CN102021551B - Method for preparing single-layer high-activity titanium dioxide thin film - Google Patents

Method for preparing single-layer high-activity titanium dioxide thin film Download PDF

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CN102021551B
CN102021551B CN2009101875654A CN200910187565A CN102021551B CN 102021551 B CN102021551 B CN 102021551B CN 2009101875654 A CN2009101875654 A CN 2009101875654A CN 200910187565 A CN200910187565 A CN 200910187565A CN 102021551 B CN102021551 B CN 102021551B
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titanium
titanium dioxide
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individual layer
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CN102021551A (en
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成会明
王学文
刘岗
潘剑
李峰
逯高清
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Institute of Metal Research of CAS
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Abstract

The invention relates to a preparation method for forming single-layer high-activity (001) crystal surface dominating titanium dioxide thin films on different substrates, in particular to the method for growing the (001) crystal surface dominating titanium dioxide thin film consisting of single-layer titanium dioxide particles on a metallic titanium or titanium alloy substrate by a wet chemical process, which solves the problems that (001) dominating titanium dioxide powder difficultly forms a (001) plane totally positioned on a surface and that a compact thin film is difficult to form. In the method, the substrate is placed into a reaction kettle containing the aqueous solution of hydrofluoric acid, and heating treatment is performed at 100 to 200 DEG C for 6 to 24 h to obtain the single-layer (001) crystal surface dominating titanium dioxide thin film. The single-layer (001) crystal surface dominating titanium dioxide thin film consists of anatase and rutile in the radio of 95:5 to 80:20, has the thickness of 10 to 1,000 nm, the controllable (001) crystal surface ratio of 20 to 91 percent and high photoelectrochemical decomposition of water, and is expected to be widely and effectively applied to photocatalytic devices.

Description

A kind of preparation method of individual layer high-activity titanium dioxide film
Technical field
The present invention relates on different matrix to form the preparation method of the titanium deoxid film that individual layer high reactivity (001) crystal face is dominant, be specially kind at titanium alloy-based the end through wet-chemical process the be dominant method of titanium deoxid film of (001) crystal face of forming by the individual layer titanium dioxide granule of growing at metal titanium or.
Background technology
Find that from Fujishima in 1972 titanium oxide can produce the phenomenon of hydrogen at water of decomposition under the light action, the semiconductor compound that titanium oxide and other can be used for photocatalytic hydrogen production by water decomposition has caused to be paid close attention to and deep research widely.Titanium oxide is because nontoxic environmentally friendly and low price; Except being applied to photochemical catalyzing; Also be widely used in fields such as photodegradation, dye sensitization solar battery, photoelectrochemistry, biological chemistry and automatically cleaning, but optically catalytic TiO 2 efficient still can not satisfy the needs of application.People constantly carry out modification through methods such as doping, finishing, morphology control to titanium oxide, thereby further improve the photocatalysis efficiency of titanium oxide.
Because light-catalyzed reaction is mainly carried out on the surface of catalyzer, and surface atom arrangement difference causes the catalytic activity of titanium oxide to depend on the surface atom composition.Theoretical investigation finds that titanium oxide (001) crystal face has higher catalytic activity than other crystal face.How can prepare titanium oxide that (001) crystal face is dominant becomes the emphasis of research, has reported with TiF recently 4For presoma prepares the titanium dioxide crystal that (001) crystal face is dominant; But the titanium oxide that (001) crystal face of this method preparation is dominant is that powder and particle size are greater than 1 μ m; Therefore this (001) titania powder of being dominant is difficult to be made into fine and close and firm film, effectively uses at aspects such as optoelectronic pole, dye sensitization solar battery, self-cleaning surfaces thereby limited it.Therefore; Be grown directly upon on the titanium matrix like the titanium oxide that (001) crystal face is dominant; Not only can solve titanium deoxid film and matrix bond problem, can more a high proportion of (001) crystal face be positioned at the surface simultaneously, thereby can more fully effectively utilize the excellent specific property of (001) crystal face.Simultaneously; (001) titanium deoxid film that is dominant of crystal face can be widely used in assembling optoelectronic pole and dye sensitization solar battery; And pass through at various material surfaces after metallize titanium or titanium alloy processing; Reaction forms the surface of the titanium deoxid film with (001) crystal face again, thereby can obtain having antibiotic and the self-cleaning function material.
Summary of the invention
The object of the present invention is to provide a kind of be dominant preparation method of titanium deoxid film of individual layer high reactivity (001) crystal face that on different matrix, forms; Prepared the titanium deoxid film that individual layer high reactivity (001) crystal face is dominant through effective design and use wet-chemical process; And it is assembled into optoelectronic pole; Show the excellent photoelectric chemistry and separated the water-based ability; Solving (001) titanium dioxide powder that is dominant is difficult to form (001) face and all is positioned at the surface and is difficult to form the fine and close problem that combines tight film; Thereby this film is expected extensively and effective application in photocatalytic device, the titanium deoxid film that is dominant like (001) crystal face can more effectively be applied to fields such as dye sensitization solar battery, optoelectronic pole and antibacterial surface and automatically cleaning.
Technical scheme of the present invention is:
The present invention provides the preparation method of a kind of individual layer high reactivity (001) crystal face titanium deoxid film, the surface is contained on the matrix of metal titanium or titanium alloy with absolute ethyl alcohol and deionized water ultrasonic cleaning final vacuum evaporate to dryness, obtains the presoma of surperficial non-oxidation layer.Precursor samples is put into the reaction kettle that the certain density diluted hydrofluoric acid aqueous solution is housed; After the reaction kettle sealing; Put into baking oven in the certain temperature heat treated regular hour; Take out response sample,, just can generate and form the titanium deoxid film that (001) crystal face is dominant by monolayer of particles at matrix surface with washed with de-ionized water and oven dry.Wherein, concrete being characterised in that:
1, the matrix of metal titanium or titanium alloy is contained on the surface, and can be the titanium sheet, scribble the layer of titanium metal matrix, various pattern titanium pieces and titanium alloy (like TiAl, TiZr or TiCr etc.), or the surface has metal titanium or titanium alloy substrate a kind of of 1~50 μ m thickness.
2, the reaction kettle material is a kind of of stainless steel, duraluminum, copper and tantalum, and inner bag is a kind of of tetrafluoroethylene and high density polyethylene(HDPE).
3, the concentration of hydrofluoric acid is 4~20mM.
4, in the presoma or in the sample, the ratio between the volume of the quality of metal titanium or titanium alloy substrate and the diluted hydrofluoric acid aqueous solution is 1g/100mL~1g/500mL.
5, Heating temperature is 100~200 ℃, and be 6h~24h heat-up time.
6, bake out temperature is 50~120 ℃.
7, the gained film is a titanium dioxide crystal; Film is made up of with rutile titanium oxide mutually anatase octahedrite; The crystalline phase ratio was from 95: 5 to 80: 20, and its thickness is that (be preferably 400~700nm), particle size is that 50~200nm (is preferably 100~180nm) to 10~1000nm.The crystal face ratio is controlled, (001) crystal face ratio 20~91% (being preferably 60~91%).
Advantage of the present invention and beneficial effect are:
1, the present invention is a kind of individual layer high reactivity (001) crystal face titanium deoxid film preparation method that on different matrix, forms; On can the matrix with the titanium oxide growth surface titaniferous of (001) crystal face or titanium alloy, obtaining the titanium deoxid film outermost layer be highly active (001) crystal face that helps light-catalyzed reaction.
2, the inventive method can form the titanium deoxid film that is dominant of (001) crystal face on the surface of any pattern titaniferous or titanium alloy substrate.
3, the inventive method forms on the film direct growth matrix, and titanium oxide and matrix bond are very firm, and light-catalyzed reaction generation excitation electron is passed on the titanium body easily derives, thereby helps strengthening the transfer efficiency of optical excitation electronics.
4, the titanium deoxid film of the inventive method acquisition is an individual layer, and whole film is made up of individual layer fern leaf crystal titanium oxide, and (001) face ratio is controlled, and film thickness is controlled.
Description of drawings
Fig. 1. the SEM of the titanium deoxid film of individual layer (001), TEM and HRTEM photo; Wherein, (a) figure is a bottom SEM photo; (b) figure is a film section S EM photo; (c) figure is the SEM photo of single particle; (d) figure is the particulate diffraction spot photo of film; (e) figure is a particulate HETEM photo.
Fig. 2. the titanium deoxid film of individual layer (001) surface and with the SEM photo of substrate contact surface.
Fig. 3. the XPS curve of the titanium deoxid film of individual layer (001).
Fig. 4. the XRD of the titanium deoxid film of individual layer (001) and Raman curve; Wherein, (a) figure is the XRD figure spectrum; (b) figure is the Raman collection of illustrative plates.
Fig. 5. the photoelectrochemical behaviour test of the titanium deoxid film of individual layer (001)
The SEM photo of the titanium deoxid film of the individual layer (001) of Fig. 6 .120 ℃ preparation.
The SEM photo of the titanium deoxid film of the individual layer (001) of Fig. 7 .12mM hydrofluoric acid solution preparation.
Embodiment
Specify the present invention below in conjunction with embodiment.
Embodiment 1
Absolute ethyl alcohol and deionized water be ultrasonic cleaning 0.25mm * 10mm * 30mm titanium sheet respectively, after 80 ℃ of vacuum drying treatment, obtains the clean titanium sheet of surperficial non-oxidation layer.Then, with clean titanium sheet insert the 10mM diluted hydrofluoric acid aqueous solution that 40mL is housed, be in the 80mL stainless steel cauldron of liner with the tetrafluoroethylene.After the reaction kettle sealing, put into baking oven, take out the titanium sheet that reacted,, obtain forming the titanium sheet of individual layer (001) crystal face titanium deoxid film on the surface with washed with de-ionized water and 80 ℃ of oven dry at 140 ℃ of heat treated 10h.
As shown in Figure 1, the exposure of the titanium deoxid film that forms on the titanium sheet is highly active (001) crystal face, and film is by detiform titanium dioxide crystal granulometric composition, and particle size is 130nm, and the percent crystallinity of film is high.The thickness of film is about 600nm, and the ratio of (001) crystal face reaches 83%.
As shown in Figure 2, the film cross section confirms that with the SEM picture of the part that film contacts with the base titanium deoxid film of preparation is an individual layer.
As shown in Figure 3, fluorion has vital role in the film formation of the titanium oxide that (001) crystal face is dominant.
As shown in Figure 4, XRD and Raman spectrum show that film is made up of anatase octahedrite and red schorl phase titanium dioxide, and the crystalline phase ratio of anatase octahedrite and rutile is 90: 10.
As shown in Figure 5, the titanium deoxid film of individual layer highly active (001) crystal face has high photoelectrochemistry water of decomposition ability.
Embodiment 2
Absolute ethyl alcohol and deionized water be ultrasonic cleaning 0.25mm * 10mm * 30mm titanium sheet respectively, after 80 ℃ of vacuum drying treatment, obtains the clean titanium sheet of surperficial non-oxidation layer.Then, with clean titanium sheet insert the 8mM diluted hydrofluoric acid aqueous solution that 40mL is housed, be in the 80mL stainless steel cauldron of liner with the tetrafluoroethylene.After the reaction kettle sealing, put into baking oven, take out the titanium sheet that reacted,, obtain forming the titanium sheet of individual layer (001) crystal face titanium deoxid film on the surface with washed with de-ionized water and 80 ℃ of oven dry at 120 ℃ of heat treated 10h.
As shown in Figure 6; Synthetic titanium oxide (001) crystal face film with this understanding, the gained film is a titanium dioxide crystal, the titanium dioxide crystal particulate is of a size of 300nm; Film is made up of with rutile titanium oxide mutually anatase octahedrite; The ratio of anatase octahedrite and rutile is 19: 1, and the ratio of (001) crystal face reaches 91%, and the thickness of film is about 500nm.
Embodiment 3
Absolute ethyl alcohol and deionized water be ultrasonic cleaning 0.2g titanium piece respectively, after 80 ℃ of vacuum drying treatment, obtains the clean titanium piece of surperficial non-oxidation layer.Then, with clean titanium piece insert the 15mM diluted hydrofluoric acid aqueous solution that 40mL is housed, be in the 80mL stainless steel cauldron of liner with the tetrafluoroethylene.After the reaction kettle sealing, put into baking oven, take out the titanium piece that reacted,, obtain forming the titanium piece of individual layer (001) crystal face titanium deoxid film on the surface with washed with de-ionized water and 100 ℃ of oven dry at 140 ℃ of heat treated 15h.
As shown in Figure 7; Synthetic titanium oxide (001) crystal face film with this understanding, the gained film is a titanium dioxide crystal, the titanium dioxide crystal particulate is of a size of 120nm; Film is made up of with rutile titanium oxide mutually anatase octahedrite; The ratio of anatase octahedrite and rutile is 10: 1, and the ratio of (001) crystal face reaches 20%, and the thickness of film is about 850nm.
Embodiment 4
Absolute ethyl alcohol and deionized water be ultrasonic cleaning 0.4g titanium piece respectively, after 80 ℃ of vacuum drying treatment, obtains the clean titanium piece of surperficial non-oxidation layer.Then, with clean titanium piece insert the 14mM diluted hydrofluoric acid aqueous solution that 80mL is housed, be in the 160mL stainless steel cauldron of liner with the tetrafluoroethylene.After the reaction kettle sealing, put into 120 ℃ of heat treated 8h of baking oven, take out the titanium piece that reacted,, obtain forming the titanium piece of individual layer (001) crystal face titanium deoxid film on the surface with washed with de-ionized water and 80 ℃ of oven dry.
Synthetic titanium oxide (001) crystal face film with this understanding; The gained film is a titanium dioxide crystal; The titanium dioxide crystal particulate is of a size of 140nm, and film is made up of with rutile titanium oxide mutually anatase octahedrite, and the ratio of anatase octahedrite and rutile is 10: 1; (001) ratio of crystal face reaches 75%, and the thickness of film is about 550nm.
Embodiment 5
Absolute ethyl alcohol and deionized water be ultrasonic cleaning 0.2g titanium-zirconium alloy (in the present embodiment, the weight ratio of titanium zirconium is 4: 1) piece respectively, after 80 ℃ of vacuum drying treatment, obtains the clean titanium-zirconium alloy piece of surperficial non-oxidation layer.Then, with clean titanium-zirconium alloy piece insert the 10mM diluted hydrofluoric acid aqueous solution that 40mL is housed, be in the 80mL stainless steel cauldron of liner with the tetrafluoroethylene.After the reaction kettle sealing, put into baking oven, take out the titanium-zirconium alloy piece that reacted,, obtain forming the titanium-zirconium alloy piece of the Zirconium doped titanium dioxide film of individual layer (001) crystal face on the surface with washed with de-ionized water and 80 ℃ of oven dry at 120 ℃ of heat treated 15h.
Synthetic titanium oxide (001) crystal face film with this understanding; The gained film is a titanium dioxide crystal; The titanium dioxide crystal particulate is of a size of 110nm, and film is made up of with rutile titanium oxide mutually anatase octahedrite, and the ratio of anatase octahedrite and rutile is 12: 1; (001) ratio of crystal face reaches 24%, and the thickness of film is about 750nm.
Embodiment 6
Absolute ethyl alcohol and deionized water be ultrasonic cleaning 0.2g titanium aluminum alloy (in the present embodiment, the weight ratio of titanium aluminium is 10: 1) piece respectively, after 80 ℃ of vacuum drying treatment, obtains the clean titanium aluminum alloy piece of surperficial non-oxidation layer.Then, with clean titanium aluminum alloy piece insert the 10mM diluted hydrofluoric acid aqueous solution that 40mL is housed, be in the 80mL stainless steel cauldron of liner with the tetrafluoroethylene.After the reaction kettle sealing, put into baking oven, take out the titanium aluminum alloy piece that reacted,, obtain forming the titanium aluminum alloy piece of the aluminum doped titanium dioxide film of individual layer (001) crystal face on the surface with washed with de-ionized water and 80 ℃ of oven dry at 120 ℃ of heat treated 15h.
Synthetic titanium oxide (001) crystal face film with this understanding; The gained film is a titanium dioxide crystal; Titanium dioxide crystal particulate size is about 150nm, and film is made up of with rutile titanium oxide mutually anatase octahedrite, and the ratio of anatase octahedrite and rutile is 9: 1; (001) ratio of crystal face reaches 35%, and the thickness of film is about 400nm.
Embodiment 7
Absolute ethyl alcohol and deionized water be ultrasonic cleaning 0.2g titanium chrome alloy (in the present embodiment, the weight ratio of titanium chromium is 9: 1) piece respectively, after 80 ℃ of vacuum drying treatment, obtains the clean titanium chrome alloy piece of surperficial non-oxidation layer.Then, with clean titanium chrome alloy piece insert the 10mM diluted hydrofluoric acid aqueous solution that 40mL is housed, be in the 80mL stainless steel cauldron of liner with the tetrafluoroethylene.After the reaction kettle sealing, put into baking oven, take out the titanium chrome alloy piece that reacted,, obtain forming the titanium chrome alloy piece of the chromium doped titanium dioxide film of individual layer (001) crystal face on the surface with washed with de-ionized water and 80 ℃ of oven dry at 120 ℃ of heat treated 15h.
Synthetic titanium oxide (001) crystal face film with this understanding; The gained film is a titanium dioxide crystal; Titanium dioxide crystal particulate size is about 100nm, and film is made up of with rutile titanium oxide mutually anatase octahedrite, and the ratio of anatase octahedrite and rutile is 10: 1; (001) ratio of crystal face reaches 27%, and the thickness of film is about 450nm.

Claims (7)

1. the preparation method of an individual layer high-activity titanium dioxide film is characterized in that: at first, the surface is contained on the matrix of metal titanium or titanium alloy with absolute ethyl alcohol and deionized water ultrasonic cleaning final vacuum evaporate to dryness, obtained the presoma of surperficial non-oxidation layer; Then, precursor samples is put into the reaction kettle that the diluted hydrofluoric acid aqueous solution is housed, after the reaction kettle sealing; Putting into baking oven for heating handles; Take out response sample,, form the titanium deoxid film that (001) crystal face is dominant by monolayer of particles in the matrix surface generation with washed with de-ionized water and oven dry.
2. according to the preparation method of the described individual layer high-activity titanium dioxide film of claim 1, it is characterized in that: the material of said reaction kettle is a kind of of stainless steel, duraluminum, copper and tantalum, and inner bag is a kind of of tetrafluoroethylene and high density polyethylene(HDPE).
3. according to the preparation method of the described individual layer high-activity titanium dioxide film of claim 1, it is characterized in that: in the said diluted hydrofluoric acid aqueous solution, the concentration of hydrofluoric acid is 4~20mM.
4. according to the preparation method of the described individual layer high-activity titanium dioxide film of claim 1, it is characterized in that: the ratio between the volume of the quality of metal titanium or titanium alloy substrate and the diluted hydrofluoric acid aqueous solution is 1g/100mL~1g/500mL.
5. according to the preparation method of the described individual layer high-activity titanium dioxide film of claim 1, it is characterized in that: said heat treated, Heating temperature are 100~200 ℃, and be 6h~24h heat-up time.
6. according to the preparation method of the described individual layer high-activity titanium dioxide film of claim 1, it is characterized in that: the oven dry after the said washed with de-ionized water, bake out temperature are 50~120 ℃.
7. according to the preparation method of the described individual layer high-activity titanium dioxide film of claim 1; It is characterized in that: the gained film is a titanium dioxide crystal; Film is made up of with rutile titanium oxide mutually anatase octahedrite; Ratio was from 95: 5 to 80: 20, and its thickness is 10~1000nm, and particle size is 50~200nm; The crystal face ratio is controlled, and (001) crystal face ratio is 20~91%.
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CN102407109A (en) * 2011-10-12 2012-04-11 西北有色金属研究院 Preparation method for TiO2 photochemical catalyst with visible-light-activity exposed crystal face
CN102515270A (en) * 2011-12-13 2012-06-27 武汉大学 Preparation method of mixed crystal-type nanoscale TiO2 having exposed (001) crystal faces
CN104190452A (en) * 2014-07-30 2014-12-10 中国矿业大学 Preparation method of silver phosphate/titanium dioxide composite membrane
CN108950532B (en) * 2017-11-17 2020-09-18 中国科学院深圳先进技术研究院 Preparation method of single crystal titanium dioxide film and evaporation frame for preparation
CN111647880B (en) * 2019-03-04 2022-09-02 中国科学院宁波材料技术与工程研究所 Method for growing titanium dioxide nanoparticles on surface of titanium or titanium alloy substrate
CN110655106B (en) * 2019-10-08 2022-04-05 浙江工业大学 Method for in-situ preparation of high-energy crystal face exposed titanium dioxide film

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CN101481137A (en) * 2008-12-16 2009-07-15 中国科学院电工研究所 TiO2 nano materials of multiple regular geometric shapes and preparation thereof
CN101508463A (en) * 2009-03-19 2009-08-19 浙江大学 Method for producing nano-wire array film of titanium dioxide

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Publication number Priority date Publication date Assignee Title
CN101481137A (en) * 2008-12-16 2009-07-15 中国科学院电工研究所 TiO2 nano materials of multiple regular geometric shapes and preparation thereof
CN101508463A (en) * 2009-03-19 2009-08-19 浙江大学 Method for producing nano-wire array film of titanium dioxide

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