CN107505068A - Condenser type pliable pressure sensor and preparation method thereof - Google Patents
Condenser type pliable pressure sensor and preparation method thereof Download PDFInfo
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- CN107505068A CN107505068A CN201710717484.5A CN201710717484A CN107505068A CN 107505068 A CN107505068 A CN 107505068A CN 201710717484 A CN201710717484 A CN 201710717484A CN 107505068 A CN107505068 A CN 107505068A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
- G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
Abstract
The invention discloses a kind of condenser type pliable pressure sensor and preparation method thereof.Wherein, condenser type pliable pressure sensor includes：First flexible nano fiber membrane layer；Second flexible nano fiber membrane layer, it is oppositely arranged with the first flexible nano fiber membrane layer；First electrode layer, it is attached on the inside of the first flexible nano fiber membrane layer；The second electrode lay, it is attached on the inside of the second flexible nano fiber membrane layer；And nano fibrous membrane dielectric layer, it is arranged between first electrode layer and the second electrode lay.The nano fibrous membrane with micro-nano structure is obtained using electrostatic spinning, realizes the preparation of the low cost, large area of pliable pressure senser element；Meanwhile the loose structure of nano-fiber film dielectric layer further increases the sensitivity of sensor, realize gas permeability, high sensitivity, low cost, wearable combination property and improve.
Description
Technical field
The disclosure belongs to pressure sensor technique field, is related to a kind of condenser type pliable pressure sensor and its preparation side
Method.
Background technology
In recent years, high sensitivity, the wearable touch sensor of low cost cause the extensive concern of scientific research personnel with grinding
Study carefully.The wearable device for being based particularly on condenser type pliable pressure sensor arises at the historic moment, and is brought conveniently for the life of people,
And rapid osmotic is to intelligence wearing, electronic skin, the every field such as intelligent robot.
Various countries researcher expands deep exploration to improving condenser type pliable pressure sensor construction and theory, utilizes
Senser element micro-structural has been found optimizing the mechanical property of sensor to be a kind of effective method, but film surface micro-nano
, expensive equipment or flow on the one hand be present in the acquisition modes silicon pour mask method of structure, photoetching process, reactive ion beam etching (RIBE) method etc.
The problem of complicated；On the other hand, it is difficult to which large area obtains, cost is too high, it is impossible to meets practical application.
At present, the substrate of pliable pressure sensor is mostly using dimethyl silicone polymer (PDMS) film or poly- to benzene two
Formic acid glycol ester (PET) film, so as to cause whole senser element airtight, is not suitable for attaching skin for a long time as substrate
Monitor human health characteristic signal in real time.And because the thickness of these films is thicker, thickness reaches 50-100 μm, the big day of one's doom
The sensitivity of pressure sensor is made.
The content of the invention
(1) technical problems to be solved
Present disclose provides a kind of condenser type pliable pressure sensor and preparation method thereof, at least partly to solve above institute
The technical problem of proposition.
(2) technical scheme
According to an aspect of this disclosure, there is provided a kind of condenser type pliable pressure sensor, including：First flexible nano
Fiber membrane layer；Second flexible nano fiber membrane layer, it is oppositely arranged with the first flexible nano fiber membrane layer；First electrode
Layer, it is attached on the inside of the first flexible nano fiber membrane layer；The second electrode lay, it is attached in the second flexible nano fiber membrane layer
Side；And nano fibrous membrane dielectric layer, it is arranged between first electrode layer and the second electrode lay.
In some embodiments of the present disclosure, the first flexible nano fiber membrane layer and the second flexible nano fiber membrane layer
Material be following material in one or more：TPUE rubber (TPU), polyacrylonitrile (PAN), poly- pair
PET (PET), nylon 6 (PA6), Kynoar (PVDF), polyvinyl alcohol (PVA), PLA (PLA) and
Polyether sulfone (PES).
In some embodiments of the present disclosure, the first flexible nano fiber membrane layer and the second flexible nano fiber membrane layer
Thickness between 50 μm~100 μm.
In some embodiments of the present disclosure, the material of first electrode layer and the second electrode lay is one kind in following material
It is or several：Silver nano-grain or nano silver wire electrically conductive ink coating or CNT, graphene and tin indium oxide (ITO) shape
Into coating.
In some embodiments of the present disclosure, the material of nano fibrous membrane dielectric layer is one kind or several in following material
Kind：Polyacrylonitrile (PAN), polyethylene terephthalate (PET), nylon 6 (PA6), Kynoar (PVDF), polyethylene
Alcohol (PVA), TPUE rubber (TPU), PLA (PLA) and polyether sulfone (PES).
In some embodiments of the present disclosure, the thickness of nano fibrous membrane dielectric layer is between 20 μm~60 μm.
In some embodiments of the present disclosure, the surface of nano fibrous membrane dielectric layer carries micro-nano structure.
According to another aspect of the disclosure, there is provided a kind of preparation method of condenser type pliable pressure sensor, including：
Prepare the first flexible nano fiber membrane layer and the second flexible nano fiber membrane layer；Using the first flexible nano fiber membrane layer as
Substrate, first electrode layer is prepared thereon, using the second flexible nano fiber membrane layer as substrate, second electrode is prepared thereon
Layer；Spinning solution is configured using high molecular polymer as solute, nano fibrous membrane dielectric layer is prepared based on electrostatic spinning process；And
By the first flexible nano fiber membrane layer with first electrode layer, nano fibrous membrane dielectric layer and with the second electrode lay
Two flexible nano fiber membrane layers are packaged with " sandwich sandwich " structure according to the relative form of electrode layer, obtain electric capacity
Formula pliable pressure sensor.
In some embodiments of the present disclosure, using the first flexible nano fiber membrane layer as substrate, first is prepared thereon
Electrode layer, using the second flexible nano fiber membrane layer as substrate, also include after the step of the second electrode lay is prepared thereon：
After having prepared first electrode layer and the second electrode lay, using conductive silver glue or silver paste on two electrode layers each extraction wire.
In some embodiments of the present disclosure, the high molecular polymerization in spinning solution is configured using high molecular polymer as solute
Thing is polyether sulfone (PES), and solvent is DMF (DMF), is prepared based on electrostatic spinning process with micro-nano structure
Nano fibrous membrane dielectric layer includes：Polyether sulfone (PES) is added into DMF (DMF) configuration spinning solution, in room temperature
Lower magnetic agitation, makes it be configured to polyether sulfone (PES) uniform solution, and standing and defoaming is standby；By obtained polyether sulfone (PES)
Uniform solution as spinning solution, carried out on device for spinning spinning obtain bead structure polyether sulfone (PES) nanofiber it is thin
Film；Wherein, the spinning parameter set on device for spinning is as follows：Spinning voltage is between 18kV~26kV；Feed speed is situated between
Between 0.3mL/h~0.6mL/h；Distance is received between 13cm~20cm；Spinning temperature between 45 DEG C~80 DEG C,
The spinning time is between 6h~8h；The thickness of polyether sulfone (PES) nano-fiber film of obtained bead structure is between 20 μm
Between~50 μm.
In some embodiments of the present disclosure, the high molecular polymerization in spinning solution is configured using high molecular polymer as solute
Thing is nylon 6 (PA6) and the propylene glycol ester of poly terephthalic acid 1.3 (PTT), and solvent is formic acid, trifluoroacetic acid and dichloromethane, base
Preparing the nano fibrous membrane dielectric layer with micro-nano structure in electrostatic spinning process includes：Nylon 6 (PA6) is added in formic acid,
The propylene glycol ester of poly terephthalic acid 1.3 (PTT) is added in the mixed solution of trifluoroacetic acid/dichloromethane, and magnetic force stirs at room temperature
Mix, be configured to uniform solution A and B respectively, standing and defoaming is standby；The uniform solution A and B that will be obtained, are carried out on device for spinning
Spinning obtains nylon 6 (the PA6)/propylene glycol ester of poly terephthalic acid 1.3 (PTT) nano-fiber film of coarse structure；Wherein, exist
The spinning parameter set on device for spinning is as follows：Spinning voltage is between 18kV~26kV；Feed speed between 0.3mL/h~
Between 0.6mL/h；Distance is received between 13cm~20cm；Between 45 DEG C~80 DEG C, the spinning time is situated between spinning temperature
Between 6h~8h, nylon 6 (the PA6)/propylene glycol ester of poly terephthalic acid 1.3 (PTT) nanofiber of obtained coarse structure
The thickness of film is between 30 μm~50 μm.
In some embodiments of the present disclosure, the high molecular polymerization in spinning solution is configured using high molecular polymer as solute
Thing is styrene monomer, initiator and curing agent, TPUE rubber (TPU), solvent N, N- dimethyl methyl
Acid amides/dichloromethane (DMF/DCM), preparing the nano fibrous membrane dielectric layer with micro-nano structure based on electrostatic spinning process includes：
By styrene monomer, initiator and curing agent, TPUE rubber (TPU) add DMF/
In dichloromethane (DMF/DCM) mixed system, magnetic agitation, makes it be configured to uniform solution at room temperature, and standing and defoaming is standby
With；Using obtained uniform solution as spinning solution, spinning is carried out on device for spinning, obtains being embedded in polystyrene (PS) microballoon
TPUE rubber nano fibre film；Wherein, the spinning parameter set on device for spinning is as follows：Spinning electricity
Pressure is between 18kV~26kV；Feed speed is between 0.3mL/h~0.6mL/h；Distance is received between 13cm~20cm
Between；Spinning temperature between 45 DEG C~80 DEG C, the spinning time between 6h~8h, obtained insertion polystyrene (PS)
The thickness of the TPUE rubber nano fibre film of microballoon is between 20 μm~40 μm.
In some embodiments of the present disclosure, prepare the first flexible nano fiber membrane layer and the second flexible nano fiber is thin
Film layer includes：Configure electrostatic spinning solution；Spinning is carried out using device for spinning and the electrostatic spinning solution of configuration, flexibility is obtained and receives
Rice fiber membrane layer；And the flexible nano fiber membrane layer for obtaining spinning is dried, and makes the solvent of spinning volatilize to obtain first
Flexible nano fiber membrane layer and the second flexible nano fiber membrane layer.
In some embodiments of the present disclosure, using the first flexible nano fiber membrane layer as substrate, first is prepared thereon
Electrode layer, using the second flexible nano fiber membrane layer as substrate, the second electrode lay is prepared thereon to be included：Using silk-screen printing side
Formula, first electrode layer is printed in the first flexible nano fiber membrane layer surface, is printed in the second flexible nano fiber membrane layer surface
Brush the second electrode lay.
(3) beneficial effect
It can be seen from the above technical proposal that condenser type pliable pressure sensor that the disclosure provides and preparation method thereof,
Have the advantages that：
The substrate and dielectric layer of the condenser type pliable pressure sensor are polymer nanofibre film, have widened system significantly
The range of choice of standby condenser type pliable pressure sensor raw material, two kinds of maturation process of silk-screen printing and electrostatic spinning have been combined
Come, obtain the nano fibrous membrane with micro-nano structure using electrostatic spinning, greatly simplify the stream that traditional micro-nano structure is constructed
Journey, realize the preparation of the low cost, large area of pliable pressure senser element；Simultaneously as the porous knot of nano-fiber film
Structure so that the nano fibrous membrane of micro-nano structure is easier compression deformation, further increases the sensitivity of sensor；Meanwhile will
Nano fibrous membrane is used in each component of condenser type pliable pressure sensor, make whole device possess good gas permeability and
Splendid flexibility, the long-time wearing for being advantageous to human body monitor human body respiration situation and the faint life entity reference of human body in real time
Number.
Brief description of the drawings
Fig. 1 is the cross section structure schematic diagram according to embodiment of the present disclosure condenser type pliable pressure sensor.
Fig. 2 is the preparation method flow chart according to embodiment of the present disclosure condenser type pliable pressure sensor.
Fig. 3 is the SEM according to the PES nano-fiber film dielectric layers of embodiment of the present disclosure bead structure
(SEM) picture.
Fig. 4 is to be shown according to the scanning electron of the PA6/PTT nano-fiber film dielectric layers of embodiment of the present disclosure coarse structure
Micro mirror (SEM) picture.
Fig. 5 is that the scanning electron for the TPU PS nano-fiber film dielectric layers for being embedded in PS microballoons according to the embodiment of the present disclosure shows
Micro mirror (SEM) picture.
Fig. 6 A are the electric capacity of condenser type pliable pressure sensor prepared by the method according to second embodiment of the disclosure
Rate of change and pressure dependence figure.
Fig. 6 B are the electric capacity of condenser type pliable pressure sensor prepared by the method according to the 3rd embodiment of the disclosure
Rate of change and pressure dependence figure.
Fig. 6 C are the electric capacity of condenser type pliable pressure sensor prepared by the method according to the 4th embodiment of the disclosure
Rate of change and pressure dependence figure.
【Symbol description】
110- the first flexible nano fiber membrane layers；120- first electrode layers；
210- the second flexible nano fiber membrane layers；220- the second electrode lays；
300- nano fibrous membrane dielectric layers.
Embodiment
Present disclose provides a kind of condenser type pliable pressure sensor and preparation method thereof, by silk-screen printing and electrostatic spinning
Two kinds of maturation process combine, and obtain the nano fibrous membrane with micro-nano structure using electrostatic spinning, greatly simplify biography
The flow that system micro-nano structure is constructed, realizes the preparation of the low cost, large area of pliable pressure senser element；Simultaneously as receive
The loose structure of rice fiber membrane so that the nano fibrous membrane of micro-nano structure is easier compression deformation, further increases sensing
The sensitivity of device, the combination property for realizing the features such as gas permeability, high sensitivity, low cost, flexible wearable improve.
For the purpose, technical scheme and advantage of the disclosure are more clearly understood, below in conjunction with specific embodiment, and reference
Accompanying drawing, the disclosure is further described.
The nano fibrous membrane that electrostatic spinning obtains has the advantages that loose structure, high porosity and extra specific surface area, has
Beneficial to the sensitivity of raising sensor, therefore nano fibrous membrane is used for pliable pressure sensor, is a promising trial.
Can obtain nano fibrous membrane surface by adjusting the spinning parameters such as spinning solution species, spinning voltage, spinning distance, solvent ratios
Micro-nano structure is obtained, this provides possibility for nano-fiber film for high sensitivity condenser type pliable pressure sensor.
In first exemplary embodiment of the disclosure, there is provided a kind of condenser type pliable pressure sensor.
Fig. 1 is the cross section structure schematic diagram according to embodiment of the present disclosure condenser type pliable pressure sensor.As shown in figure 1,
Condenser type pliable pressure sensor, including：First flexible nano fiber membrane layer 110；Second flexible nano fiber membrane layer
210, it is oppositely arranged with the first flexible nano fiber membrane layer 110；First electrode layer 120, it is attached to the first flexible nano fiber
The inner side of film layer 110；The second electrode lay 220, it is attached to the inner side of the second flexible nano fiber membrane layer 210；And nanofiber
Film dielectric layer 300, it is arranged between first electrode layer 120 and the second electrode lay 220, with first electrode layer 120 and second electrode
Spacing be present between layer 220, and distance values change under ambient pressure.
The various pieces of condenser type pliable pressure sensor in the present embodiment are described in detail below.
First flexible nano fiber membrane layer 110 and the second flexible nano fiber membrane layer 210 are respectively as carrying first
The substrate of electrode layer 120 and the second electrode lay 220, is prepared using electrostatic spinning technique, and the material of the two is in following material
One or more of but not limited to this：TPUE rubber (TPU), polyacrylonitrile (PAN), poly terephthalic acid second
Diol ester (PET), nylon 6 (PA6), Kynoar (PVDF), polyvinyl alcohol (PVA), PLA (PLA) and polyether sulfone
(PES)；The thickness of first flexible nano fiber membrane layer 110 and the second flexible nano fiber membrane layer 210 is between 50 μm~100
Between μm, the material of the first flexible nano fiber membrane layer 110 and the second flexible nano fiber membrane layer 210 can with identical,
Can be different；The thickness of the two can be with identical, can also be different.The He of first flexible nano fiber membrane layer 110 in the present embodiment
The material of second flexible nano fiber membrane layer 210 is TPUE rubber (TPU), and the first flexible nano is fine
The thickness for tieing up the flexible nano fiber membrane layer 210 of film layer 110 and second is 50 μm.
First electrode layer 120 and the second electrode lay 220 combine electrostatic spinning technique and prepared by screen printing technique, its material
For one kind but not limited to this in following material：Silver nano-grain or nano silver wire electrically conductive ink coating or CNT, stone
The coating that the conductive materials such as black alkene, tin indium oxide (ITO) are formed；The material of first electrode layer 120 and the second electrode lay 220 can be with
It is identical, it can also differ.The material of first electrode layer 120 and the second electrode lay 220 is silver nano-grain oil in the present embodiment
Black coating.
Nano fibrous membrane dielectric layer 300 is prepared using electrostatic spinning technique, is received by prepared by electrostatic spinning technique
Rice fiber membrane surfaces generally carry micro-nano structure, the material of nano fibrous membrane dielectric layer 300 for one kind in following material or
Several but not limited to this：Polyacrylonitrile (PAN), polyethylene terephthalate (PET), nylon 6 (PA6), Kynoar
(PVDF), polyvinyl alcohol (PVA), TPUE rubber (TPU), PLA (PLA), polyether sulfone (PES), it is thick
Degree is between 20 μm~50 μm.
The operation principle of the present embodiment condenser type pliable pressure sensor is described below：When the first flexibility as substrate is received
When rice fiber membrane layer 110 and the second flexible nano fiber membrane layer 210 are under pressure, nano fibrous membrane dielectric layer 300 occurs
Deformation, it is attached respectively to the first of the first flexible nano fiber membrane layer 110 and the inner side of the second flexible nano fiber membrane layer 210
Spacing between electrode layer 120 and the second electrode lay 220 changes therewith, so as to cause the change of sensor capacitance value, leads to
Outer guide line connection capacitance measuring tester is crossed to detect capacitance variation, can further reflect the stressing conditions of sensor, so as to real
Existing pressure sensing.
In second exemplary embodiment of the disclosure, there is provided a kind of preparation side of condenser type pliable pressure sensor
Method.
Fig. 2 is the preparation method flow chart according to embodiment of the present disclosure condenser type pliable pressure sensor.As shown in Fig. 2
The preparation method of disclosure condenser type pliable pressure sensor, including：
Step S202：Prepare the first flexible nano fiber membrane layer and the second flexible nano fiber membrane layer；
The method for preparing the first flexible nano fiber membrane layer and the second flexible nano fiber membrane layer is as follows：Configure electrostatic
Spinning solution；Spinning is carried out using device for spinning and the electrostatic spinning solution of configuration, obtains flexible nano fiber membrane layer；It will spin
The obtained flexible nano fiber membrane layer of silk is dried, and the solvent of spinning is volatilized to obtain the first flexible nano fiber membrane layer and the
Two flexible nano fiber membrane layers.
The present embodiment is equal to prepare the material of the first flexible nano fiber membrane layer and the second flexible nano fiber membrane layer
Illustrated exemplified by nano-fiber film layer for TPUE rubber (TPU), preparation comprises the following steps that：
Step S202a：A certain amount of TPU sections are added to DMF/dichloromethane (DMF/DCM)
In mixture system, magnetic agitation 12h, makes it be configured to the TPU uniform solutions that mass fraction is 20% at room temperature, stands de-
Bubble, it is standby；
Step S202b：The homogeneous TPU solution for being 20% using the obtained mass fractions of step S202a is spinning solution, with experiment
Room self-control spinning-drawing machine is device for spinning, carries out spinning and obtains TPU nano-fiber films；
Its spinning parameter is as follows：Spinning voltage is：20kV；Feed speed is：0.4mL/h；It is 15cm to receive distance；Spinning
Temperature is：65 DEG C, the spinning time is 6h；
Step S202c：TPU nano-fiber films made from step S202b are placed in drying box and are dried, when drying
Between be 2h, the solvent on tunica fibrosa surface is volatilized complete, obtain the first flexible nano fiber membrane layer and the second flexible nano is fine
Film layer is tieed up, the thickness of the two is 50 μm in the present embodiment.
Step S204：Using the first flexible nano fiber membrane layer as substrate, first electrode layer is prepared thereon, it is soft with second
Property nano-fiber film layer is substrate, and the second electrode lay is prepared thereon；
Using the first flexible nano fiber membrane layer as substrate, first electrode layer is prepared thereon, it is fine with the second flexible nano
Dimension film layer is substrate, and the method that the second electrode lay is prepared thereon is as follows：Using screen printing mode, in the first flexible nano
Fiber membrane layer surface prints first electrode layer, prints the second electrode lay in the second flexible nano fiber membrane layer surface.
The present embodiment is silver nano-grain electrically conductive ink or silver nanoparticle with the material of first electrode layer and the second electrode lay
Illustrated exemplified by line electrically conductive ink coating, preparation concretely comprises the following steps：Using screen printing mode, in nano-fiber film layer
Surface printing silver nano-grain electrically conductive ink or nano silver wire electrically conductive ink, so as to obtain electrode layer.
Step S206：After first electrode layer and the second electrode lay has been prepared, using conductive silver glue or silver paste at two
Each extraction wire on electrode layer；
Wire is copper conductor or aluminum foil leads, and the purpose for drawing copper conductor or aluminum foil leads is to test the property of sensor
Energy.
Step S208：Spinning solution is configured using high molecular polymer as solute, Nanowire is prepared based on electrostatic spinning process
Tie up film dielectric layer；
Illustrate to receive so that polyether sulfone (PES) adds DMF (DMF) configuration spinning solution as an example in the present embodiment
The preparation process of rice tunica fibrosa dielectric layer, preparation comprise the following steps that：
Step S208a：PES is added into DMF configuration spinning solutions, magnetic agitation 12h, makes it be configured to PES's at room temperature
Uniform solution, standing and defoaming are standby；
Step S208b：Step S208a is obtained into PES uniform solutions as spinning solution, spinning-drawing machine is made by oneself as spinning using laboratory
Silk device, carry out spinning and obtain the PES nano-fiber films of bead structure；
Its spinning parameter is as follows：Spinning voltage is between 18kV~26kV；Feed speed is between 0.3mL/h~0.6mL/
Between h；Distance is received between 13cm~20cm；Spinning temperature between 45 DEG C~80 DEG C, the spinning time between 6h~
Between 8h；The thickness of the PES nano-fiber films of obtained bead structure is between 20 μm~50 μm.
Fig. 3 is the SEM according to the PES nano-fiber film dielectric layers of embodiment of the present disclosure bead structure
(SEM) picture.As shown in figure 3, the micro-nano structure by the obtained nano fibrous membrane dielectric layer of step S208a and step S208b
Bead structure is presented.
In the present embodiment, the spinning parameter that uses for：Spinning voltage：20kV；Feed speed：0.4mL/h；Receive distance
15cm；Spinning temperature：65 DEG C, the spinning time is 6h, obtains the PES nano-fiber films containing bead structure, and thickness is 40 μm.
Step S210：By the first flexible nano fiber membrane layer of wire with first electrode layer and thereon, Nanowire
The second flexible nano fiber membrane layer of film dielectric layer and wire with the second electrode lay and thereon is tieed up according to electrode layer phase
To form, be packaged with " sandwich sandwich " structure, obtain condenser type pliable pressure sensor；
The present embodiment is TPU with the material of the first flexible nano fiber membrane layer and the second flexible nano fiber membrane layer
Nano-fiber film layer exemplified by illustrate encapsulation process.The detailed process bag being packaged by " sandwich sandwich " structure
Include：Using the first flexible nano fiber membrane layer with first electrode layer as upper TPU nano-fiber films layer, nano fibrous membrane
Dielectric layer, using the second flexible nano fiber membrane layer with the second electrode lay as lower TPU nano-fiber films layer, it is upper and lower
Electrode in TPU nano-fiber film layers is staggered relatively, then fixes post package, obtains the vapor-permeable type that full nano fibrous membrane is formed
Condenser type pliable pressure sensor.
It should be noted that step S206 effect is to facilitate follow-up test, for condenser type pliable pressure sensor
It is not essential for preparation, in other embodiments, can directly carries out step S208 and step after step s 204
S210, and the part about wire in step S210 is removed.
In the 3rd embodiment of the disclosure, there is provided the preparation method of another condenser type pliable pressure sensor.
For the embodiment compared with second embodiment, difference is as follows：
In step S208, formic acid, three are separately added into nylon 6 (PA6), the propylene glycol ester of poly terephthalic acid 1.3 (PTT)
Fluoroacetic acid/dichloromethane mixed liquor configures PA6, PTT solution as the preparation for illustrating nano fibrous membrane dielectric layer exemplified by spinning solution
Process, preparation comprise the following steps that：
Step S208a '：PA6 is added in formic acid, adds PTT in trifluoroacetic acid/dichloromethane mixed liquor, in room temperature
Lower magnetic agitation 12h, makes it be configured to PA6, PTT uniform solution respectively, and standing and defoaming is standby；
Step S208b '：Respectively using PA6, PTT uniform solution that step S208a ' is obtained as spinning solution, with laboratory from
Spinning-drawing machine processed is device for spinning, carries out spinning and obtains coarse structure PA6/PTT nano-fiber films；
Its spinning parameter is as follows：Spinning voltage is between 18kV~26kV；Feed speed is between 0.3mL/h~0.6mL/
Between h；Distance is received between 13cm~20cm；Spinning temperature between 45 DEG C~80 DEG C, the spinning time between 6h~
Between 8h, the thickness of the PA6/PTT nano-fiber films of obtained coarse structure is between 30 μm~50 μm.
Fig. 4 is to be shown according to the scanning electron of the PA6/PTT nano-fiber film dielectric layers of embodiment of the present disclosure coarse structure
Micro mirror (SEM) picture.As shown in figure 4, by the obtained nano-fiber film dielectric layer of step S208a ' and step S208b '
Coarse structure is presented in micro-nano structure.
In the 4th embodiment of the disclosure, there is provided the preparation method of another condenser type pliable pressure sensor.
For the embodiment compared with second embodiment, difference is as follows：
In step S208, so that styrene monomer, initiator and curing agent, TPU add DMF/DCM configuration spinning solutions as an example
Illustrate the preparation process of nano fibrous membrane dielectric layer, preparation comprises the following steps that：
Step S208a "：Styrene monomer, initiator and curing agent, TPU are added in DMF/DCM mixed systems, in room
The lower magnetic agitation 12h of temperature, makes it be configured to uniform solution, standing and defoaming is standby；
Step S208b "：Using the uniform solution that step S208a " is obtained as spinning solution, using laboratory make by oneself spinning-drawing machine as
Device for spinning, carry out the TPU@PS nano-fiber films that spinning obtains being embedded in polystyrene (PS) microballoon；
Its spinning parameter is as follows：Spinning voltage is between 18kV~26kV；Feed speed is between 0.3mL/h~0.6mL/
Between h；Distance is received between 13cm~20cm；Spinning temperature between 45 DEG C~80 DEG C, the spinning time between 6h~
Between 8h, the thickness of the TPU@PS nano-fiber films of obtained insertion PS microballoons is between 20 μm~40 μm.
Fig. 5 is that the scanning electron for the TPU PS nano-fiber film dielectric layers for being embedded in PS microballoons according to the embodiment of the present disclosure shows
Micro mirror (SEM) picture.As shown in figure 5, it is in by the obtained nano-fiber film dielectric layer of step S208a " and step S208b "
The micro-nano structure of embedded polystyrene microsphere in existing TPUE rubber.
Special instruction, the electrospinning parameters of the disclosure are not limited to the parameter in specific embodiment, can basis
Actual (real) thickness needs and the process condition of equipment itself carries out accommodation.
To the condenser type pliable pressure sensor prepared according to the embodiment of the present disclosure and the Nanowire for not possessing micro-nano structure
The condenser type pliable pressure sensor that dimension film dielectric layer is formed has carried out sensing capabilities test, and it is bent to obtain the performance comparison of the two
Line.Fig. 6 A are the rate of change of capacitance of condenser type pliable pressure sensor prepared by the method according to second embodiment of the disclosure
With pressure dependence figure.Fig. 6 B are condenser type pliable pressure sensor prepared by the method according to the 3rd embodiment of the disclosure
Rate of change of capacitance and pressure dependence figure.Fig. 6 C are the flexible pressure of condenser type prepared by the method according to the 4th embodiment of the disclosure
The rate of change of capacitance of force snesor and pressure dependence figure.Wherein, the sensitivity definition of pressure sensor here is：Unit pressure
The size of rate of change of capacitance corresponding to change；The value of sensitivity is equal to the slope of rate of change of capacitance and pressure relationship plot.
From Fig. 6 A, there is the sensor of bead structure in the range of pressure ＜ 600Pa, high sensitivity, which reaches, is
3.669kPa-1, and the sensor without micro-structural is in the range of pressure ＜ 300Pa, sensitivity 1.234kPa-1；Can by Fig. 6 B
Know there is the sensor of coarse structure in the range of pressure ＜ 500Pa, it is 6.535kPa-1 that high sensitivity, which reaches, and without micro-structural
Sensor is in the range of pressure ＜ 500Pa, sensitivity 2.401kPa-1；From Fig. 6 C, there is the sensing of microballoon embedded structure
For device in the range of pressure ＜ 1000Pa, it is 6.499kPa that susceptibility, which is up to,-1, and the sensor without micro-structural is in pressure ＜ 700Pa
In the range of, sensitivity 3.167kPa-1.Therefore, the condenser type with micro-structural nano fibrous membrane dielectric layer prepared is flexible
Pressure sensor has higher sensitivity.
It can be seen that the embodiment of the present disclosure provides a kind of condenser type pliable pressure sensor, and provide on band micro-structural
Three kinds of different preparation methods of nano fibrous membrane dielectric layer, provide condenser type pliable pressure sensor three kinds are corresponded to therewith
Preparation method.The condenser type pliable pressure sensor that the disclosure provides has the following advantages that：On the one hand, nano fibrous membrane can be used
In the substrate of conductive layer, conventional base such as polyethylene terephthalate (PET), dimethyl silicone polymer will be changed
(PDMS) the problem of, biodegradable plastic (Ecoflex) etc. is airtight, wear comfort is poor；On the other hand, nano-fiber film
For the dielectric layer of condenser type pliable pressure sensor, solve the Making programme complexity of traditional micro-nano structure dielectric layer and waste
The problems such as material, while whole pressure sensor is all made up of the excellent polymer nanofibre film of gas permeability so that device
Part human body respiration condition monitoring, human body skin top layer for a long time attach etc. be possibly realized, it is often more important that by silk-screen printing with
Electrostatic spinning process combines, and realizes the acquisition of the large area of condenser type pliable pressure sensor, reduces cost of manufacture.
In summary, present disclose provides a kind of condenser type pliable pressure sensor and preparation method thereof, by silk-screen printing
Combine with two kinds of maturation process of electrostatic spinning, obtain the nano fibrous membrane with micro-nano structure using electrostatic spinning, greatly
The flow for simplifying traditional micro-nano structure and constructing, realize the preparation of the low cost, large area of pliable pressure senser element；Together
When, due to the loose structure of nano-fiber film so that the nano fibrous membrane of micro-nano structure is easier compression deformation, further carries
The high sensitivity of sensor, the combination property for realizing the features such as gas permeability, high sensitivity, low cost, flexible wearable carry
It is high.
Unless there are known entitled phase otherwise meaning, the numerical parameter in this specification and appended claims are approximations, energy
Enough required characteristic changings according to as obtained by content of this disclosure.Specifically, it is all to be used in specification and claim
The numeral of the middle content for representing composition, reaction condition etc., it is thus understood that repaiied by the term of " about " in all situations
Decorations.Generally, the implication of its expression refers to include by specific quantity ± 10% change in certain embodiments, at some
± 5% change in embodiment, ± 1% change in certain embodiments, in certain embodiments ± 0.5% change.
Furthermore word "comprising" or " comprising " do not exclude the presence of element or step not listed in the claims.Positioned at member
Word "a" or "an" before part does not exclude the presence of multiple such elements.
Particular embodiments described above, the purpose, technical scheme and beneficial effect of the disclosure are carried out further in detail
Describe in detail bright, should be understood that the specific embodiment that the foregoing is only the disclosure, be not limited to the disclosure, it is all
Within the spirit and principle of the disclosure, any modification, equivalent substitution and improvements done etc., the guarantor of the disclosure should be included in
Within the scope of shield.
Claims (10)
1. a kind of condenser type pliable pressure sensor, including：
First flexible nano fiber membrane layer；
Second flexible nano fiber membrane layer, it is oppositely arranged with the first flexible nano fiber membrane layer；
First electrode layer, it is attached on the inside of the first flexible nano fiber membrane layer；
The second electrode lay, it is attached on the inside of the second flexible nano fiber membrane layer；And
Nano fibrous membrane dielectric layer, is arranged between first electrode layer and the second electrode lay.
2. condenser type pliable pressure sensor according to claim 1, wherein：
The material of the first flexible nano fiber membrane layer and the second flexible nano fiber membrane layer is one in following material
Kind is several：TPUE rubber (TPU), polyacrylonitrile (PAN), polyethylene terephthalate (PET),
Nylon 6 (PA6), Kynoar (PVDF), polyvinyl alcohol (PVA), PLA (PLA) and polyether sulfone (PES).
3. condenser type pliable pressure sensor according to claim 1 or 2, wherein, the first flexible nano fiber is thin
The thickness of film layer and the second flexible nano fiber membrane layer is between 50 μm~100 μm.
4. the condenser type pliable pressure sensor according to any one of claims 1 to 3, wherein, the first electrode layer and
The material of the second electrode lay is the one or several kinds in following material：Silver nano-grain or nano silver wire electrically conductive ink coating or
The coating that person's CNT, graphene and tin indium oxide (ITO) are formed.
5. the condenser type pliable pressure sensor according to any one of Claims 1-4, wherein, the nano fibrous membrane is situated between
The material of electric layer is the one or more in following material：Polyacrylonitrile (PAN), polyethylene terephthalate (PET), Buddhist nun
6 (PA6) of dragon, Kynoar (PVDF), polyvinyl alcohol (PVA), TPUE rubber (TPU), PLA
And polyether sulfone (PES) (PLA).
6. the condenser type pliable pressure sensor according to any one of claim 1 to 5, wherein, the nano fibrous membrane is situated between
The thickness of electric layer is between 20 μm~60 μm.
7. the condenser type pliable pressure sensor according to any one of claim 1 to 6, wherein：The nano fibrous membrane is situated between
The surface of electric layer carries micro-nano structure.
8. a kind of preparation method of condenser type pliable pressure sensor, including：
Prepare the first flexible nano fiber membrane layer and the second flexible nano fiber membrane layer；
Using the first flexible nano fiber membrane layer as substrate, first electrode layer is prepared thereon, it is thin with the second flexible nano fiber
Film layer is substrate, and the second electrode lay is prepared thereon；
Spinning solution is configured using high molecular polymer as solute, nano fibrous membrane dielectric layer is prepared based on electrostatic spinning process；With
And
By the first flexible nano fiber membrane layer with first electrode layer, nano fibrous membrane dielectric layer and with the second electrode lay
The second flexible nano fiber membrane layer according to the relative form of electrode layer, be packaged, obtain with " sandwich sandwich " structure
Condenser type pliable pressure sensor.
9. preparation method according to claim 8, wherein, the first flexible nano fiber membrane layer of the preparation and second soft
Property nano-fiber film layer includes：
Configure electrostatic spinning solution；
Spinning is carried out using device for spinning and the electrostatic spinning solution of configuration, obtains flexible nano fiber membrane layer；And
The flexible nano fiber membrane layer that spinning is obtained is dried, make the solvent of spinning volatilize to obtain the first flexible nano fiber it is thin
Film layer and the second flexible nano fiber membrane layer.
10. preparation method according to claim 8 or claim 9, wherein：
It is described that first electrode layer is prepared thereon using the first flexible nano fiber membrane layer as substrate, it is fine with the second flexible nano
Dimension film layer is substrate, and the second electrode lay is prepared thereon to be included：
Using screen printing mode, first electrode layer is printed in the first flexible nano fiber membrane layer surface, is received in the second flexibility
Rice fiber membrane layer surface printing the second electrode lay.
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