CN103011124A - Preparation method of carbon nano tube composite film - Google Patents
Preparation method of carbon nano tube composite film Download PDFInfo
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- CN103011124A CN103011124A CN2012103510045A CN201210351004A CN103011124A CN 103011124 A CN103011124 A CN 103011124A CN 2012103510045 A CN2012103510045 A CN 2012103510045A CN 201210351004 A CN201210351004 A CN 201210351004A CN 103011124 A CN103011124 A CN 103011124A
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Abstract
The invention relates to a preparation method of a carbon nano tube composite film, which comprises the following steps of: providing a carbon nano tube film, wherein the carbon nano tube film comprises a plurality of carbon nano tubes parallel to the surface of the carbon nano tube film; and forming a conductive material on the surface of the carbon nano tube film.
Description
Technical field
The present invention relates to a kind of preparation method of composite membrane, relate in particular to a kind of preparation method of carbon nano-tube compound film.
Background technology
Since the early 1990s, the nano material take carbon nanotube as representative has caused that with its unique structure and character people pay close attention to greatly.In recent years, along with deepening continuously of carbon nanotube and nano materials research, its wide application prospect constantly displayed.For example, because performances such as the electromagnetism of the uniqueness that carbon nanotube has, optics, mechanics, chemistry, a large amount of relevant its applied researcies in fields such as field emitting electronic source, sensor, novel optical material, soft ferromagnetic materials constantly are in the news.
Especially, compound mutual supplement with each other's advantages or the reinforcement that can realize material of carbon nanotube and other materials such as metal, semi-conductor or polymkeric substance etc.Carbon nanotube has larger length-to-diameter ratio and the structure of hollow, has excellent mechanical property, can be used as a kind of super fiber, and matrix material is played enhancement.In addition, carbon nanotube has excellent heat conductivility, utilizes the heat conductivility of carbon nanotube to make this matrix material have good heat conductivity.Yet carbon nanotube is except having excellent heat conductivility, and it also has good conductivity, so the formed matrix materials such as carbon nanotube and other materials such as metal, semi-conductor or polymkeric substance also have excellent conductivity.
The preparation method of carbon nano tube compound material has situ aggregation method, solution blended process and melt blended method usually.Carbon nano-tube compound film is a kind of important form of carbon nano tube compound material practical application.Carbon nano-tube compound film generally gets rid of the method for being coated with, pyrolysis of carbonaceous material method or liquid-phase chemistry deposition technique and forms by silk screen print method, rotation.Formed carbon nano-tube compound film has advantages of that compactness is good and uniformly dispersed good.
Yet the preparation method of existing carbon nano-tube compound film is comparatively complicated, and carbon nanotube is to be randomly dispersed in the carbon nano-tube compound film along all directions.Carbon nanotube disperses inhomogeneously in carbon nano-tube compound film like this, causes electric property that affects carbon nano-tube compound film etc.By the carbon nano-tube compound film that carbon nanotube is carried out prepare after the chemical modification, see also " Surface Resistivity and Rheological Behaviors of Carboxylated Multiwall Carbon Nanotube-filled PET Composite Film ", Dae Ho Shin, Journal of Applied Polymer Science, V 99n3, p900-904 (2006)), although electric property increases, but owing to will under the condition of heating, carry out, thereby limited type with the compound material of carbon nanotube.
Summary of the invention
In view of this, the necessary a kind of carbon nano-tube compound film and preparation method thereof that provides, prepared carbon nano-tube compound film has good conductivity, and this preparation method simple, be easy to large-scale production.
A kind of preparation method of carbon nano-tube compound film may further comprise the steps: a carbon nano-tube film is provided, and this carbon nano-tube film comprises a plurality of its surperficial carbon nanotubes that are parallel to; And the formation electro-conductive material is attached to described carbon nano-tube film surface.
A kind of preparation method of carbon nano-tube compound film may further comprise the steps: a carbon nano-tube film is provided, and this carbon nano-tube film comprises a plurality of carbon nanotubes, and is gapped between the adjacent carbon nanotube, and this carbon nano-tube film has self supporting structure; And the formation electro-conductive material is attached to described carbon nano-tube film surface.
Compared with prior art, described carbon nano-tube compound film is attached to described carbon nano-tube film surface by direct formation electro-conductive material and prepares, and the preparation method is simple, be easy to large-scale production.In addition, described carbon nano-tube compound film comprises that electro-conductive material is attached to described carbon nano-tube film surface, therefore described carbon nano-tube compound film has preferably conductivity.Because the method for described formation carbon nano-tube compound film does not need heating, therefore the scope of material that can be compound with carbon nano-tube film among the present invention is wider.
Description of drawings
Fig. 1 is the structural representation of embodiment of the invention carbon nano-tube compound film.
Fig. 2 is the structural representation of single-root carbon nano-tube in the embodiment of the invention carbon nano-tube compound film.
Fig. 3 is the preparation method's of embodiment of the invention carbon nano-tube compound film schema.
Fig. 4 is the preparation facilities structural representation of embodiment of the invention carbon nano-tube compound film.
Fig. 5 is the stereoscan photograph of the carbon nano-tube film of the embodiment of the invention.
Fig. 6 is the stereoscan photograph of embodiment of the invention carbon nano-tube compound film.
Fig. 7 is the transmission electron microscope photo of carbon nanotube in the embodiment of the invention carbon nano-tube compound film.
Embodiment
Describe structure of embodiment of the invention carbon nano-tube compound film and preparation method thereof in detail below with reference to accompanying drawing.
The embodiment of the invention provides a kind of carbon nano-tube compound film, and this carbon nano-tube compound film is made of carbon nanotube and electro-conductive material.See also Fig. 1, this carbon nanotube 111 is parallel to carbon nano-tube compound film 100 surface alignments, and described electro-conductive material is coated on described carbon nanotube 111 surfaces.Particularly, this carbon nano-tube compound film 100 comprises a plurality of carbon nanotubes 111, and these a plurality of carbon nanotubes 111 form the carbon nano-tube film of a self-supporting.And each carbon nanotube 111 surface all coats at least layer of conductive material.In this carbon nano-tube compound film 100, carbon nanotube 111 is arranged of preferred orient along same direction.Particularly, in this carbon nano-tube compound film 100, each carbon nanotube 111 has length about equally, and joins end to end by Van der Waals force.
So-called " self-supporting " i.e. this carbon nano-tube film need not by a support body supports, also can keep self specific shape.The carbon nano-tube film of this self-supporting comprises a plurality of carbon nanotubes, and these a plurality of carbon nanotubes attract each other and join end to end by Van der Waals force, thereby makes carbon nano-tube film have specific shape.
Please be simultaneously referring to Fig. 2, each root carbon nanotube 111 surface all coats at least layer of conductive material in this carbon nano-tube compound film 100.Particularly, this at least layer of conductive material can comprise with carbon nanotube 111 surface directly combinations wetting layer 112, be arranged on the outer transition layer 113 of wetting layer, be arranged on the outer conductive layer 114 of transition layer 113 and be arranged on the outer anti oxidation layer 115 of conductive layer 114.
Because the wettability between carbon nanotube 111 and the most metals is bad, therefore, acting as of above-mentioned wetting layer 112 makes conductive layer 114 and carbon nanotube 111 better combinations.The material that forms this wetting layer 112 can be the good metal of iron, cobalt, nickel, palladium or titanium etc. and carbon nanotube 111 wettabilitys or their alloy, and the thickness of this wetting layer 112 is 1 ~ 10 nanometer (nm).In the present embodiment, the material of this wetting layer 112 is nickel, and thickness is about 2 nanometers.Be appreciated that this wetting layer 112 is optional structure.
Acting as of above-mentioned transition layer 113 makes wetting layer 112 and conductive layer 114 better combinations.Form this transition layer 113 material can for the equal better material of combination of wetting layer 112 materials and conductive layer 114 materials, the thickness of this transition layer 113 is 1 ~ 10 nanometer.In the present embodiment, the material of this transition layer 113 is copper, and thickness is 2 nanometers.Be appreciated that this transition layer 113 is optional structure.
Acting as of above-mentioned conductive layer 114 makes carbon nano-tube compound film 100 have preferably conductivity.The material that forms this conductive layer 114 can be metal or its alloy of copper, silver or the good conductivity such as golden, and the thickness of this conductive layer 114 is 1 ~ 20 nanometer.In the present embodiment, the material of this conductive layer 114 is silver, and thickness is about 10 nanometers.
Acting as of above-mentioned anti oxidation layer 115 prevents that conductive layer 114 is oxidized in air in the manufacturing processed of carbon nano-tube compound film 100, thereby the conductivity of carbon nano-tube compound film 100 is descended.The material that forms this anti oxidation layer 115 can be difficult for the stable metal of oxidation or their alloy for gold or platinum etc. in air, the thickness of this anti oxidation layer 115 is 1 ~ 10 nanometer.In the present embodiment, the material of this anti oxidation layer 115 is platinum, and thickness is 2 nanometers.Be appreciated that this anti oxidation layer 115 is optional structure.
Further, for improving the intensity of carbon nano-tube compound film 100, a strengthening layer 116 can be set further outside described at least layer of conductive material.The material that forms this strengthening layer 116 can be polyvinyl alcohol (PVA), polyhenylene benzo dioxazole (PBO), polyethylene (PE) or the higher polymkeric substance of polyvinyl chloride (PVC) equal strength, and the thickness of this strengthening layer 116 is 0.1 ~ 1 micron.In the present embodiment, the material of this strengthening layer 116 is polyvinyl alcohol (PVA), and thickness is 0.5 micron.Be appreciated that this strengthening layer 116 is optional structure.
See also Fig. 3 and Fig. 4, the preparation method of carbon nano-tube compound film 222 mainly may further comprise the steps in the embodiment of the invention:
Step 1 a: carbon nano-tube film 214 is provided.
Described carbon nano-tube film 214 comprises a plurality of carbon nanotubes, and is gapped between the adjacent carbon nanotube, and this carbon nanotube is parallel to the surface of described carbon nano-tube film 214.Distance between the described adjacent carbon nanotube can be greater than the diameter of carbon nanotube.Described carbon nano-tube film 214 can have self supporting structure.
The preparation method of described carbon nano-tube film 214 can may further comprise the steps:
At first, provide a carbon nano pipe array 216, preferably, this array is super in-line arrangement carbon nano pipe array.
The carbon nano pipe array 216 that the embodiment of the invention provides is one or more in single-wall carbon nanotube array, double-walled carbon nano-tube array and the array of multi-walled carbon nanotubes.In the present embodiment, the preparation method of being somebody's turn to do super in-line arrangement carbon nano pipe array adopts chemical Vapor deposition process, its concrete steps comprise: a smooth substrate (a) is provided, this substrate can be selected P type or N-type silicon base, or select the silicon base that is formed with zone of oxidation, the present embodiment to be preferably and adopt 4 inches silicon base; (b) evenly form a catalyst layer at substrate surface, this catalyst layer material can be selected one of alloy of iron (Fe), cobalt (Co), nickel (Ni) or its arbitrary combination; (c) the above-mentioned substrate that is formed with catalyst layer was annealed in the air of 700 ~ 900 ° of C approximately 30 minutes ~ 90 minutes; (d) substrate that will process places Reaktionsofen, is heated to 500 ~ 740 ° of C under the shielding gas environment, then passes into carbon-source gas and reacts approximately 5 ~ 30 minutes, and growth obtains super in-line arrangement carbon nano pipe array, and it highly is 200 ~ 400 microns.Should super in-line arrangement carbon nano-pipe array classify as a plurality of parallel to each other and perpendicular to the pure nano-carbon tube array of the carbon nanotube formation of substrate grown.By above-mentioned control growth conditions, substantially do not contain impurity in this super in-line arrangement carbon nano pipe array, such as agraphitic carbon or residual catalyst metal particles etc.The carbon nanotube that is somebody's turn to do in the super in-line arrangement carbon nano pipe array forms array by the Van der Waals force close contact each other.Be somebody's turn to do super in-line arrangement carbon nano pipe array and above-mentioned area of base basic identical.
Carbon source gas can be selected the more active hydrocarbon polymers of chemical property such as acetylene, ethene, methane in the present embodiment, and the preferred carbon source gas of the present embodiment is acetylene; Shielding gas is nitrogen or rare gas element, and the preferred shielding gas of the present embodiment is argon gas.
Secondly, adopt a stretching tool from described carbon nano pipe array 216, to pull and obtain a carbon nano-tube film 214.
The preparation method of described carbon nano-tube film 214 may further comprise the steps: adopt a stretching tool to pull from carbon nano pipe array 216 and obtain a carbon nano-tube film 214.It specifically may further comprise the steps: (a) from a carbon nano pipe array 216 selected one or have a plurality of carbon nanotubes of certain width, the present embodiment is preferably and adopts adhesive tape, tweezers or clip contact carbon nano pipe array 216 with certain width with selected one or have a plurality of carbon nanotubes of certain width; (b) with certain speed this selected carbon nanotube that stretches, thereby form end to end a plurality of carbon nanotube fragment, and then form a continuous carbon nano-tube film 214.This pulls direction along the direction of growth that is basically perpendicular to carbon nano pipe array 216.
In above-mentioned drawing process, when these a plurality of carbon nanotube fragments break away from substrate gradually along draw direction under the pulling force effect, because van der Waals interaction, should selected a plurality of carbon nanotube fragments be drawn out continuously end to end with other carbon nanotube fragment respectively, thereby form one continuously, evenly and have a carbon nano-tube film 214 of certain width.This carbon nano-tube film 214 comprises a plurality of end to end carbon nanotubes, and this carbon nanotube is arranged along draw direction substantially.See also Fig. 5, this carbon nano-tube film 214 comprises a plurality of carbon nanotubes that are arranged of preferred orient.Further, described carbon nano-tube film 214 comprises a plurality of carbon nanotube fragments that join end to end and align, and carbon nanotube fragment two ends interconnect by Van der Waals force.This carbon nanotube fragment comprises a plurality of carbon nanotubes that are arranged parallel to each other.The thickness of described carbon nano-tube film 214 is about 0.5 nanometer ~ 100 micron.The width of selected a plurality of carbon nanotubes is relevant in the size of the length of described carbon nano-tube film and width and this carbon nano pipe array 216 and the step (a), the width maximum of described carbon nano-tube film is no more than the diameter of this carbon nano pipe array 216, and the length of described carbon nano-tube film can reach more than 100 meters.Directly the carbon nano-tube film 214 of the preferred orientation of stretching acquisition has better homogeneity and conductivity than unordered carbon nano-tube film.Should directly stretch simultaneously and obtain the method Simple fast of carbon nano-tube film 214, the suitable industrial applications of carrying out.
Step 2: form electro-conductive material and be attached to described carbon nano-tube film 214 surfaces.
The method that described formation electro-conductive material is attached to described carbon nano-tube film 214 surfaces can adopt physical method, and (PVD) comprises vacuum evaporation or ion sputtering etc. such as physical vaporous deposition, also can adopt chemical process, such as plating or electroless plating etc.Preferably, the vacuum vapour deposition in the present embodiment employing physical method forms described electro-conductive material and is attached to described carbon nano-tube film 214 surfaces.
The method that described employing vacuum vapour deposition formation electro-conductive material is attached to described carbon nano-tube film 214 surfaces may further comprise the steps: at first, one vacuum vessel 210 is provided, this vacuum vessel 210 has between a sedimentary province, at least one evaporation source 212 is placed respectively at bottom and top between this sedimentary province, successively along the draw direction setting of carbon nano-tube film 214, and each evaporation source 212 all can be by a heating unit (not shown) heating by the sequencing that forms electro-conductive material for this at least one evaporation source 212.Above-mentioned carbon nano-tube film 214 is arranged at up and down in the middle of the evaporation source 212 and keeps at a certain distance away, and wherein carbon nano-tube film 214 arranges over against evaporation source 212 up and down.This vacuum vessel 210 can be bled by an external vacuum pump (not shown) and be reached predetermined vacuum tightness.Described evaporation source 212 materials are electro-conductive material to be deposited.Secondly, by heating described evaporation source 212, make after its melting evaporation or distillation form electro-conductive material steam, after this electro-conductive material steam runs into cold carbon nano-tube film 214, in the cohesion of carbon nano-tube film 214 upper and lower surfaces, form electro-conductive material and be attached to described carbon nano-tube film 214 surfaces.Because there is the gap between the carbon nanotube in the carbon nano-tube film 214, and carbon nano-tube film 214 thinner thicknesses, electro-conductive material can penetrate among the described carbon nano-tube film 214, thereby is deposited on every carbon nano tube surface.The microtexture photo of the carbon nano-tube compound film 222 after the deposits conductive material sees also Fig. 6 and Fig. 7.
Be appreciated that by regulating carbon nano-tube film 214 and the distance of each evaporation source 212 and the distance between the evaporation source 212, can make each evaporation source 212 have a sedimentary province.When needs deposit multilayer electro-conductive material, a plurality of evaporation sources 212 can be heated simultaneously, make the continuously sedimentary provinces by a plurality of evaporation sources of described carbon nano-tube film 214, and then form described electro-conductive material and be attached to described carbon nano-tube film 214 surfaces.Therefore this vacuum vessel 210 can be realized carbon nano tube surface and have at least continuous production of the carbon nano-tube film 214 of layer of conductive material.
For improving the electro-conductive material vapour density and preventing that electro-conductive material is oxidized, vacuum vessel 210 interior vacuum tightnesss should reach more than 1 handkerchief (Pa).In the embodiment of the invention, the vacuum tightness in the described vacuum vessel is 4 * 10
-4Pa.
Be appreciated that also and the carbon nano pipe array 216 in the step 1 directly can be put into above-mentioned vacuum vessel 210.At first, in vacuum vessel 210, adopt a stretching tool from described carbon nano pipe array 216, to pull the carbon nano-tube film 214 that obtains certain width.Then, heat above-mentioned at least one evaporation source 212, deposit at least layer of conductive material in described carbon nano-tube film 214 surfaces.Constantly from described carbon nano pipe array 216, pull carbon nano-tube film 214 with certain speed, and make described carbon nano-tube film 214 pass through continuously the sedimentary province of above-mentioned evaporation source 212, and then realize the continuous production of carbon nano-tube compound film 222.
The step that described employing vacuum vapour deposition forms electro-conductive material can specifically may further comprise the steps: form one deck wetting layer in described carbon nano-tube film 214 surfaces; Form one deck transition layer in the outside surface of described wetting layer; Form one deck conductive layer in the outside surface of described transition layer; Form one deck anti oxidation layer in the outside surface of described conductive layer.Wherein, the step of above-mentioned formation wetting layer, transition layer and anti oxidation layer is selectable step.Particularly, above-mentioned carbon nano-tube film 214 can be passed through continuously the sedimentary province of the formed evaporation source of above-mentioned layers of material.In the embodiment of the invention, the step that described employing vacuum vapour deposition forms electro-conductive material can specifically may further comprise the steps: form one deck wetting layer in described carbon nano-tube film 214 surfaces; And form one deck conductive layer in the outside surface of described transition layer.
In addition, forming described electro-conductive material after the surface of described carbon nano-tube film 214, can further be included in the step that described electro-conductive material outside surface forms strengthening layer.Particularly, the step of described formation strengthening layer specifically may further comprise the steps: the carbon nano-tube film 214 that will be formed with electro-conductive material is by a device 220 that polymers soln is housed, make polymers soln infiltrate whole carbon nano-tube film 214, this polymers soln adheres to the outside surface of described electro-conductive material by Intermolecular Forces; And cure polymer solution, form a strengthening layer.
Prepared carbon nano-tube compound film 222 can further be collected on the reel 224.Collection mode is for to be wrapped in carbon nano-tube compound film 222 on the described reel 260.
Selectively, the formation step of the formation step of above-mentioned carbon nano-tube film 214, the formation step of electro-conductive material and strengthening layer all can be carried out in above-mentioned vacuum vessel, and then realizes the continuous production of carbon nano-tube compound film 222.
Selectively, for increasing the light transmission rate of the carbon nano-tube compound film 222 that obtains, after pulling acquisition one carbon nano-tube film 214 and before the carbon nano tube surface of carbon nano-tube film 214 forms electro-conductive materials, can comprise further that a pair of carbon nano-tube film 214 carries out the step of laser attenuate.In the present embodiment, can adopt wavelength is the infrared laser of 1064 nanometers, and the peak power output of laser is 20 milliwatts, sweep velocity is 10 millimeters per seconds, simultaneously, damage carbon nano-tube film fully for the energy of lasers of avoiding focusing on is too high, removed the focusing unit of laser apparatus.The laser that is radiated on the carbon nano-tube film is the circular light spot of dispersing, and diameter is about 3 millimeters.Table 1 is for before the laser treatment and process the composite membrane 222 that obtains behind the rear different electro-conductive materials of evaporation and square resistance and the light transmission rate contrast table of pure nano-carbon tube film 214.Described light transmission rate refers to the transmitance of the light of 222 pairs of 550 nanometers of described carbon nano-tube compound film.
Table 1
| Numbering | Whether adopt laser treatment | Wetting layer metal species/thickness | Conductive layer metal species/thickness | Square resistance (Ω) | Light transmission rate (%) |
| 1 | Be untreated | -- | -- | 1684 | 85.2 |
| 2 | Be untreated | Ni/2nm | -- | 1656 | 79.0 |
| 3 | Be untreated | Ni/2nm | Au/3nm | 504 | 74.6 |
| 5 | Be untreated | Ni/2nm | Au/ |
216 | 72.5 |
| 6 | Process | Ni/2nm | Au/5nm | 2127 | 92.8 |
| 7 | Process | Ni/2nm | Au/10nm | 1173 | 92.7 |
| 8 | Process | Ni/2nm | Au/15nm | 495 | 90.7 |
| 9 | Process | Ni/2nm | Au/20nm | 208 | 89.7 |
Can find by above-mentioned table 1, the resistance that makes this carbon nano-tube compound film 222 by the carbon nano tube surface deposits conductive material at carbon nano-tube film 214 improves than the resistance of pure nano-carbon tube film 214, but the light transmission rate of this carbon nano-tube compound film 222 is along with the increase of electro-conductive material thickness descends to some extent, deposits conductive material forms carbon nano-tube compound film 222 again after adopting this carbon nano-tube film 214 of laser treatment, and the light transmission rate of this carbon nano-tube compound film 222 is improved.Through the great many of experiments test, the resistance of this carbon nano-tube compound film 222 is 50 Europe ~ 2000 Europe, and visible light transmissivity is 70%-95%.
In the present embodiment, the resistance of the carbon nano-tube film 214 before the deposits conductive material is not greater than about 1600 ohm, when the resistance of the carbon nano-tube compound film 222 that forms behind the deposits conductive material Ni/Au can be down to about 200 ohm, visible light transmissivity is 90%, reach preferably visible light transmissivity therefore formed carbon nano-tube compound film 222 has lower resistance, can be used as nesa coating.
Compared with prior art, carbon nano-tube compound film that the embodiment of the invention provides and preparation method thereof has the following advantages: one, comprise a plurality of carbon nanotubes that join end to end and be arranged of preferred orient by Van der Waals force in the carbon nano-tube compound film, thereby make carbon nano-tube compound film have better physical strength and toughness.They are two years old, every carbon nano tube surface all is formed with electro-conductive material in the carbon nano-tube compound film, has better electroconductibility than unordered carbon nano-tube compound film of the prior art, in addition, this carbon nano-tube compound film also has preferably visible light transmissivity, therefore can be used as nesa coating.Its three, owing to carbon nano-tube compound film is directly to pull to make from carbon nano pipe array, the method is simple, cost is lower.Its four, the step of described stretching carbon nano-tube film and deposits conductive material all can be carried out in a vacuum vessel, is conducive to the large-scale production of carbon nano-tube compound film.Its four do not need heating owing to forming the method for described carbon nano-tube compound film, therefore the scope of material that can be compound with carbon nano-tube film among the present invention is wider.
In addition, those skilled in the art also can do other and change in spirit of the present invention, and certainly these variations of doing according to spirit of the present invention all should be included in the present invention's scope required for protection.
Claims (17)
1. the preparation method of a carbon nano-tube compound film may further comprise the steps:
One carbon nano-tube film with self supporting structure is provided, and this carbon nano-tube film comprises a plurality of carbon nanotubes;
Form the surface that electro-conductive material is attached to the carbon nanotube in the described carbon nano-tube film.
2. the preparation method of carbon nano-tube compound film as claimed in claim 1 is characterized in that, the step of described formation electro-conductive material is attached to the surface of each carbon nanotube in the described carbon nano-tube film for forming electro-conductive material.
3. the preparation method of carbon nano-tube compound film as claimed in claim 1 is characterized in that, and is gapped between described a plurality of carbon nanotubes.
4. the preparation method of carbon nano-tube compound film as claimed in claim 1 is characterized in that, the step of described formation electro-conductive material comprises that formation one deck conductive layer is in the surface of described carbon nano-tube film.
5. the preparation method of carbon nano-tube compound film as claimed in claim 4 is characterized in that, the material of described conductive layer is gold and silver, copper or its alloy, and the thickness of this conductive layer is 1 ~ 20 nanometer.
6. the preparation method of carbon nano-tube compound film as claimed in claim 4, it is characterized in that, before the step of described formation conductive layer, the step of described formation electro-conductive material further comprises formation one deck wetting layer in the step on described carbon nano-tube film surface, and above-mentioned conductive layer is formed on the outside surface of described wetting layer.
7. the preparation method of carbon nano-tube compound film as claimed in claim 6 is characterized in that, the material of this wetting layer is iron, cobalt, nickel, palladium, titanium or their alloy, and the thickness of this wetting layer is 1 ~ 10 nanometer.
8. the preparation method of carbon nano-tube compound film as claimed in claim 6, it is characterized in that, before the step of described formation conductive layer, form after the step of wetting layer, the step of described formation electro-conductive material further comprises formation one deck transition layer in the outside surface of described wetting layer, and above-mentioned conductive layer is formed on the outside surface of described transition layer.
9. the preparation method of carbon nano-tube compound film as claimed in claim 6 is characterized in that, after the step of described formation conductive layer, the step of described formation electro-conductive material comprises that further formation one deck anti oxidation layer is in the outside surface of described conductive layer.
10. the preparation method of carbon nano-tube compound film as claimed in claim 1 is characterized in that, after described carbon nano-tube film surface, further is included in the step that described electro-conductive material outside surface forms strengthening layer at described formation electro-conductive material.
11. the preparation method of carbon nano-tube compound film as claimed in claim 10, it is characterized in that, the step of described formation strengthening layer specifically may further comprise the steps: the carbon nanotube structure that will be formed with electro-conductive material is by a device that polymers soln is housed, make polymers soln infiltrate whole carbon nanotube structure, this polymers soln adheres to the outside surface of described electro-conductive material by Intermolecular Forces; And cure polymer solution, form a strengthening layer.
12. the preparation method of carbon nano-tube compound film as claimed in claim 1 is characterized in that, before the formation electro-conductive material is attached to the surface of described carbon nanotube, further comprises the step of carbon nano-tube film being carried out the laser attenuate.
13. the preparation method of carbon nano-tube compound film as claimed in claim 1 is characterized in that, the method for described formation electro-conductive material comprise physical vaporous deposition, electroless plating and electroplate in a kind of.
14. the preparation method of carbon nano-tube compound film as claimed in claim 1 is characterized in that, the method for described formation electro-conductive material comprises vacuum vapour deposition or sputtering method.
15. the preparation method of carbon nano-tube compound film as claimed in claim 14 is characterized in that, the method for described formation electro-conductive material is vacuum vapour deposition, and it may further comprise the steps:
One vacuum vessel is provided, and this vacuum vessel has between a sedimentary province, and at least one evaporation source is placed respectively at bottom and top between this sedimentary province, and the material of described evaporation source is electro-conductive material to be deposited;
Above-mentioned carbon nano-tube film is set in the middle of evaporation source up and down and keeps at a certain distance away, carbon nano-tube film is over against up and down evaporation source setting; And
Heat described evaporation source, make after its melting evaporation or distillation form electro-conductive material steam, after this electro-conductive material steam runs into cold carbon nano-tube film, in the cohesion of carbon nano-tube film upper and lower surface, form electro-conductive material and be attached to described carbon nano-tube film surface.
16. the preparation method of carbon nano-tube compound film as claimed in claim 1 is characterized in that, described have the carbon nano-tube film of self supporting structure for adopting a stretching tool to pull acquisition from carbon nano pipe array.
17. the preparation method of carbon nano-tube compound film as claimed in claim 1 is characterized in that, these a plurality of carbon are received and are parallel to this carbon nano-tube compound film surface alignment, and are arranged of preferred orient and join end to end by Van der Waals force along same direction.
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| CN106337215A (en) * | 2016-06-06 | 2017-01-18 | 中国科学院苏州纳米技术与纳米仿生研究所 | Carbon nanotube composite fiber and production method thereof |
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| CN110337234A (en) * | 2019-07-09 | 2019-10-15 | 中国科学院苏州纳米技术与纳米仿生研究所 | A kind of wet-heat resisting electromagnetic wave shield film, composite material, preparation method and application |
| CN114639937A (en) * | 2022-03-10 | 2022-06-17 | 西安电子科技大学 | Ultrathin breathable flexible butterfly antenna with stretching and temperature sensing functions and preparation method thereof |
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| CN1484275A (en) * | 2002-09-16 | 2004-03-24 | �廪��ѧ | Filament and preparation method thereof |
| CN101003909A (en) * | 2006-12-21 | 2007-07-25 | 上海交通大学 | Electrochemical combined deposition method for preparing structure of composite membrane of Nano carbon tube - metal |
Cited By (8)
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| CN103395240A (en) * | 2013-08-14 | 2013-11-20 | 苏州捷迪纳米科技有限公司 | Method for preparing carbon composite nano-material and corresponding carbon composite nano-material |
| CN103395240B (en) * | 2013-08-14 | 2015-11-11 | 苏州捷迪纳米科技有限公司 | The preparation method of carbon nano-composite material and corresponding carbon nano-composite material |
| CN106337215A (en) * | 2016-06-06 | 2017-01-18 | 中国科学院苏州纳米技术与纳米仿生研究所 | Carbon nanotube composite fiber and production method thereof |
| CN109427983A (en) * | 2017-08-30 | 2019-03-05 | 清华大学 | Organic Light Emitting Diode |
| CN109979644A (en) * | 2019-03-26 | 2019-07-05 | 武汉华星光电半导体显示技术有限公司 | The preparation method and conductive film of conductive film |
| CN110337234A (en) * | 2019-07-09 | 2019-10-15 | 中国科学院苏州纳米技术与纳米仿生研究所 | A kind of wet-heat resisting electromagnetic wave shield film, composite material, preparation method and application |
| CN114639937A (en) * | 2022-03-10 | 2022-06-17 | 西安电子科技大学 | Ultrathin breathable flexible butterfly antenna with stretching and temperature sensing functions and preparation method thereof |
| CN114639937B (en) * | 2022-03-10 | 2023-02-21 | 西安电子科技大学 | Ultrathin breathable flexible butterfly antenna with stretching and temperature sensing functions and preparation method thereof |
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| CN103011124B (en) | 2016-03-30 |
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