin-coating time is 1min, and the same method is adopted for spin-coating for 3 times to form the polyamic acid-A4 paper composite substrate.
And (3) carrying out heat treatment on the polyamide acid-A4 paper composite substrate after spin coating, specifically, removing water for 0.5h at 100 ℃, then removing DMF solvent for 1.5h at 150 ℃, and then curing for 1.5h at 200 ℃ in vacuum. In order to prevent the A4 paper from being heated and curled to cause uneven heating, a temperature-resistant adhesive tape can be used for fixing the A4 paper. After heat treatment, the polyamic acid is amidated to form polyimide-A4 paper composite substrate. The polyamide acid-A4 paper composite substrate is placed in a laser cutting machine to be subjected to laser scanning carbonization, the used laser light source is carbon dioxide laser, the laser power is controlled to be 0.8W, the laser scanning speed is 20mm/s, laser irradiation is carried out along the vertical direction at intervals of 0.135mm (a U-shaped pattern as shown in figure 3 is formed), and the resistor is formed. And directly cutting the substrate by using laser to manufacture a cantilever beam, dotting a small amount of conductive silver adhesive at two end points of the U-shaped pattern, fixing a lead by using the conductive silver adhesive to form an electrode of the piezoresistive sensor, and heating at 175 ℃ for 0.5h to solidify the conductive silver adhesive to obtain the cantilever beam type paper-based sensor. And performing a DMA humidity experiment on the obtained cantilever beam type paper-based sensor to detect the sensitivity of the paper-based sensor to humidity. The change in applied humidity with time is shown in fig. 8, and the test results are shown in fig. 9, which indicate that the resistance changes by 0.5% for every 1% change in humidity.
The cantilever beam type paper-based sensor prepared in the above way is used for breath detection, and the specific method is as follows:
the cantilever beam type paper-based sensor obtained by the method is attached to the nasal wing, and the resistance of the sensor changes periodically along with the breathing of a measured person. FIG. 10 is a graph of the time history of the sensor used to monitor respiratory resistance, and shows that the sensor prepared by the method of the present invention can be used to detect respiratory changes.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, it should be noted that, for those skilled in the art, many modifications and variations can be made without departing from the technical principle of the present invention, and these modifications and variations should also be regarded as the protection scope of the present invention.
Claims (8)
1. A method for preparing a flexible sensor is characterized by comprising the following steps:
(1) modifying a part of the surface of the flexible substrate with a carbonizable polymer to form a carbonizable polymer layer; the flexible substrate is paper, fabric, plastic, metal sheet, glass or ceramic; the thickness of the carbonizable polymer layer is 20-500 μm;
(2) irradiating at least a portion of the carbonizable polymer layer with a laser to effect in situ carbonization, forming a sensing element; the wavelength of a laser light source used in laser irradiation is 10nm-1 mm; the power during laser irradiation is 200 mW-10W;
(3) and electrically connecting at least two positions of the sensing element to form electrodes to obtain the flexible sensor.
2. The method for preparing a flexible sensor according to claim 1, wherein in the step (1), the method comprises the following steps:
modifying the precursor solution of the carbonizable macromolecule on part of the surface of the flexible matrix, and carrying out heat treatment at the temperature of 100-300 ℃ to form the carbonizable macromolecule layer.
3. The method for manufacturing a flexible sensor according to claim 2, wherein: the precursor solution is an organic solution of polyamic acid, and the carbonizable polymer is polyimide.
4. The method for preparing a flexible sensor according to claim 1, wherein in the step (1), the method comprises the following steps:
and modifying the organic solution of the carbonizable macromolecule on part of the surface of the flexible matrix, and carrying out heat treatment at the temperature of 100-300 ℃ to form the carbonizable macromolecule layer.
5. The method for manufacturing a flexible sensor according to claim 4, wherein: the carbonizable polymer is polyacrylonitrile, polyurethane or cellulose.
6. The method for producing a flexible sensor according to any one of claims 1 to 5, wherein: in the step (1), the carbonizable polymer is modified on part of the surface of the flexible substrate by spin coating, blade coating, drop coating, spray coating, soaking or in-situ growth.
7. The method for manufacturing a flexible sensor according to claim 1, wherein: in step (2), the sensing element is a resistor, a capacitor or an inductor.
8. The method for manufacturing a flexible sensor according to claim 1, wherein: in the step (3), the electrical connection is made using a silver paste curing method or a soldering method.
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| CN108680615A (en) * | 2018-05-17 | 2018-10-19 | 华东师范大学 | A kind of preparation method of paper substrate flexible humidity sensor |
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| GB201009847D0 (en) * | 2010-06-11 | 2010-07-21 | Dzp Technologies Ltd | Deposition method, apparatus, printed object and uses |
| US9576694B2 (en) * | 2010-09-17 | 2017-02-21 | Drexel University | Applications for alliform carbon |
| KR20120044885A (en) * | 2010-09-30 | 2012-05-08 | 후지필름 가부시키가이샤 | Baked film and method for producing the same, and conveyance carrier and method for producing the same |
| JP6934654B2 (en) * | 2014-12-26 | 2021-09-15 | 国立研究開発法人産業技術総合研究所 | Flexible conductive film and its manufacturing method |
| CN107093493B (en) * | 2017-03-21 | 2019-08-06 | 中山大学 | A kind of paper base flexible electrode and its preparation method and application |
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