CN107195466A - A kind of preparation method of capacitor - Google Patents

A kind of preparation method of capacitor Download PDF

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Publication number
CN107195466A
CN107195466A CN201710409179.XA CN201710409179A CN107195466A CN 107195466 A CN107195466 A CN 107195466A CN 201710409179 A CN201710409179 A CN 201710409179A CN 107195466 A CN107195466 A CN 107195466A
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carbon nano
preparation
capacitor
pipe array
layer
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CN201710409179.XA
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李丹丹
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Hefei Tong Yu Electronic Technology Co Ltd
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Hefei Tong Yu Electronic Technology Co Ltd
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Priority to CN201710409179.XA priority Critical patent/CN107195466A/en
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G11/00Hybrid capacitors, i.e. capacitors having different positive and negative electrodes; Electric double-layer [EDL] capacitors; Processes for the manufacture thereof or of parts thereof
    • H01G11/22Electrodes
    • H01G11/24Electrodes characterised by structural features of the materials making up or comprised in the electrodes, e.g. form, surface area or porosity; characterised by the structural features of powders or particles used therefor
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G11/00Hybrid capacitors, i.e. capacitors having different positive and negative electrodes; Electric double-layer [EDL] capacitors; Processes for the manufacture thereof or of parts thereof
    • H01G11/22Electrodes
    • H01G11/26Electrodes characterised by their structure, e.g. multi-layered, porosity or surface features
    • H01G11/28Electrodes characterised by their structure, e.g. multi-layered, porosity or surface features arranged or disposed on a current collector; Layers or phases between electrodes and current collectors, e.g. adhesives
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G11/00Hybrid capacitors, i.e. capacitors having different positive and negative electrodes; Electric double-layer [EDL] capacitors; Processes for the manufacture thereof or of parts thereof
    • H01G11/22Electrodes
    • H01G11/30Electrodes characterised by their material
    • H01G11/32Carbon-based
    • H01G11/36Nanostructures, e.g. nanofibres, nanotubes or fullerenes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G11/00Hybrid capacitors, i.e. capacitors having different positive and negative electrodes; Electric double-layer [EDL] capacitors; Processes for the manufacture thereof or of parts thereof
    • H01G11/84Processes for the manufacture of hybrid or EDL capacitors, or components thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G11/00Hybrid capacitors, i.e. capacitors having different positive and negative electrodes; Electric double-layer [EDL] capacitors; Processes for the manufacture thereof or of parts thereof
    • H01G11/84Processes for the manufacture of hybrid or EDL capacitors, or components thereof
    • H01G11/86Processes for the manufacture of hybrid or EDL capacitors, or components thereof specially adapted for electrodes
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/13Energy storage using capacitors

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Nanotechnology (AREA)
  • Electric Double-Layer Capacitors Or The Like (AREA)
  • Laminated Bodies (AREA)

Abstract

The invention discloses a kind of preparation method of capacitor, the preparation method comprises the following steps:(1)The preparation of super in-line arrangement carbon nano pipe array;(2)The preparation of carbon nano-tube film;(3)The formation of carbon nano-tube thin-film structure;(4)The preparation of capacitor.The method of preparing capacitor of the present invention is simple and easy to apply, and CNT has good electric conductivity and the specific surface area of itself is big, and obtained ultracapacitor has higher specific capacitance and electrical conductivity;Carbon nano-tube thin-film structure includes multiple CNTs for joining end to end and aligning, there are multiple microcellular structures between adjacent CNT, so that forming the microcellular structure of substantial amounts of uniform and regular distribution in carbon nano-tube thin-film structure, this advantageously forms electric charge path with good conductivity.

Description

A kind of preparation method of capacitor
Technical field
The present invention relates to technical field of electronic components, more particularly to a kind of preparation method of capacitor.
Background technology
With making rapid progress for electronic information technology, the update speed of digital electronic goods is more and more faster, with flat board TV(LCD and PDP), notebook computer, the consumer electronics product volume of production and marketing sustainable growth based on the product such as digital camera, band The growth of capacitor industry is moved.
Existing capacitor generally comprises electrode, barrier film and electrolyte solution, and the electrode and barrier film are all disposed within the electrolysis In liquor.The electrode includes a collector and the electrode material being arranged on the collector.The preparation side of existing capacitor Method is typically after electrode material is fully ground, a certain amount of binding agent to be added wherein and is stirred, then passes through die pressing, cold The drawing methods such as isostatic pressing method, hot isostatic pressing method are compressed on the collectors such as nickel foam, graphite flake, nickel sheet, aluminium flake or copper sheet, i.e., The electrode of definite shape is can be made into, then electrode is arranged in the electrolyte solution containing barrier film and can be made into ultracapacitor, The preparation method is more complicated.Therefore, it is necessary to provide a kind of capacitor with high-capacitance and high power density.
The content of the invention
In view of the shortcomings of the prior art, the present invention provides a kind of preparation method of capacitor, good using CNT Electric conductivity and specific surface area, method are simple and easy to apply, and obtained capacitor has higher specific capacitance and electrical conductivity.
The present invention solves technical problem and utilizes following technical scheme:
The invention provides a kind of preparation method of capacitor, comprise the following steps:
(1)The preparation of super in-line arrangement carbon nano pipe array:Smooth substrate is chosen, in the catalyst layer of substrate surface even spread one, is put Put and annealed 40-50 minutes in 800-850 DEG C of air, then the substrate of annealing is placed in reacting furnace, in nitrogen or argon gas Environmental protection under be heated to 600-620 DEG C, be passed through carbon-source gas react 8-12 minute, grow obtain 100-500 μm of height Carbon nano pipe array, stacking at least two obtains super in-line arrangement CNT parallel and perpendicular to the carbon nano pipe array of substrate grown Array;
(2)The preparation of carbon nano-tube film:In step(1)Width 200-300 μ are chosen in the super in-line arrangement carbon nano pipe array prepared M carbon nano-tube bundle fragment, along a direction substantially perpendicular the carbon nano pipe array direction of growth stretched, obtain continuous CNT Film;
(3)The formation of carbon nano-tube thin-film structure:Two panels identical copper sheet is chosen as the first current collection layer and the second current collection layer, will At least one layer of carbon nano-tube film is laid on the surface of current collection layer, forms the carbon nano-tube thin-film structure of self-supporting;
(4)The preparation of capacitor:Non-woven fabrics is chosen as membrane layer, is placed respectively in the both sides of membrane layer and is equipped with CNT The first current collection layer and the second current collection layer of membrane structure, are put into shell together, and injection electrolyte post package obtains the capacitor.
Preferably, the step(1)Smooth substrate is selected from phosphorous, nitrogen type or the silicon base containing oxide layer.
Preferably, the step(1)One or more combinations of the catalyst layer material in iron, cobalt, nickel.
Preferably, the step(1)Carbon-source gas are acetylene, ethene, methane or ethane.
Preferably, the step(1)The height of carbon nano pipe array is 200-300 μm.
Preferably, the step(3)Carbon nano-tube thin-film structure can use organic solvent infiltration processing 5-8 minutes.
Preferably, the organic solvent is methanol, ethanol, acetone, dichloromethane or acetonitrile.
Preferably, the step(4)Electrolyte is selected from sodium hydroxide solution, potassium hydroxide solution, aqueous sulfuric acid, hydrochloric acid The aqueous solution, tetraethylammonium tetrafluoroborate, lithium perchlorate or trifluoromethanesulfonic acid lithium.
Compared with prior art, the present invention has the advantages that:
(1)The method of preparing capacitor of the present invention, simple and easy to apply, CNT has good electric conductivity and the ratio table of itself Area is big, and obtained ultracapacitor has higher specific capacitance and electrical conductivity;Carbon nano tube growth in carbon nano pipe array Uniformly, the CNT thus in carbon nano-tube thin-film structure is uniformly dispersed, and preparation method is simple, it is easy to practical application;Carbon Nano-tube film structure includes multiple CNTs for joining end to end and aligning, and exists between adjacent CNT multiple Microcellular structure so that the microcellular structure of substantial amounts of uniform and regular distribution is formed in carbon nano-tube thin-film structure, this is conducive to shape Into electric charge path with good conductivity.
(2)The method of preparing capacitor of the present invention, carbon nano-tube thin-film structure can use organic solvent infiltration to handle, In the presence of the surface tension of volatile organic solvent, parallel CNT fragment can be easier to assemble in carbon nano-tube film Into carbon nano-tube bundle.
Embodiment
Invention is described in further detail below in conjunction with specific embodiment.
Embodiment 1.
A kind of preparation method of capacitor, comprises the following steps:
(1)The preparation of super in-line arrangement carbon nano pipe array:Smooth phosphorous silicon base is chosen, in the iron material of substrate surface even spread one Catalyst layer, be placed in 800-850 DEG C of air anneal 40-50 minutes, then the substrate of annealing is placed in reacting furnace, 600-620 DEG C is heated under the environmental protection of nitrogen, ethylene reaction is passed through 8-12 minutes, growth obtains 100-500 μm of height Carbon nano pipe array, stack at least two and obtain super in-line arrangement carbon nanometer parallel and perpendicular to the carbon nano pipe array of substrate grown Pipe array;
(2)The preparation of carbon nano-tube film:In step(1)Width 200-300 μ are chosen in the super in-line arrangement carbon nano pipe array prepared M carbon nano-tube bundle fragment, along a direction substantially perpendicular the carbon nano pipe array direction of growth stretched, obtain continuous CNT Film;
(3)The formation of carbon nano-tube thin-film structure:Two panels identical copper sheet is chosen as the first current collection layer and the second current collection layer, will At least one layer of carbon nano-tube film is laid on the surface of current collection layer, forms the carbon nano-tube thin-film structure of self-supporting, uses ethanol Infiltration processing 5-8 minutes;
(4)The preparation of capacitor:Non-woven fabrics is chosen as membrane layer, is placed respectively in the both sides of membrane layer and is equipped with CNT The first current collection layer and the second current collection layer of membrane structure, are put into shell together, and injection aqueous sulfuric acid post package obtains the electricity Container.
Embodiment 2.
A kind of preparation method of capacitor, comprises the following steps:
(1)The preparation of super in-line arrangement carbon nano pipe array:Smooth nitrogen type silicon base is chosen, in the cobalt material of substrate surface even spread one Catalyst layer, be placed in 800-850 DEG C of air anneal 40-50 minutes, then the substrate of annealing is placed in reacting furnace, 600-620 DEG C is heated under the environmental protection of nitrogen, acetylene reaction is passed through 8-12 minutes, growth obtains 200-300 μm of height Carbon nano pipe array, stack at least two and obtain super in-line arrangement carbon nanometer parallel and perpendicular to the carbon nano pipe array of substrate grown Pipe array;
(2)The preparation of carbon nano-tube film:In step(1)Width 200-300 μ are chosen in the super in-line arrangement carbon nano pipe array prepared M carbon nano-tube bundle fragment, along a direction substantially perpendicular the carbon nano pipe array direction of growth stretched, obtain continuous CNT Film;
(3)The formation of carbon nano-tube thin-film structure:Two panels identical copper sheet is chosen as the first current collection layer and the second current collection layer, will At least one layer of carbon nano-tube film is laid on the surface of current collection layer, forms the carbon nano-tube thin-film structure of self-supporting, uses acetone Infiltration processing 5-8 minutes;
(4)The preparation of capacitor:Non-woven fabrics is chosen as membrane layer, is placed respectively in the both sides of membrane layer and is equipped with CNT The first current collection layer and the second current collection layer of membrane structure, are put into shell together, and injection tetraethylammonium tetrafluoroborate post package is obtained To the capacitor.
Embodiment 3.
A kind of preparation method of capacitor, comprises the following steps:
(1)The preparation of super in-line arrangement carbon nano pipe array:The smooth silicon base containing oxide layer is chosen, is uniformly applied in substrate surface The catalyst layer of cloth nickel material, is placed in 800-850 DEG C of air and anneals 40-50 minutes, be then placed in the substrate of annealing In reacting furnace, 600-620 DEG C is heated under the environmental protection of nitrogen, methane reaction is passed through 8-12 minutes, growth obtains height 200-300 μm of carbon nano pipe array, stacking at least two is surpassed parallel and perpendicular to the carbon nano pipe array of substrate grown In-line arrangement carbon nano pipe array;
(2)The preparation of carbon nano-tube film:In step(1)Width 200-300 μ are chosen in the super in-line arrangement carbon nano pipe array prepared M carbon nano-tube bundle fragment, along a direction substantially perpendicular the carbon nano pipe array direction of growth stretched, obtain continuous CNT Film;
(3)The formation of carbon nano-tube thin-film structure:Two panels identical copper sheet is chosen as the first current collection layer and the second current collection layer, will At least one layer of carbon nano-tube film is laid on the surface of current collection layer, forms the carbon nano-tube thin-film structure of self-supporting, uses dichloro Methane infiltration processing 5-8 minutes;
(4)The preparation of capacitor:Non-woven fabrics is chosen as membrane layer, is placed respectively in the both sides of membrane layer and is equipped with CNT The first current collection layer and the second current collection layer of membrane structure, are put into shell together, and injection sodium hydroxide solution post package is somebody's turn to do Capacitor.
Embodiment 4.
A kind of preparation method of capacitor, comprises the following steps:
(1)The preparation of super in-line arrangement carbon nano pipe array:The smooth silicon base containing oxide layer is chosen, is uniformly applied in substrate surface The catalyst layer of cloth iron material, is placed in 800-850 DEG C of air and anneals 40-50 minutes, be then placed in the substrate of annealing In reacting furnace, 600-620 DEG C is heated under the environmental protection of nitrogen, acetylene reaction is passed through 8-12 minutes, growth obtains height 200-300 μm of carbon nano pipe array, stacking at least two is surpassed parallel and perpendicular to the carbon nano pipe array of substrate grown In-line arrangement carbon nano pipe array;
(2)The preparation of carbon nano-tube film:In step(1)Width 200-300 μ are chosen in the super in-line arrangement carbon nano pipe array prepared M carbon nano-tube bundle fragment, along a direction substantially perpendicular the carbon nano pipe array direction of growth stretched, obtain continuous CNT Film;
(3)The formation of carbon nano-tube thin-film structure:Two panels identical copper sheet is chosen as the first current collection layer and the second current collection layer, will At least one layer of carbon nano-tube film is laid on the surface of current collection layer, forms the carbon nano-tube thin-film structure of self-supporting, uses acetonitrile Infiltration processing 5-8 minutes;
(4)The preparation of capacitor:Non-woven fabrics is chosen as membrane layer, is placed respectively in the both sides of membrane layer and is equipped with CNT The first current collection layer and the second current collection layer of membrane structure, are put into shell together, and injection potassium hydroxide solution post package is somebody's turn to do Capacitor.
Embodiment 5.
A kind of preparation method of capacitor, comprises the following steps:
(1)The preparation of super in-line arrangement carbon nano pipe array:Smooth phosphorous silicon base is chosen, in substrate surface even spread iron material Catalyst layer, be placed in 800-850 DEG C of air anneal 40-50 minutes, then the substrate of annealing is placed in reacting furnace, 600-620 DEG C is heated under the environmental protection of nitrogen, acetylene reaction is passed through 8-12 minutes, growth obtains 200-300 μm of height Carbon nano pipe array, stack at least two and obtain super in-line arrangement carbon nanometer parallel and perpendicular to the carbon nano pipe array of substrate grown Pipe array;
(2)The preparation of carbon nano-tube film:In step(1)Width 200-300 μ are chosen in the super in-line arrangement carbon nano pipe array prepared M carbon nano-tube bundle fragment, along a direction substantially perpendicular the carbon nano pipe array direction of growth stretched, obtain continuous CNT Film;
(3)The formation of carbon nano-tube thin-film structure:Two panels identical copper sheet is chosen as the first current collection layer and the second current collection layer, will At least one layer of carbon nano-tube film is laid on the surface of current collection layer, forms the carbon nano-tube thin-film structure of self-supporting, uses methanol Infiltration processing 5-8 minutes;
(4)The preparation of capacitor:Non-woven fabrics is chosen as membrane layer, is placed respectively in the both sides of membrane layer and is equipped with CNT The first current collection layer and the second current collection layer of membrane structure, are put into shell together, and injection lithium perchlorate post package obtains the electric capacity Device.
Embodiment 6.
A kind of preparation method of capacitor, comprises the following steps:
(1)The preparation of super in-line arrangement carbon nano pipe array:Smooth phosphorous silicon base is chosen, in substrate surface even spread nickel material Catalyst layer, be placed in 800-850 DEG C of air anneal 40-50 minutes, then the substrate of annealing is placed in reacting furnace, 600-620 DEG C is heated under the environmental protection of nitrogen, acetylene reaction is passed through 8-12 minutes, growth obtains 200-300 μm of height Carbon nano pipe array, stack at least two and obtain super in-line arrangement carbon nanometer parallel and perpendicular to the carbon nano pipe array of substrate grown Pipe array;
(2)The preparation of carbon nano-tube film:In step(1)Width 200-300 μ are chosen in the super in-line arrangement carbon nano pipe array prepared M carbon nano-tube bundle fragment, along a direction substantially perpendicular the carbon nano pipe array direction of growth stretched, obtain continuous CNT Film;
(3)The formation of carbon nano-tube thin-film structure:Two panels identical copper sheet is chosen as the first current collection layer and the second current collection layer, will At least one layer of carbon nano-tube film is laid on the surface of current collection layer, forms the carbon nano-tube thin-film structure of self-supporting, uses ethanol Infiltration processing 5-8 minutes;
(4)The preparation of capacitor:Non-woven fabrics is chosen as membrane layer, is placed respectively in the both sides of membrane layer and is equipped with CNT The first current collection layer and the second current collection layer of membrane structure, are put into shell together, and injection aqueous hydrochloric acid solution post package obtains the electricity Container.
Described above is only the preferred embodiment of the present invention, and protection scope of the present invention is not limited merely to above-mentioned implementation Example, all technical schemes belonged under thinking of the present invention belong to protection scope of the present invention.It should be pointed out that for the art Those of ordinary skill for, some improvements and modifications without departing from the principles of the present invention, these improve and profit should regard For protection scope of the present invention.

Claims (8)

1. a kind of preparation method of capacitor, it is characterised in that comprise the following steps:
(1)The preparation of super in-line arrangement carbon nano pipe array:Smooth substrate is chosen, in the catalyst layer of substrate surface even spread one, is put Put and annealed 40-50 minutes in 800-850 DEG C of air, then the substrate of annealing is placed in reacting furnace, in nitrogen or argon gas Environmental protection under be heated to 600-620 DEG C, be passed through carbon-source gas react 8-12 minute, grow obtain 100-500 μm of height Carbon nano pipe array, stacking at least two obtains super in-line arrangement CNT parallel and perpendicular to the carbon nano pipe array of substrate grown Array;
(2)The preparation of carbon nano-tube film:In step(1)Width 200-300 μ are chosen in the super in-line arrangement carbon nano pipe array prepared M carbon nano-tube bundle fragment, along a direction substantially perpendicular the carbon nano pipe array direction of growth stretched, obtain continuous CNT Film;
(3)The formation of carbon nano-tube thin-film structure:Two panels identical copper sheet is chosen as the first current collection layer and the second current collection layer, will At least one layer of carbon nano-tube film is laid on the surface of current collection layer, forms the carbon nano-tube thin-film structure of self-supporting;
(4)The preparation of capacitor:Non-woven fabrics is chosen as membrane layer, is placed respectively in the both sides of membrane layer and is equipped with CNT The first current collection layer and the second current collection layer of membrane structure, are put into shell together, and injection electrolyte post package obtains the capacitor.
2. the preparation method of capacitor according to claim 1, it is characterised in that the step(1)Smooth substrate is selected from Phosphorous, nitrogen type or the silicon base containing oxide layer.
3. the preparation method of capacitor according to claim 1, it is characterised in that the step(1)Catalyst layer material One or more combinations in iron, cobalt, nickel.
4. the preparation method of capacitor according to claim 1, it is characterised in that the step(1)Carbon-source gas are second Alkynes, ethene, methane or ethane.
5. the preparation method of capacitor according to claim 1, it is characterised in that the step(1)Carbon nano pipe array Height be 200-300 μm.
6. the preparation method of capacitor according to claim 1, it is characterised in that the step(3)Carbon nano-tube film Structure can use organic solvent infiltration processing 5-8 minutes.
7. the preparation method of capacitor according to claim 6, it is characterised in that the organic solvent be methanol, ethanol, Acetone, dichloromethane or acetonitrile.
8. the preparation method of capacitor according to claim 1, it is characterised in that the step(4)Electrolyte is selected from hydrogen Sodium hydroxide solution, potassium hydroxide solution, aqueous sulfuric acid, aqueous hydrochloric acid solution, tetraethylammonium tetrafluoroborate, lithium perchlorate or trifluoro Methanesulfonic acid lithium.
CN201710409179.XA 2017-06-02 2017-06-02 A kind of preparation method of capacitor Withdrawn CN107195466A (en)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030143453A1 (en) * 2001-11-30 2003-07-31 Zhifeng Ren Coated carbon nanotube array electrodes
CN101425380A (en) * 2007-11-02 2009-05-06 清华大学 Super capacitor and preparing method therefor
CN101471184A (en) * 2007-12-27 2009-07-01 清华大学 Super capacitor
TWI312337B (en) * 2005-12-16 2009-07-21 Hon Hai Prec Ind Co Ltd Method for making the carbon nanotubes silk
CN101937776A (en) * 2010-07-14 2011-01-05 清华大学 Super capacitor

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030143453A1 (en) * 2001-11-30 2003-07-31 Zhifeng Ren Coated carbon nanotube array electrodes
TWI312337B (en) * 2005-12-16 2009-07-21 Hon Hai Prec Ind Co Ltd Method for making the carbon nanotubes silk
CN101425380A (en) * 2007-11-02 2009-05-06 清华大学 Super capacitor and preparing method therefor
CN101471184A (en) * 2007-12-27 2009-07-01 清华大学 Super capacitor
CN101937776A (en) * 2010-07-14 2011-01-05 清华大学 Super capacitor

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