CN103780130A - Cantilever type impulse generator - Google Patents

Cantilever type impulse generator Download PDF

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Publication number
CN103780130A
CN103780130A CN201310222360.1A CN201310222360A CN103780130A CN 103780130 A CN103780130 A CN 103780130A CN 201310222360 A CN201310222360 A CN 201310222360A CN 103780130 A CN103780130 A CN 103780130A
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cantilever
frictional layer
layer
film
type impulse
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CN103780130B (en
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杨维清
陈俊
王中林
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Beijing Institute of Nanoenergy and Nanosystems
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National Center for Nanosccience and Technology China
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Abstract

The invention provides a cantilever type impulse generator, which comprises a first cantilever, a second cantilever and a third cantilever, wherein one ends of the first cantilever, the second cantilever and the third cantilever are fixed, the lower surface of the first cantilever is provided with a first electrode layer and a first friction layer; the upper surface of the elastic second cantilever is provided with a second electrode layer and a second friction layer, and the lower surface is provided with a third electrode layer and a third friction layer; the upper surface of the third cantilever is provided with a fourth electrode layer and a fourth friction layer; when external forces such as vibration and the like act on the cantilever, the second cantilever vibrates between the first cantilever and the third cantilever, at least one part of the upper surface of the second friction layer is enabled to be contacted with or separate from the lower surface of the first friction layer, at least one part of the lower surface of the third friction layer is enabled to be contacted with or separate from the upper surface of the fourth friction layer, and impulse electric signals are outputted between the first electrode layer and the second electrode layer and/or between the third electrode layer and the fourth electrode layer. The generator provided by the invention can convert vibration mechanical energy formed by sea waves, highways, bridges and the like into electric energy.

Description

A kind of cantilever type impulse generator
Technical field
The present invention relates to a kind of generator, particularly relate to the cantilever type impulse generator that the mechanical energy of generation of vibration is converted into electric energy.
Background technology
Vibration mechanical energy is the form of energy extensively existing, the vibration, automobile that comprises wave, engine is through forms such as the vibrations in out-of-date highway, bridge and tunnel, and human motion as walking, run, the form such as twisting, capital produces vibration mechanical energy, although these vibration mechanical energies extensively exist, but usually out in the cold, do not have effective collect means to be used, be conventionally wasted.
At present, mechanical energy is converted into the principle that the generator of electric energy utilizes and mainly contains electrostatic induction, piezoelectric property, the electrostatic pulse generator etc. of electromagnetic induction and special material.But the electrostatic induction electricity generator of having invented, exists the shortcomings such as volume is large, applicability is narrow, ubiquity complex structure of induction generator and piezoelectric generator, has specific (special) requirements and the more high defect of cost to material.Electrostatic pulse generator is not enough to some extent aspect miniaturization and lightweight, and output power density is less, can not meet the needs that various vibration mechanical energies are collected.
Summary of the invention
The present invention relates to a kind of cantilever type impulse generator simple in structure that the vibration mechanical energy of wave, highway, bridge etc. form can be converted into electric energy, can provide the power supply of coupling as navigation mark, road sign, warning sign etc. for microelectronic device.
For achieving the above object, the invention provides a kind of cantilever type impulse generator, comprising: the first cantilever, the second cantilever and the 3rd cantilever that have respectively one end to be fixed, wherein,
The lower surface of described the first cantilever is provided with the first electrode layer, and the lower surface contact of described the first electrode layer is provided with the first frictional layer;
The upper surface of described the second cantilever is provided with the second electrode lay, and the upper surface contact of described the second electrode lay is provided with the second frictional layer, and the lower surface of the upper surface of described the second frictional layer and described the first frictional layer is oppositely arranged; The lower surface of described the second cantilever arranges third electrode layer, and the lower surface contact of described third electrode layer is provided with the 3rd frictional layer; Described the second cantilever is elastic cantilever;
The upper surface of described the 3rd cantilever is provided with the 4th electrode layer, and the upper surface contact of described the 4th electrode layer is provided with the 4th frictional layer; The lower surface of the upper surface of described the 4th frictional layer and described the 3rd frictional layer is oppositely arranged;
When described generator is subject to External Force Acting, described the second cantilever vibrates between described the first cantilever and the 3rd cantilever, make at least partly described the second frictional layer upper surface and described the first frictional layer lower surface contact and separate, described the 3rd frictional layer lower surface with described the 4th frictional layer upper surface contact with separate, has pulse electrical signal to export between described the first electrode layer and the second electrode lay and/or between described third electrode layer and the 4th electrode layer at least partly.
Preferably, the free end of described the first cantilever, the second cantilever and the 3rd cantilever is all in the same side of stiff end.
Preferably, described the first cantilever, the second cantilever and the 3rd cantilever are fixed in same fixture.
Preferably, described the second cantilever also comprises weight, and described weight is arranged on the free end of described the second cantilever.
Preferably, described the first cantilever and/or the 3rd cantilever are elastic cantilever.
Preferably, described the second cantilever is electric conducting material, and described the second cantilever substitutes described the second electrode lay and third electrode layer.
Preferably, described the first cantilever and/or the 3rd cantilever adopt electric conducting material; Described the first cantilever substitutes described the first electrode layer, and/or described the 3rd cantilever substitutes described the 4th electrode layer.
Preferably, described the second frictional layer and described the 3rd frictional layer adopt electric conducting material, and described the second cantilever replaces described the second frictional layer and described the 3rd frictional layer.
Preferably, the upper surface of described the second cantilever and/or lower surface are provided with micro structure array decorative layer.
Preferably, described the first frictional layer adopts electric conducting material, and described the first cantilever replaces described the first frictional layer;
And/or,
Described the 4th frictional layer adopts electric conducting material, and described the 3rd cantilever replaces described the 4th frictional layer.
Preferably, the upper surface of the lower surface of described the first cantilever and/or the 3rd cantilever is provided with micro structure array decorative layer.
Preferably, described micro structure array decorative layer comprises:
Be arranged on the micro structure array of described cantilever upper surface and/or lower surface;
Be deposited on the conductive membrane layer on the cantilever surface that is prepared with described micro structure array.
Preferably, described micro structure array is selected from nano wire, nanocone, the nanometer stick array of oxide semiconductor.
Preferably, the height of described micro structure array is 200 nanometers to 2 micron.
Preferably, described conductive membrane layer is selected from metal film layer, and the thickness of described thin layer is 50 nanometer to 400 nanometers.
Preferably, described electric conducting material is selected from gold, silver, platinum, aluminium, nickel, copper, titanium, chromium or selenium, and the alloy being formed by above-mentioned metal, or stainless steel and beallon.
Preferably, described the first cantilever, the second cantilever and/or the 3rd cantilever are laminated structure.
Preferably, between described the first frictional layer material and the second frictional layer material, there is electrode order difference; Between described the 3rd frictional layer material and the 4th frictional layer material, there is electrode order difference.
Preferably, the thickness of described the first frictional layer, the second frictional layer, the 3rd frictional layer and/or the 4th frictional layer is 0.1-0.8 millimeter.
Preferably, described the first frictional layer, the second frictional layer, the 3rd frictional layer and/or the 4th frictional layer are selected from insulator or semi-conducting material.
Preferably, described insulating material is selected from macromolecule polymer material: polytetrafluoroethylene, dimethyl silicone polymer, polyimide film, aniline-formaldehyde resin film, polyformaldehyde film, ethyl cellulose film, polyamide film, melamino-formaldehyde film, polyethylene glycol succinate film, cellophane, cellulose acetate film, polyethylene glycol adipate film, polydiallyl phthalate film, regenerated fiber sponge film, elastic polyurethane body thin film, styrene-acrylonitrile copolymer copolymer film, styrene-butadiene-copolymer film, staple fibre film, poly-methyl film, methacrylic acid ester film, polyvinyl alcohol film, polyester film, polyisobutene film, polyurethane flexible sponge film, pet film, polyvinyl butyral film, phenolic resins film, neoprene film, butadiene-propylene copolymer film, natural rubber film, polyacrylonitrile film, poly-(vinylidene chloride-co-acrylonitrile) film or polyethylene the third diphenol carbonate thin film, polystyrene, polymethyl methacrylate, Merlon or polymeric liquid crystal copolymer, polychlorobutadiene, polyacrylonitrile, poly-biphenol carbonic ester, CPPG, polyvinylidene chloride, polyethylene, polypropylene, polyvinyl chloride,
The solid solution that described semi-conducting material is selected from silicon, germanium, III and V compounds of group, II and VI compounds of group and is made up of III-V compounds of group and II-VI compounds of group.
Preferably, described the first frictional layer or the second frictional layer are selected from electric conducting material; And/or described the 3rd frictional layer or the 4th frictional layer are selected from electric conducting material.
Preferably, described electric conducting material is selected from metal, alloy or conductive oxide, and wherein, described metal is selected from gold, silver, platinum, aluminium, nickel, copper, titanium, chromium or selenium; Described alloy is selected from alloy, stainless steel, the beallon that gold, silver, platinum, aluminium, nickel, copper, titanium, chromium or selenium form.
Preferably, the lower surface of the upper surface of the lower surface of described the first frictional layer, the second frictional layer, the 3rd frictional layer and/or the upper surface of the 4th frictional layer have micron or the micro-structural of inferior micron dimension or interspersing or coating of nano material; Described micro-structural is selected from nano wire, nanotube, nano particle, nanometer channel, micron groove, nanocone, micron cone, nanosphere and micron chondritic.
Preferably, described the first frictional layer and the 4th frictional layer are selected from dimethyl silicone polymer, and described the second frictional layer and the 3rd frictional layer are selected from beallon.
Preferably, described external force is external periodic force, and the frequency of described external periodic force approaches the resonance frequency of described generator.
Preferably, the resistance value that described generator connects load is in megaohm magnitude.
Compared with prior art, the present invention has following beneficial effect:
1, cantilever type impulse generator provided by the invention has three cantilevers that are arranged above and below, therefore, within a vibration period, the vibration of flexible the second cantilever between the first cantilever and the second cantilever makes generator produce four electrostatic pulse, can effectively change vibration mechanical energy into electric energy.
2, adopt conduction cantilever to replace and be arranged on its surperficial electrode layer, can simplify the structure of generator.Further, the first frictional layer or the second frictional layer adopt electric conducting material, and the 3rd frictional layer or the 4th frictional layer adopt electric conducting material, can directly replace with the cantilever of conduction the frictional layer material of conduction, and the structure of generator is further simplified.
3, for adopting the cantilever of conduction to replace the generator of frictional layer, can carry out micro-structural modification on the surface of conduction cantilever, can improve the power output of generator.In addition, be combined with full-bridge rectifier and can change the ac signal of output into direct current signal, not only can be used as the pulse power and directly apply to the fields such as electrochemistry, can also be capacitor or lithium ion cell charging, also can provide required power supply for various small portable electronic devices.
4, electric generator structure of the present invention is simple, and preparation method is easy, and to material, without specific (special) requirements, the vibration mechanical energy that can collect the generations such as wave, highway, bridge, plant equipment and human motion changes electric energy into, has practical use widely.
Accompanying drawing explanation
Shown in accompanying drawing, above-mentioned and other object of the present invention, Characteristics and advantages will be more clear.In whole accompanying drawings, identical Reference numeral is indicated identical part.Deliberately do not draw accompanying drawing by actual size equal proportion convergent-divergent, focus on illustrating purport of the present invention.
Fig. 1 and Fig. 3 are the structural representation of generator embodiment mono-of the present invention;
Fig. 2 is the electricity generating principle schematic diagram of generator of the present invention;
Fig. 4 and Fig. 5 are the structural representation of generator embodiment bis-of the present invention;
Fig. 6 and Fig. 7 are the structural representation of generator embodiment tri-of the present invention;
Fig. 8 and Fig. 9 are the structural representation that micro structure array decorative layer is set on conduction cantilever surface in embodiment tetra-;
Figure 10 is the structural representation of generator embodiment tetra-of the present invention;
The zinc oxide nano array that Figure 11 prepares on the surface of beallon shell fragment, and the electromicroscopic photograph of deposited copper nano thin-film thereon;
Figure 12 is that generator is the open circuit voltage measurement result under 3.7Hz External Force Acting in frequency;
Figure 13 is that generator is the rectification short circuit current measurement result under 3.7Hz External Force Acting in frequency;
Figure 14 is that generator is the open circuit voltage measurement result under 2.0Hz~5.0Hz External Force Acting in frequency;
Figure 15 is that many cantilevers electrostatic pulse vibrating electricity generator is the rectification short circuit current measurement result under 2.0Hz~5.0Hz External Force Acting in frequency.
Embodiment
In today of the microelectronic component fast development of Highgrade integration, the research of corresponding energy supply system but relatively lags behind.In order to adapt to miniaturization, portability, the demand such as multi-functional, the energy of these microelectronic components is all directly or indirectly from this traditional energy supply device of battery.And the limitation that battery is difficult to overcome due to self comprises larger volume and weight, limited useful life, the potential hazard to environment and human body etc., are difficult to the requirements such as adaptation is sustainable, low cost, environmental protection.Therefore, developing the alternative energy-provision way satisfying the demands is significant.
The invention provides the cantilever type impulse generator simple in structure that a kind of vibration mechanical energy that wave, highway, bridge, tunnel and human motion etc. are existed is naturally converted into electric energy, the power supply of coupling can be provided for microelectronic device.The technical scheme of generator of the present invention is, adopt three elastic cantilever structures of upper, middle and lower, apparent surface at adjacent two cantilevers arranges frictional layer, in the time that generator is subject to external influence power, middle cantilever vibrates between upper lower cantalever, two frictional layers are contacted with each other, can shift by electronics or ion generation surface charge in the moment being in contact with one another, disconnected from each other after and frictional layer contact and between the electrode layer arranging, produces pulse electrical signal and export.
Introduce in detail the embodiment of cantilever type impulse generator of the present invention below in conjunction with accompanying drawing.
Embodiment mono-:
Referring to Fig. 1, cantilever type impulse generator comprises that in the first cantilever 100, the second cantilever 200 and 300, three cantilevers of the 3rd cantilever, at least the second cantilever 200 is elasticity, and the first cantilever 100, the second cantilever 200 and the 3rd cantilever 300 have respectively one end to be fixed; Wherein, the lower surface contact that the lower surface of the first cantilever 100 is provided with the first electrode layer 101, the first electrode layers 101 is provided with the first frictional layer 102; The upper surface of the second cantilever 200 is provided with the second electrode lay 201, and the upper surface contact of the second electrode lay 201 is provided with the second frictional layer 202, and the lower surface of the upper surface of the second frictional layer 202 and the first frictional layer 102 is oppositely arranged; The lower surface of the second cantilever 200 is provided with third electrode layer 203, and the lower surface contact of third electrode layer 203 is provided with the 3rd frictional layer 204; The upper surface contact that the upper surface of the 3rd cantilever 300 is provided with the 4th electrode layer 301, the four electrode layers 301 is provided with the 4th frictional layer 302, and the lower surface of the upper surface of the 4th frictional layer 302 and the 3rd frictional layer 204 is oppositely arranged.When generator is subject to External Force Acting (effect of vibration), the second cantilever 200 vibrates between the first cantilever 100 and the second cantilever 300, make at least part of the second frictional layer 202 upper surfaces and the first frictional layer 102 lower surface contacts and separate, at least part of the 3rd frictional layer 204 lower surfaces are with the second frictional layer 302 upper surfaces contacts and separate, and having pulse electrical signal to export between the first electrode layer 101 and the second electrode lay 201 and/or between third electrode layer 203 and the 4th electrode layer 301.
In cantilever type impulse generator of the present invention, the second frictional layer 202 upper surfaces separate after can contacting completely with the first frictional layer 102 lower surfaces (or the 3rd frictional layer 204 lower surfaces and the second frictional layer 302 upper surfaces) completely, also after can partly contacting, separate, the namely vibration of the second cantilever between the first cantilever and the 3rd cantilever, makes the contact area of the second frictional layer 202 upper surfaces and the first frictional layer 102 lower surfaces (or the 3rd frictional layer 204 lower surfaces and second frictional layer 302 upper surfaces) occur constantly to change.
While having utilized the frictional layer material contact with differentiated friction electrode order, there is the principle that surface charge shifts in cantilever type impulse generator of the present invention." friction electrode order " described in the present invention, refer to the sequence of the attraction degree of electric charge being carried out according to material, bi-material is in the moment being in contact with one another, and the material surface that positive charge is born from friction electrode order Semi-polarity on contact-making surface is transferred to the material surface of friction electrode order Semi-polarity calibration.Up to now, the mechanism that does not also have explanation electric charge that a kind of unified theory can be complete to shift, it is generally acknowledged, this electric charge shifts relevant with the surface work function of material, and by electronics or ion, the transfer on contact-making surface realizes electric charge transfer.It should be noted that, friction electrode order is a kind of statistics based on experience, be that bi-material differs far away in this sequence, the probability that after contact, the positive negativity of the electric charge that produces and this sequence are consistent is just larger, and actual result is subject to the impact of many factors, such as material surface roughness, ambient humidity with whether have relative friction etc.If inventor's discovery bi-material is in more approaching position in friction electrode order, after contact, the positive negativity of CHARGE DISTRIBUTION may and not meet the prediction of this sequence.Need to further illustrate and be, the transfer of electric charge does not need the relative friction between bi-material, is in contact with one another as long as exist, and therefore, strictly speaking, the statement of the electrode order that rubs is inaccurate, but uses till today due to historical reasons always.
" contact electric charge " described in the present invention, refer to the material that there are differences two kinds of friction electrode order polarity contact and is separating afterwards its surperficial with electric charge, it is generally acknowledged, this electric charge is only distributed in the surface of material, and distribution depth capacity is only about 10 nanometers.Research is found, this electric charge can keep the time of growing, according to factors such as humidity in environment, its retention time even reaches a couple of days in a few hours, and the quantity of electric charge of its disappearance can be by contacting and supplemented again, therefore, the inventor thinks, the electric weight that contacts in the present invention electric charge can be similar to be thought and keep constant.It should be noted that, the symbol of contact electric charge is the symbol of net charge, and at the aggregation zone that may have negative electrical charge with the some areas of material surface that just contact electric charge, but the symbol of whole surperficial net charge is for just.
In generator of the present invention, the material of the first frictional layer, the second frictional layer, the 3rd frictional layer and the 4th frictional layer is selected, as long as meet: the first frictional layer material and the second frictional layer material exist friction electrode order difference, there is friction electrode order difference in the 3rd frictional layer material and the 4th frictional layer material.The first electrode layer 101, the first frictional layer 102, the second frictional layer 202 and the second electrode lay 201 that generator of the present invention is equivalent between the first cantilever and the second cantilever form the first friction nanometer generating unit, and third electrode layer 203, the 3rd frictional layer 204, the 4th frictional layer 302 and the 4th electrode layer 301 between the second cantilever and the 3rd cantilever form the second friction nanometer generating unit.Two friction nano generators that generator of the present invention comprises can carry out parallel connection or series connection by external circuit, can obtain higher power output.
In conjunction with Fig. 2, the first described friction nanometer generating cell operation principle is described.In Fig. 2, the first frictional layer 102 and the second frictional layer 202 are 2 kinds of poor materials of existence friction electrode order, under the initial condition that there is no External Force Acting, due to the first cantilever 100 that has respectively one end to be fixed and the existence of the second cantilever 200, between the first frictional layer 102 and the second frictional layer 202, there is certain interval (referring to A step in Fig. 2).Do the used time when there being external force (vibration), because at least the second cantilever 200 is elastic cantilever, the second cantilever 200 towards first cantilevers 100 move, the first frictional layer 102 and the second frictional layer 202 are in contact with one another, shift so there is surface charge in the moment of contact, form layer of surface contact electric charge (referring to B step in Fig. 2).Because the material of the first frictional layer 102 and the second frictional layer 202 is different in the position rubbing in electrode order, the second frictional layer 202 surfaces produce negative electrical charge, and the first frictional layer 102 surfaces produce positive charge, the electric weight size of two kinds of electric charges is identical, therefore between the first electrode layer 101 and the second electrode lay 201, there is no electrical potential difference, just there is no flow of charge yet.Due to the inhibition of the first cantilever 100 to the second cantilever 200, make the second cantilever 200 towards the direction motion away from the first cantilever 100, the first frictional layer 102 starts to separate with the second frictional layer 202, the entirety being now made up of the first electrode layer 101 and the first frictional layer 102 has clean surplus positive charge, and the entirety that the second electrode lay 104 and the second frictional layer 103 form has clean surplus negative electrical charge, therefore between the first electrode layer 101 and the second electrode lay 201, produce electrical potential difference.For this electrical potential difference of balance, electronics flows into the first electrode layer 101 by external wire by the second electrode lay 201, thereby produce by the first electrode layer the transient current (C step in referring to Fig. 2) to the second electrode lay at external circuit, in the time that the first frictional layer 102 is got back to initial position, it is maximum that spacing between it and the second frictional layer 202 reaches, the electric charge of the two all reaches balance, between the first electrode layer 101 and the second electrode lay 201, there is no electrical potential difference, just do not have electric current to produce (D step in referring to Fig. 2) at external circuit yet.In the time that the second cantilever 200 moves towards the first cantilever 100 again, due to the pitch smaller of the first electrode layer 101 and the second frictional layer 202, the negative electrical charge on the second frictional layer 202 surfaces strengthens the repulsive interaction of negative electrical charge in the first electrode layer 101, the positive charge on the first frictional layer 102 surfaces also strengthens the sucking action of negative electrical charge in the second electrode lay 201 simultaneously, causes thus the electrical potential difference between the first electrode layer 101 and the second electrode lay 201 to reduce.For further this electrical potential difference of balance, electronics flows into the second electrode lay 201 by external circuit by the first electrode layer 101, thereby produces and the transient current of opposite direction (step e in referring to Fig. 2) for the first time at external circuit.The second cantilever 200 repeats the situation of B-E step above after continuing near the first cantilever 100, the first frictional layer 102 and the second frictional layer 202 to be come in contact.As can be seen here, in the time that external force (effect of vibration) acts on cantilever type impulse generator, can impel flexible the second cantilever 200 to drive the second frictional layer 202 that reciprocal mechanical oscillation occur, and continuous contact by the first frictional layer 102 and the second frictional layer 103 with separate two processes, produce respectively the pulse current of opposite direction, realize the pulse generating between the first electrode layer 101 and the second electrode lay 201.
The electricity generating principle of the second friction nanometer generating unit is identical with the electricity generating principle of the first friction nano generator, flexible the second cantilever 200 drives the 3rd frictional layer 204 that reciprocal mechanical oscillation occur, and continuous contact by the 3rd frictional layer 204 and the 4th frictional layer 302 with separate two processes, produce respectively the pulse current of opposite direction, realize the pulse generating between third electrode layer 203 and the 4th electrode layer 301.Therefore, cantilever type impulse generator of the present invention, in the vibration period of the second cantilever 200, can produce 4 pulse electrical signals.
In order to strengthen the vibrating effect of the second cantilever 200 between the first cantilever 100 and the 3rd cantilever 300, can on the second cantilever, fix a weight M, the fixed position of weight M is preferably the free end corresponding with stiff end that is fixed on the second cantilever 200.
Three cantilevers of cantilever type impulse generator can be separately fixed on different fixtures, and referring to Fig. 1, it is upper that one end of the first cantilever 100 is fixed on the first fixture G1, and the other end is free end; It is upper that one end of the second cantilever 200 is fixed on the second fixture G2, and the other end is free end; It is upper that one end of the 3rd cantilever 300 is fixed on the 3rd fixture G3, and the other end is free end.Preferably, the free end of three cantilevers, in the same side of stiff end separately, as shown in Figure 1, can guarantee the second frictional layer 202(or the 3rd frictional layer 204 that the second cantilever 200 drives) area maximum while contacting with the first frictional layer 102, the 4th frictional layer 302.
Preferably, three cantilevers can be fixed on same fixture G above, and the free end of three cantilevers is in the same side of fixture G, referring to Fig. 3.
Fixture described in the present invention can be definitely fixing object as building, bridge etc., can be also that relatively-stationary object is as machinery, vehicle etc.
Insulating material, for example conventional high molecular polymer all has friction electrical characteristics, all can be used as preparation the present invention the first frictional layer 102, the second frictional layer 202, the material of the 3rd frictional layer 204 and the 4th frictional layer 302, enumerates some conventional macromolecule polymer materials herein: polytetrafluoroethylene, dimethyl silicone polymer, polyimide film, aniline-formaldehyde resin film, polyformaldehyde film, ethyl cellulose film, polyamide film, melamino-formaldehyde film, polyethylene glycol succinate film, cellophane, cellulose acetate film, polyethylene glycol adipate film, polydiallyl phthalate film, regenerated fiber sponge film, elastic polyurethane body thin film, styrene-acrylonitrile copolymer copolymer film, styrene-butadiene-copolymer film, staple fibre film, poly-methyl film, methacrylic acid ester film, polyvinyl alcohol film, polyester film, polyisobutene film, polyurethane flexible sponge film, pet film, polyvinyl butyral film, phenolic resins film, neoprene film, butadiene-propylene copolymer film, natural rubber film, polyacrylonitrile film, poly-(vinylidene chloride-co-acrylonitrile) film or polyethylene the third diphenol carbonate thin film, polystyrene, polymethyl methacrylate, Merlon or polymeric liquid crystal copolymer, polychlorobutadiene, polyacrylonitrile, poly-biphenol carbonic ester, CPPG, polyvinylidene chloride, polyethylene, polypropylene, polyvinyl chloride.Reason as space is limited; can not carry out exhaustive to all possible material; only list several concrete polymeric materials herein from people's reference; but obviously these concrete materials can not become the restrictive factor of protection range of the present invention; because under the enlightenment of invention, the friction electrical characteristics that those skilled in the art has according to these materials are easy to select other similar materials.
With respect to insulator, semiconductor and metal all have the friction electrical characteristics that easily lose electronics, in the list of friction electrode order, are often positioned at end place.Therefore, semiconductor and metal also can be used as the raw material of preparation the first frictional layer 102 or the second frictional layer 202, and the raw material of the 3rd frictional layer 204 or the 4th frictional layer 302.Conventional semiconductor comprises: silicon, germanium; III and V compounds of group, such as GaAs, gallium phosphide etc.; II and VI compounds of group, such as cadmium sulfide, zinc sulphide etc.; And the solid solution being formed by III-V compounds of group and II-VI compounds of group, such as gallium aluminum arsenide, gallium arsenic phosphide etc.Except above-mentioned Crystalline Semiconductors, also have amorphous glass semiconductor, organic semiconductor etc.Non-conductive oxide, conductor oxidate and complex oxide also have friction electrical characteristics, can form surface charge at friction process, therefore also can be used as frictional layer of the present invention, the for example oxide of manganese, chromium, iron, copper, also comprises silica, manganese oxide, chromium oxide, iron oxide, cupric oxide, zinc oxide, BiO 2and Y 2o 3; Conventional metal comprises gold, silver, platinum, aluminium, nickel, copper, titanium, chromium or selenium, and alloy is selected from alloy, stainless steel, the beallon that gold, silver, platinum, aluminium, nickel, copper, titanium, chromium or selenium form.Certainly, can also use other materials with conductive characteristic to serve as the frictional layer material that easily loses electronics, for example indium tin oxide ITO.
Found through experiments, when the first frictional layer 102 and the second frictional layer 202 materials (or the 3rd frictional layer 204 and the 4th frictional layer 302 materials) electronic capability while differing larger (the position in friction electrode order differs far away), the signal of telecommunication that generator is exported is stronger.So, can be according to actual needs, select suitable material to prepare the first frictional layer 102, the second frictional layer 202, the 3rd frictional layer 204 and the 4th frictional layer 302 to obtain better output effect.
In cantilever type impulse generator, the thickness of the first frictional layer 102, the second frictional layer 202, the 3rd frictional layer 204 or the 4th frictional layer 302 has no special requirements, and is preferably 0.1-0.8 millimeter in the present invention.
In generator of the present invention, can also carry out physical modification to the upper surface of the lower surface of the upper surface of the lower surface of the first frictional layer 102, the second frictional layer 202, the 3rd frictional layer 204 and/or the 4th frictional layer 302, make its surface there is micron or the micro-structural of inferior micron dimension or interspersing or coating of nano material, to strengthen the contact area of (or between the 3rd frictional layer and the 4th frictional layer) between the first frictional layer and the second frictional layer.Described micro-structural can be selected from nano wire, nanotube, nano particle, nanometer channel, micron groove, nanocone, micron cone, nanosphere and micron chondritic.Be preferably at the lower surface of the first frictional layer 102, upper surface, the lower surface of the 3rd frictional layer 204 and/or the upper surface of the 4th frictional layer 302 of the second frictional layer 202 and comprise the array that above-mentioned micro-structural forms.
Preferably, the first frictional layer 102, the second frictional layer 202, the 3rd frictional layer 204 or the 4th frictional layer 302 materials are selected elastomeric material, can increase the contact area while being subject to External Force Acting.
The material of the first electrode layer 101, the second electrode lay 201, third electrode layer 204 or the 4th electrode layer 302 can be selected conventional electrode material; such as metal, alloy, conductive oxide or organic substance conductor etc., the selection of concrete electrode material is not as the factor that limits protection range of the present invention.In reality, those skilled in the art can be according to the selection of each frictional layer material, determine respective electrode layer material and preparation method's selection, for example, to guarantee the excellent electric contact of electrode layer and corresponding frictional layer (the first electrode layer 101 and the first frictional layer 102).The selection of concrete electrode layer material is not as the condition that limits protection range of the present invention.Fixing between each electrode layer and cantilever, can paste fixing mode by material, also can adopt the mode of preparing electrode layer on cantilever surface to arrange.
In cantilever type impulse generator of the present invention, at least the second cantilever 200 is elastic cantilever, and the first cantilever 100 and/or the 3rd cantilever 300 can be also elastic cantilever.The material of elastic cantilever can select to have the materials such as flexible insulating material, such as electro-insulating rubber, also can select to have flexible conductor material, such as sheet metal, elastomeric alloy sheet etc.
In the present invention, the cantilever of generator can adopt conduction or non-conducting material preparation, conducts electricity if cantilever, can substitute and be arranged on its surperficial electrode layer material.This structure is saved the step that electrode layer is set on cantilever surface, can simplify the structure of generator.
Electric generator structure of the present invention is simple, and preparation method is simple, to material without specific (special) requirements, in actual use, only need simply fix and encapsulate, can be applicable to and collect the vibration mechanical energy that wave, highway, bridge, plant equipment etc. produce, there is practical use widely.
In cantilever type impulse generator of the present invention, the major parameter that affects single generator unit power output is the size of the interaction force while contacting between frictional layer, its interaction force of resonance frequency that more approaches generator is larger, and the power output of generator is also just larger.Therefore, the in the situation that of the conditions permits such as mechanical oscillation intensity, in order to obtain larger power output, the first cantilever, the second cantilever and the 3rd cantilever and the first frictional layer, the second frictional layer, the 3rd frictional layer and the 4th frictional layer need to be chosen the good material of elasticity.
Embodiment bis-:
The cantilever that the first spiral arm and/or the 3rd cantilever can adopt electric conducting material to prepare, the cantilever of all preparing as electric conducting material take the first cantilever and the 3rd cantilever here, as example, is specifically introduced the structure of generator in the present embodiment.Referring to Fig. 4, the cantilever that the first cantilever 111 is prepared for electric conducting material, the lower surface contact of the first cantilever is provided with the first frictional layer 112; The upper surface of the second cantilever 200 is provided with the second electrode lay 201, and the upper surface contact of the second electrode lay 201 is provided with the second frictional layer 202, and the lower surface of the upper surface of the second frictional layer 202 and the first frictional layer 112 is oppositely arranged; The lower surface of the second cantilever 200 is provided with third electrode layer 203, and the lower surface contact of third electrode layer 203 is provided with the 3rd frictional layer 204; The cantilever that the 3rd cantilever 311 is prepared for electric conducting material, the upper surface contact of the 3rd cantilever is provided with the 4th frictional layer 312, and the lower surface of the upper surface of the 4th frictional layer 312 and the 3rd frictional layer 204 is oppositely arranged.
In the present embodiment, the second cantilever also can adopt the preparation of flexible electric conducting material, all adopts cantilever prepared by electric conducting material as example here take three cantilevers, specifically introduces the structure of generator in the present embodiment.Referring to Fig. 5, be with the difference of the generator shown in Fig. 4, the second cantilever 211 adopts flexible electric conducting material preparation, has substituted the second electrode lay and the third electrode layer in Fig. 4.In the present embodiment, directly contact respectively the second frictional layer 212 and the 3rd frictional layer 214 are set in the upper and lower surface of the second cantilever 211, the upper surface of the second frictional layer 212 and the lower surface of the first frictional layer 112 are oppositely arranged, and the lower surface of the upper surface of the 4th frictional layer 312 and the 3rd frictional layer 214 is oppositely arranged.
In the present embodiment, the material of generator each several part is selected identical with embodiment mono-, no longer repetition here, also identical with embodiment mono-of the operation principle of generator in the time being subject to extraneous vibration.
In the present embodiment, be the situation (shown in figure 3) being fixed on same fixture if adopt three cantilevers, can be according to the selection of the first cantilever, the second cantilever and/or the 3rd cantilever material, determine that described fixture is insulator or conductor.The material of described fixture is chosen in here and is not specifically limited.
Embodiment tri-:
Electric conducting material separates with after insulator or semi-conducting material contact or friction, can electric charge occur on the surface of the two shifts, in embodiment mono-or embodiment bis-, the first frictional layer or the second frictional layer can adopt electric conducting material, and same the 3rd frictional layer or the 4th frictional layer also can adopt electric conducting material.In the present embodiment, with the frictional layer in the cantilever alternate embodiment two of conduction, further simplify the structure of cantilever type impulse generator.
Below in conjunction with Fig. 6 and Fig. 7, specifically introduce the structure of generator in the present embodiment.
Referring to Fig. 6, the first frictional layer is selected conductor material, and first cantilever 111 that can be conducted electricity substitutes, and the second frictional layer 212 adopts insulator or semiconductor, and the lower surface of the upper surface of the second frictional layer 212 and the first cantilever 111 is oppositely arranged.Equally, the 4th frictional layer is selected conductor material, and the 3rd cantilever 311 that can be conducted electricity substitutes, and the 3rd frictional layer 214 adopts insulator or semiconductor, and the lower surface of the upper surface of the 3rd cantilever 311 and the 3rd frictional layer 214 is oppositely arranged.Fixture G can select insulating material, to guarantee the insulation of the first cantilever, the second cantilever and the 3rd cantilever.In other embodiments, also can only have the first frictional layer or the 4th frictional layer to adopt conductor material.
Referring to Fig. 7, different from the generator in Fig. 6, here the second frictional layer and the 3rd frictional layer are selected from conductor material, second cantilever 211 that can be conducted electricity substitutes, the first cantilever 111(that the first frictional layer 112 contact is arranged on conduction substitutes the first electrode layer) lower surface, the 4th frictional layer 312 contacts are arranged on the upper surface of the 3rd cantilever of conduction, and the lower surface of the upper surface of the second cantilever 211 and the first frictional layer 112 is oppositely arranged; The lower surface of the lower surface of the second cantilever 211 and the 4th frictional layer 312 is oppositely arranged.
The material of cantilever of conducting electricity in the present embodiment can be selected from gold, silver, platinum, aluminium, nickel, copper, titanium, chromium or selenium, and the alloy being formed by above-mentioned metal, or stainless steel and beallon.Be preferably, the first cantilever, the second cantilever and/or the 3rd cantilever are laminated structure, for example beallon sheet or stainless steel substrates.
In the present embodiment, be preferably the first cantilever 111, the second cantilever 211 and the 3rd cantilever 311 and be elastic cantilever.
In the present embodiment, the material of generator each several part is selected identical with embodiment mono-or embodiment bis-, no longer repetition here.Preferably, in the present embodiment, the first frictional layer 112 and/or the 4th frictional layer 312 are selected insulating material, preferred, and the first frictional layer 112 and/or the 4th frictional layer 312 are selected insulating polymeric material.
The power generation process of the generator of the present embodiment is: under the effect of cycle external force, the second cantilever 211 is done forced vibration, periodically contacts and separates with the 4th frictional layer 312 bi-materials with the first frictional layer 112.In the time of contact, there is electric charge and shift, in the time separating, on surface, forming opposite polarity contact electric charge separately.The increase of bi-material distance when separating, the contact electric charge of positively charged contacts the electromotive force that electric charge produces on the first cantilever 111 and the second cantilever 211 and there are differences with electronegative.In the situation that having applied load, this electrical potential difference causes free electron to redistribute between two cantilevers (electrode layer), with this electrical potential difference of balance, thereby forms by the pulse current of load.When the second cantilever 211 and the first frictional layer 112(or the 4th frictional layer 312) near time, because the distance between the first frictional layer 112 and the second cantilever 211 is changed, electrical potential difference between the first cantilever 111 and the second cantilever 211 occurs again, the CHARGE DISTRIBUTION that reaches balance is changed, and the electric charge of redistribution causes the pulse current by applied load again.It should be noted that, in the situation that load accesses, the second cantilever 211 and the first frictional layer 112(or the 4th frictional layer 312) in separation and approach process, produce contrary electrical potential difference, therefore, the flow direction of the pulse current in two processes is contrary, and within a vibration period, produce two contacts and separating cycle, thereby produce four primary current pulses.Three cantilevers are passed through to outside lead parallel connection, as final output.In sum, the generating function of the present embodiment is exported the pulse ac electricity with corresponding frequencies under periodic vibration External Force Acting.
Embodiment tetra-:
The micro-structural that nanometer or micron dimension are set on the first frictional layer of cantilever type impulse generator of the present invention and/or the contact surface of the second frictional layer (or the 3rd frictional layer and/or the 4th frictional layer) can effectively increase contact area, improves the power output of generator.
In the present embodiment, can be further on the basis of the 3rd embodiment prepare micro structure array decorative layer at conduction cantilever-face on to the surface of frictional layer, increase generator and in the time being subject to External Force Acting, conduct electricity the contact area of cantilever and frictional layer.
That is to say, replace the generator of the first frictional layer for the first cantilever of conduction, be provided with micro structure array decorative layer at the lower surface of the first cantilever; Or, for the generator of the 3rd cantilever replacement the 4th frictional layer conducting electricity, be provided with micro structure array decorative layer at the upper surface of the 3rd cantilever; Or, replace the generator of the second frictional layer and the 3rd frictional layer for the second cantilever of conduction, be provided with micro structure array decorative layer in the upper and lower surface of the second cantilever.Described micro structure array is specially: the oxide micro structure array on cantilever surface is being conducted electricity in preparation, and is deposited on the conductive membrane layer on the cantilever surface that is prepared with described micro structure array.
On conduction cantilever, prepare micro structure array decorative layer process specifically referring to Fig. 8.
Referring to a step in Fig. 8, on the surface of conduction cantilever 10, (particularly face the surface of frictional layer) and prepare micro structure array 11.Micro structure array 11 can be for being prepared into arbitrarily the material of micron or nanosized microstructure, the array of the micro-structurals such as such as oxide semiconductor nano wire, nano-pillar, nanocone, or nano powder etc.The height of micro structure array is preferably between 200 nanometers to 2 micron.In the present embodiment, preferably micro structure array is conductor oxidate, can select ZnO, SnO 2deng semi-conducting material.Concrete preparation method can be the conventional preparation method of nano material such as hydro thermal method.
Referring to b step in Fig. 8, adopt the mode depositing electrically conductive thin layers 12 such as magnetron sputtering on cantilever 10 surfaces that are prepared with micro structure array 11.Conductive film material can be selected metallic film, conductive oxide film.The deposit thickness of film is preferably 50 nanometer to 400 nanometers.In the present embodiment, conductive film is preferably metallic film, the film of the materials such as such as Ag, Au, Cu, Al.
In the present embodiment, adopt chemical method growing nano array on conduction cantilever surface, then use physical method depositing electrically conductive membrane electrode layer, to reach the object that increases contact electrode material surface roughness.The inventor thinks, when the nano array structure that the chemistry of this material surface and physical synthesis method of modifying obtain and another kind of thin-film material are in contact with one another, these nano-arrays can insert another kind of material to increase friction and contact area, there are some researches show, extra friction can effectively increase and contact charge density with the contact area of increase, therefore, the existence of these nano-arrays can improve the power output of generator of the present invention.
Replace the generator of the second frictional layer and the 3rd frictional layer for the second cantilever of conduction, can all prepare micro structure array in the upper and lower surface of the second cantilever, referring to Fig. 9, at the equal deposition oxide micro structure array 11 of upper and lower surface of the second cantilever 10, then be prepared with the upper and lower surface depositing electrically conductive thin layer 12 of the second cantilever of oxide micro structure array 11, in the upper and lower surface of the second cantilever, obtaining the micro structure array of conduction.
Overarm arm with three conductions is selected beallon material, and the first frictional layer and the 4th frictional layer adopt dimethione material, specifically introduces the preparation process of the cantilever type impulse generator of the present embodiment.
Referring to Figure 10, using the beallon shell fragment that is of a size of 0.2 millimeter of 6.5 cm x 2.8 cm x as the second cantilever 211, the Hydrothermal Growth of lower surface employing thereon diameter is the nanometer zinc oxide array of 200 nanometers, then on zinc oxide array deposit thickness be 100 nanometers copper film layer as contact electrode form micro structure array 215, Figure 11 is the copper film layer surface topography having deposited; Using the beallon shell fragment of 0.2 millimeter of two chip size 4.5 cm x 2.8 cm x respectively as the first cantilever 111 and the 3rd cantilever 311, then the first cantilever 111 lower surfaces and the 3rd cantilever 311 upper surfaces respectively spin coating one deck be of a size of 0.6 millimeter of dimethyl silicone polymer insulating barrier of 3.2 cm x 2.8 cm x as the first frictional layer 112 and the second frictional layer 312; Finally with rectangle fixture G, three cantilevers are fixed up, make the first cantilever 111 and the 3rd cantilever 311 respectively directly over the second cantilever 211 and under, and the free end of three cantilevers is all in the same side of fixture G, and make the first cantilever 111 and the 3rd cantilever 311 and the second cantilever 211 have a fixed gap.Be the weight M of 12.59 grams at the free end fixed mass of the second cantilever 211, to strengthen the vibrating effect of the second cantilever between the first cantilever and the second cantilever.
In the present embodiment, the roughness on copper film contact electrode layer (the micro structure array decorative layers on the second cantilever 211 surfaces) surface has larger impact to power output, it is generally acknowledged, material surface is more coarse, the area that can effectively contact is just less, produce contact electric charge still less, thereby correspondingly obtain lower power output.But the inventor is surprised to find that, introduces the special appearance with certain surface roughness and can improve on the contrary power output.By by nanometer zinc oxide array and metallic film in conjunction with the nano-array conductive layer that forms the second cantilever surface, the Chemical Physics comprehensive modification method of this material surface can improve power output of the present invention widely.The inventor thinks, through metallic film material and the easy elastically-deformable dimethyl silicone polymer insulating barrier contact squeeze of this method modification, these nano-arrays can increase contact area and friction, there are some researches show, extra contact area can effectively increase and contact charge density with friction, therefore, the setting of these nano-arrays can improve the power output of generator.
The signal of telecommunication of the generator output of various embodiments of the present invention is the alternating-current pulse signal of telecommunication, can connect full-bridge rectifier at the output of generator, is the DC pulse signal of telecommunication by the output signal rectification of generator.The pulse electrical signal of generator output, not only can be used as the pulse power and directly apply to the fields such as electrochemistry, can also be used to charge to energy-storage travelling wave tube, such as capacitor or lithium ion battery etc., and the electric energy storing can be used for providing electric power for portable small-sized electronic equipment, be with a wide range of applications.
Under the effect of external periodic force, cantilever type impulse generator in the present embodiment is carried out to the measurement of open circuit voltage and rectification short circuit current, result respectively as shown in Figure 12 and Figure 13, Figure 12 is that cantilever type impulse generator is the open circuit voltage measurement result under the effect of 3.7Hz external periodic force in frequency, and Figure 13 is that cantilever type impulse generator is the rectification short circuit current measurement result under the effect of 3.7Hz external periodic force in frequency.Can see from experimental result, the open circuit voltage of cantilever type impulse generator and rectification short circuit current maximum have reached respectively 101 volts and 55.7 microamperes.
Under the effect of external periodic force, particularly under low-frequency mechanical vibrations external force, cantilever type impulse generator in the present embodiment is carried out to the measurement of open circuit voltage and the rectification short circuit current of different frequency, result respectively as shown in Figure 14 and Figure 15, Figure 14 is that cantilever type impulse generator is the open circuit voltage measurement result under the effect of 2.5-5.0Hz external periodic force in frequency, and Figure 15 is that cantilever type impulse generator is the rectification short circuit current measurement result under the effect of 2.5-5.0Hz external periodic force in frequency.Found that, the size of vibration frequency exerts an influence to the power output of cantilever type impulse generator of the present invention, approach resonance frequency and will produce larger contact area and more effective friction, because contact area reaches extreme value, contact charge density can further not increase, and the output of cantilever type impulse generator reaches extreme value.
In inventor's research process, find, at the cantilever type impulse generator of various embodiments of the present invention, in the middle of real work, the resistance value of applied load has a great impact real output.Along with the increase of load resistance value, the voltage at load two ends increases, reduce by the electric current of load, and real output first increases and then decreases, and there is maximum.The inventor is through many experiments discovery, and the corresponding resistance value of power output maximum is in megaohm magnitude, and therefore, the present invention is can at utmost bring into play its effect megaohm magnitude in the resistance value of load.It should be noted that, " power output " used herein, refers to the maximum of pulse current and the product of maximum of the pulse voltage that forms at load two ends, and instantaneous pole is high-power.
The power output of generator of the present invention is except being subject to external environment factor, the size of involving vibrations frequency, outside the impact such as the resistance value of applied load, also be subject to the Design and manufacture of cantilever type impulse generator itself, comprise the selection of frictional layer and electrode layer material, and the size of each several part, and the impact of the physics and chemistry character of frictional layer material surface etc.
The above, be only preferred embodiment of the present invention, not the present invention done to any pro forma restriction.Any those of ordinary skill in the art, do not departing from technical solution of the present invention scope situation, all can utilize method and the technology contents of above-mentioned announcement to make many possible variations and modification to technical solution of the present invention, or be revised as the equivalent embodiment of equivalent variations.Therefore, every content that does not depart from technical solution of the present invention,, all still belongs in the scope of technical solution of the present invention protection any simple modification made for any of the above embodiments, equivalent variations and modification according to technical spirit of the present invention.

Claims (27)

1. a cantilever type impulse generator, is characterized in that, comprising: the first cantilever, the second cantilever and the 3rd cantilever that have respectively one end to be fixed, wherein,
The lower surface of described the first cantilever is provided with the first electrode layer, and the lower surface contact of described the first electrode layer is provided with the first frictional layer;
The upper surface of described the second cantilever is provided with the second electrode lay, and the upper surface contact of described the second electrode lay is provided with the second frictional layer, and the lower surface of the upper surface of described the second frictional layer and described the first frictional layer is oppositely arranged; The lower surface of described the second cantilever arranges third electrode layer, and the lower surface contact of described third electrode layer is provided with the 3rd frictional layer; Described the second cantilever is elastic cantilever;
The upper surface of described the 3rd cantilever is provided with the 4th electrode layer, and the upper surface contact of described the 4th electrode layer is provided with the 4th frictional layer; The lower surface of the upper surface of described the 4th frictional layer and described the 3rd frictional layer is oppositely arranged;
When described generator is subject to External Force Acting, described the second cantilever vibrates between described the first cantilever and the 3rd cantilever, make at least partly described the second frictional layer upper surface and described the first frictional layer lower surface contact and separate, described the 3rd frictional layer lower surface with described the 4th frictional layer upper surface contact with separate, has pulse electrical signal to export between described the first electrode layer and the second electrode lay and/or between described third electrode layer and the 4th electrode layer at least partly.
2. cantilever type impulse generator according to claim 1, is characterized in that, the free end of described the first cantilever, the second cantilever and the 3rd cantilever is all in the same side of stiff end.
3. cantilever type impulse generator according to claim 1 and 2, is characterized in that, described the first cantilever, the second cantilever and the 3rd cantilever are fixed in same fixture.
4. according to the cantilever type impulse generator described in claim 1-3 any one, it is characterized in that, described the second cantilever also comprises weight, and described weight is arranged on the free end of described the second cantilever.
5. according to the cantilever type impulse generator described in claim 1-4 any one, it is characterized in that, described the first cantilever and/or the 3rd cantilever are elastic cantilever.
6. according to the cantilever type impulse generator described in claim 1-5 any one, it is characterized in that, described the second cantilever is electric conducting material, and described the second cantilever substitutes described the second electrode lay and third electrode layer.
7. according to the cantilever type impulse generator described in claim 1-6 any one, it is characterized in that, described the first cantilever and/or the 3rd cantilever adopt electric conducting material; Described the first cantilever substitutes described the first electrode layer, and/or described the 3rd cantilever substitutes described the 4th electrode layer.
8. cantilever type impulse generator according to claim 6, is characterized in that, described the second frictional layer and described the 3rd frictional layer adopt electric conducting material, and described the second cantilever replaces described the second frictional layer and described the 3rd frictional layer.
9. cantilever type impulse generator according to claim 8, is characterized in that, the upper surface of described the second cantilever and/or lower surface are provided with micro structure array decorative layer.
10. cantilever type impulse generator according to claim 7, is characterized in that, described the first frictional layer adopts electric conducting material, and described the first cantilever replaces described the first frictional layer;
And/or,
Described the 4th frictional layer adopts electric conducting material, and described the 3rd cantilever replaces described the 4th frictional layer.
11. cantilever type impulse generators according to claim 10, is characterized in that, the upper surface of the lower surface of described the first cantilever and/or the 3rd cantilever is provided with micro structure array decorative layer.
12. according to the cantilever type impulse generator described in claim 9 or 11, it is characterized in that, described micro structure array decorative layer comprises:
Be arranged on the micro structure array of described cantilever upper surface and/or lower surface;
Be deposited on the conductive membrane layer on the cantilever surface that is prepared with described micro structure array.
13. cantilever type impulse generators according to claim 12, is characterized in that, described micro structure array is selected from nano wire, nanocone, the nanometer stick array of oxide semiconductor.
14. according to the cantilever type impulse generator described in claim 13 or 14, it is characterized in that, the height of described micro structure array is 200 nanometers to 2 micron.
15. according to the cantilever type impulse generator described in claim 12-14 any one, it is characterized in that, described conductive membrane layer is selected from metal film layer, and the thickness of described thin layer is 50 nanometer to 400 nanometers.
16. according to the cantilever type impulse generator described in claim 6-15 any one, it is characterized in that, described electric conducting material is selected from gold, silver, platinum, aluminium, nickel, copper, titanium, chromium or selenium, and the alloy being formed by above-mentioned metal, or stainless steel and beallon.
17. according to the cantilever type impulse generator described in claim 1-16 any one, it is characterized in that, described the first cantilever, the second cantilever and/or the 3rd cantilever are laminated structure.
18. according to the cantilever type impulse generator described in claim 1-17 any one, it is characterized in that, between described the first frictional layer material and the second frictional layer material, has electrode order difference; Between described the 3rd frictional layer material and the 4th frictional layer material, there is electrode order difference.
19. cantilever type impulse generators according to claim 18, is characterized in that, the thickness of described the first frictional layer, the second frictional layer, the 3rd frictional layer and/or the 4th frictional layer is 0.1-0.8 millimeter.
20. according to the cantilever type impulse generator described in claim 16 or 18, it is characterized in that, described the first frictional layer, the second frictional layer, the 3rd frictional layer and/or the 4th frictional layer are selected from insulator or semi-conducting material.
21. cantilever type impulse generators according to claim 20, is characterized in that, described insulating material is selected from macromolecule polymer material: polytetrafluoroethylene, dimethyl silicone polymer, polyimide film, aniline-formaldehyde resin film, polyformaldehyde film, ethyl cellulose film, polyamide film, melamino-formaldehyde film, polyethylene glycol succinate film, cellophane, cellulose acetate film, polyethylene glycol adipate film, polydiallyl phthalate film, regenerated fiber sponge film, elastic polyurethane body thin film, styrene-acrylonitrile copolymer copolymer film, styrene-butadiene-copolymer film, staple fibre film, poly-methyl film, methacrylic acid ester film, polyvinyl alcohol film, polyester film, polyisobutene film, polyurethane flexible sponge film, pet film, polyvinyl butyral film, phenolic resins film, neoprene film, butadiene-propylene copolymer film, natural rubber film, polyacrylonitrile film, poly-(vinylidene chloride-co-acrylonitrile) film or polyethylene the third diphenol carbonate thin film, polystyrene, polymethyl methacrylate, Merlon or polymeric liquid crystal copolymer, polychlorobutadiene, polyacrylonitrile, poly-biphenol carbonic ester, CPPG, polyvinylidene chloride, polyethylene, polypropylene, polyvinyl chloride,
The solid solution that described semi-conducting material is selected from silicon, germanium, III and V compounds of group, II and VI compounds of group and is made up of III-V compounds of group and II-VI compounds of group.
22. according to the cantilever type impulse generator described in claim 16-19 any one, it is characterized in that, described the first frictional layer or the second frictional layer are selected from electric conducting material; And/or described the 3rd frictional layer or the 4th frictional layer are selected from electric conducting material.
23. cantilever type impulse generators according to claim 22, is characterized in that, described electric conducting material is selected from metal, alloy or conductive oxide, and wherein, described metal is selected from gold, silver, platinum, aluminium, nickel, copper, titanium, chromium or selenium; Described alloy is selected from alloy, stainless steel, the beallon that gold, silver, platinum, aluminium, nickel, copper, titanium, chromium or selenium form.
24. according to the cantilever type impulse generator described in claim 1-23 any one, it is characterized in that, the lower surface of described the first frictional layer, the upper surface of the second frictional layer, the lower surface of the 3rd frictional layer and/or the upper surface of the 4th frictional layer have micron or the micro-structural of inferior micron dimension or interspersing or coating of nano material; Described micro-structural is selected from nano wire, nanotube, nano particle, nanometer channel, micron groove, nanocone, micron cone, nanosphere and micron chondritic.
25. according to the cantilever type impulse generator described in claim 1-24 any one, it is characterized in that, described the first frictional layer and the 4th frictional layer are selected from dimethyl silicone polymer, and described the second frictional layer and the 3rd frictional layer are selected from beallon.
26. according to the cantilever type impulse generator described in claim 1-25 any one, it is characterized in that, described external force is external periodic force, and the frequency of described external periodic force approaches the resonance frequency of described generator.
27. according to the cantilever type impulse generator described in claim 1-26 any one, it is characterized in that, described generator connects the resistance value of load in megaohm magnitude.
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