CN106482874B - Regular four-surface three-dimensional force flexible touch sensor array - Google Patents
Regular four-surface three-dimensional force flexible touch sensor array Download PDFInfo
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- CN106482874B CN106482874B CN201611053555.8A CN201611053555A CN106482874B CN 106482874 B CN106482874 B CN 106482874B CN 201611053555 A CN201611053555 A CN 201611053555A CN 106482874 B CN106482874 B CN 106482874B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
Abstract
The invention provides a regular tetrahedron type three-dimensional force flexible touch sensor array, which comprises a plurality of three-dimensional force flexible touch sensing units which are arranged in a flexible substrate in an array manner and have the same structure, wherein the three-dimensional force flexible touch sensing units are regular tetrahedron structures prepared from flexible conductive rubber with piezoresistive effect; the upper end surfaces of all regular tetrahedron structures are positioned in the same plane, and when a three-dimensional rectangular coordinate system of the tetrahedron structure is established by taking the intersection point of three lower side surfaces of a regular tetrahedron structure as an origin O, one edge of the upper end surface of the tetrahedron structure is parallel to a Y axis, and the projection of the intersection point of the other two edges falls on the positive direction of the X axis; the up end of regular tetrahedron structure constitutes three resistance with three downside equivalence respectively, the center of downside all is equipped with the electric contact that is used for exporting corresponding resistance signal. The invention reduces the coupling degree of the sensor resistance data, and obviously improves the decoupling precision and the response speed.
Description
Technical Field
The invention relates to the technical field of sensors, in particular to a regular tetrahedral three-dimensional force flexible touch sensor array.
Background
With the rapid development of the robot sensing technology, the research of the touch sensor is receiving more and more extensive attention from various academic circles and industrial circles. The flexible touch sensor developed nowadays basically has a single-dimensional touch sensing function, but a robot needs to better control the relative sliding between a manipulator and a target object in order to safely and reliably grab the target, so that the touch sensor is required to be capable of detecting multi-dimensional force while having good flexibility. Furthermore, there is also a need in fields such as surgery, rehabilitation and service, aerospace, etc. to have flexible tactile sensors capable of detecting multi-dimensional force information.
At present, various three-dimensional force sensors have been developed at home and abroad, but the touch sensors based on the fully flexible structure are fewer. Xufei et al, an intelligent mechanical research institute for fertilizer combination in Chinese academy of sciences, uses conductive rubber as a base material, and can detect three-dimensional force by using a flexible touch sensor developed by a parallel resistance model. Such sensors have some flexibility but are very demanding in the manufacturing process and have a long response time to forces exerted on the surface.
The patent (CN103335754A) applied by Huangying, et al, university of fertilizer combining industry discloses the manufacture of a fully flexible three-dimensional force touch sensor and a pressure sensitive unit, which is characterized in that all three-dimensional force touch sensing units are arranged in an array on the surface of a detected area and are filled with flexible substrates. A patent (CN103134622A) applied by the institute of fertilizer-mixing intelligent machinery of the chinese academy of sciences, sun xin, and the like discloses a method for preparing a three-dimensional force flexible tactile sensor array, wherein an N-shaped three-dimensional support is used as a tactile sensor array microstructure capable of detecting a three-dimensional force, and insulating rubber is filled between every two microstructures. In the two patents, the manufacturing and processing are simple, but the coupling exists on the microstructure units, the decoupling algorithm is complex, and the force applied to the surface of the sensor cannot be detected in real time.
Disclosure of Invention
The invention aims to provide a regular tetrahedral three-dimensional force flexible touch sensor array which is simple in structure, easy to decouple, high in sensitivity and strong in stability.
The technical scheme of the invention is as follows:
a regular tetrahedral three-dimensional force flexible touch sensor array comprises a plurality of three-dimensional force flexible touch sensing units which are arranged in a flexible substrate in an array manner and have the same structure, wherein the three-dimensional force flexible touch sensing units are regular tetrahedral structures prepared from flexible conductive rubber with piezoresistive effect; the upper end surfaces of all regular tetrahedron structures are positioned in the same plane, and when a three-dimensional rectangular coordinate system of the tetrahedron structure is established by taking the intersection point of three lower side surfaces of a regular tetrahedron structure as an origin O, one edge of the upper end surface of the tetrahedron structure is parallel to a Y axis, and the projection of the intersection point of the other two edges falls on the positive direction of the X axis; the up end of regular tetrahedron structure constitutes three resistance with three downside equivalence respectively, the center of downside all is equipped with the electric contact that is used for exporting corresponding resistance signal.
The regular tetrahedron type three-dimensional force flexible touch sensor array is characterized in that the side length of each regular tetrahedron structure is 7-11 mm, and the central distance between two adjacent regular tetrahedron structures in the same row or the same column is 14-18 mm.
In the regular tetrahedral three-dimensional force flexible touch sensor array, the three-dimensional force of the three-dimensional force flexible touch sensing unit is obtained by analyzing the following formula:
wherein, Fx、FyAnd FzRespectively representing acting forces of the three-dimensional force flexible tactile sensing unit in X, Y and Z directions; f1Representing the pressure, F, on the underside of the projection thereof falling in the third and fourth quadrants of the XOY plane2Show its projection falls onPressure on the underside of the first and second quadrants of the XOY plane, F3Representing the pressure to which its projection falls on the underside of the second and third quadrants of the XOY plane; f1、F2And F3Force sensitive state equation F according to three-dimensional force flexible touch sensing uniti＝f(Ri) I is obtained as 1, 2, 3, RiAnd i is 1, 2, and 3 each represents the resistance of the corresponding lower side surface.
The invention has the beneficial effects that:
(1) the three-dimensional force flexible touch sensing unit adopts a regular tetrahedron structure, skillfully decomposes the acting force on the surface of the sensor to three lower side surfaces, reduces the coupling degree of resistance data of the sensor, improves the decoupling algorithm efficiency, and can achieve the purpose of real-time detection.
(2) The three-dimensional force flexible touch sensing unit is made of flexible conductive rubber with piezoresistive effect, the whole sensor array has good flexibility, the sensor can realize bending deformation, can be reliably attached to the skin of a robot, and realizes effective sensing of external acting force.
(3) The invention can be manufactured by adopting a layered die filling technology, and has the advantages of simple process, compact structure, strong integrity, stable work and high sensitivity.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic diagram of a three-dimensional force flexible tactile sensing unit configuration of the present invention;
FIG. 3 is a three-dimensional force flexible tactile sensing unit F of the present invention1、F2A force analysis schematic diagram;
FIG. 4 is a three-dimensional force flexible tactile sensing unit F of the present invention3And (5) force analysis schematic diagram.
Detailed Description
The invention is further described with reference to the following figures and specific examples.
As shown in fig. 1 and 2, a regular tetrahedral three-dimensional force flexible tactile sensor array includes a plurality of three-dimensional force flexible tactile sensing units 1 arranged in order, a flexible substrate 3 made of insulating rubber (PDMS) or other flexible insulating materials is filled between the three-dimensional force flexible tactile sensing units 1, and the three-dimensional force flexible tactile sensing units 1 are regular tetrahedral structures and made of flexible conductive rubber with piezoresistive effect. The ordered arrangement refers to the regular shape plane distribution of the three-dimensional force flexible touch sensing units 1 on the surface of the detected area.
The upper end face of the regular tetrahedron structure is parallel to an XOY plane of the three-dimensional rectangular coordinate system, one edge of the upper end face is parallel to a Y axis, the projection of the intersection point of the other two edges is in the positive direction of the X axis, the intersection point of the three lower side faces is used as the origin O of the XOY plane of the three-dimensional rectangular coordinate system, and the upper end face and the three lower side faces respectively and equivalently form a resistor R1Resistance R2And a resistance R3The center positions of the three lower side surfaces are all pasted with an electric contact 2, and resistance values on all the lower side surfaces are measured by collecting resistance signals on the electric contact 2. The side length of the regular tetrahedron structure is 7-11 mm, and the center distance of two adjacent regular tetrahedron structures in the same row or the same column is 14-18 mm.
When the three-dimensional force flexible touch sensor array is used, when the surface of the three-dimensional force flexible touch sensor array is subjected to acting force, the force applied to the surface of the three-dimensional force flexible touch sensor array is decomposed to three lower side surfaces of a regular tetrahedron structure, so that the regular tetrahedron structure is deformed, the three lower side surfaces are pressed, and the resistance of the three-dimensional force flexible touch sensor array is correspondingly changed according to the pressure. Equation of state F from piezoresistive and pressurei＝f(Ri) I 1, 2, 3, the magnitude of the pressure to which each underside is subjected can be determined, where f is determined by the physical properties of the material used for the regular tetrahedron structure.
As shown in fig. 3 and 4, the three-dimensional force of the three-dimensional force flexible tactile sensing unit 1 is as follows:
Fz＝F1cosθ+F2cosθ+F3cosθ
in the above formula, F1Representing the pressure, F, on the underside of the projection thereof falling in the third and fourth quadrants of the XOY plane2Representing the pressure, F, on the underside of the first and second quadrants of the XOY plane whose projections fall in the XOY plane3Representing the pressure to which its projection falls on the underside of the second and third quadrants of the XOY plane;
is represented by F1And F2The projection on the XOY plane forms an angle with the X-axis, and theta denotes F1、F2And F3The included angle with the Z axis. According to the characteristics of the regular tetrahedral structure,
at 60 deg., theta is arccos (1/3). Fx、FyAnd FzRepresenting the forces experienced by the three-dimensional force flexible tactile sensing unit 1 in the X, Y and Z directions, respectively.
The three-dimensional force flexible touch sensor array can adopt a layered die filling technology, the flexible substrate 3 adopts high molecular polymer, a regular tetrahedron structure is placed in corresponding holes in a die, then insulating rubber (PDMS) or other flexible insulating materials are poured in the rest gaps of the die, and the three-dimensional force flexible touch sensor array prototype can be obtained after demolding.
The three-dimensional force flexible touch sensor array of the invention can be used only by calibration: the forces with different magnitudes are repeatedly acted on the surface of the sensor along the direction X, Y, Z, the relation between each resistance of the three-dimensional force flexible touch sensing unit 1 and the applied force under different pressures is measured, and then the mathematical relation between each resistance of the three-dimensional force flexible touch sensing unit 1 and the three-dimensional force is obtained through the decoupling of a neural network or a least square method.
The above-mentioned embodiments are merely illustrative of the preferred embodiments of the present invention, and do not limit the scope of the present invention, and various modifications and improvements made to the technical solution of the present invention by those skilled in the art without departing from the spirit of the present invention should fall within the protection scope defined by the claims of the present invention.
Claims (3)
1. The utility model provides a flexible tactile sensor array of positive tetrahedral three-dimensional force, is including being the same three-dimensional force flexible tactile sensing unit of a plurality of structures of array arrangement in flexible base, its characterized in that: the three-dimensional force flexible touch sensing units are regular tetrahedrons made of flexible conductive rubber with piezoresistive effect; the upper end surfaces of all regular tetrahedron structures are positioned in the same plane, and when a three-dimensional rectangular coordinate system of the tetrahedron structure is established by taking the intersection point of three lower side surfaces of a regular tetrahedron structure as an origin O, one edge of the upper end surface of the tetrahedron structure is parallel to a Y axis, and the projection of the intersection point of the other two edges falls on the positive direction of the X axis; the up end of regular tetrahedron structure constitutes three resistance with three downside equivalence respectively, the center of downside all is equipped with the electric contact that is used for exporting corresponding resistance signal.
2. The regular tetrahedral three-dimensional force flexible tactile sensor array according to claim 1, wherein: the side length of the regular tetrahedron structure is 7-11 mm, and the center distance of two adjacent regular tetrahedron structures in the same row or the same column is 14-18 mm.
3. The regular tetrahedral three-dimensional force flexible tactile sensor array according to claim 1, wherein: the three-dimensional force of the three-dimensional force flexible tactile sensing unit is obtained by analyzing the following formula:
wherein, Fx、FyAnd FzRespectively representing acting forces of the three-dimensional force flexible tactile sensing unit in X, Y and Z directions; f1Representing the pressure, F, on the underside of the projection thereof falling in the third and fourth quadrants of the XOY plane2Representing the pressure, F, on the underside of the first and second quadrants of the XOY plane whose projections fall in the XOY plane3Representing the pressure to which its projection falls on the underside of the second and third quadrants of the XOY plane; f1、F2And F3Force sensitive state equation F according to three-dimensional force flexible touch sensing uniti＝f(Ri) I is obtained as 1, 2, 3, RiAnd i is 1, 2, and 3 each represents the resistance of the corresponding lower side surface.
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| CN108362410B (en) * | 2018-04-26 | 2023-07-18 | 中国科学院合肥物质科学研究院 | Three-dimensional force flexible sensor |
| CN113091979B (en) * | 2019-12-23 | 2022-07-22 | 马洪文 | Distributed multi-dimensional force measuring system and force measuring method |
| CN111964821A (en) * | 2020-08-05 | 2020-11-20 | 清华大学深圳国际研究生院 | Pressure touch prediction method and pressure touch prediction model for electronic skin |
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| CN106092390A (en) * | 2016-06-06 | 2016-11-09 | 中国科学院深圳先进技术研究院 | Piezoresistive pressure sensor and preparation method thereof |
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| HUP0600892A2 (en) * | 2006-11-30 | 2008-06-30 | Pazmany Peter Katolikus Egyete | Elastic cover for tactile sensors and tactile sensing arrangement with elastic cover |
| KR102081892B1 (en) * | 2013-09-05 | 2020-02-26 | 삼성전자주식회사 | Resistive pressure sensor including piezo-resistive electrode |
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| CN202305068U (en) * | 2011-10-11 | 2012-07-04 | 香港理工大学 | Tactile sensor and corresponding tactile sensing array |
| CN102435376A (en) * | 2011-10-24 | 2012-05-02 | 中北大学 | Flexible three-dimensional force sensor and decoupling method and manufacturing method thereof |
| CN103575432A (en) * | 2013-11-22 | 2014-02-12 | 沈阳工业大学 | Flexible three-dimensional contact force matrix sensing device |
| CN103743503A (en) * | 2013-12-31 | 2014-04-23 | 浙江大学 | Flexible three-dimensional force touch sensor based on piezoresistive and capacitive combination |
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