CN101884530A - Flexible probe electrode used for recording electric signal of neural activity and implanting tool thereof - Google Patents
Flexible probe electrode used for recording electric signal of neural activity and implanting tool thereof Download PDFInfo
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- CN101884530A CN101884530A CN 201010231148 CN201010231148A CN101884530A CN 101884530 A CN101884530 A CN 101884530A CN 201010231148 CN201010231148 CN 201010231148 CN 201010231148 A CN201010231148 A CN 201010231148A CN 101884530 A CN101884530 A CN 101884530A
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Abstract
The invention discloses a flexible probe electrode used for recording an electric signal of a neural activity. The flexible probe electrode comprises a flexible substrate, electrode sites, metal wires, lead welding spots and flexible insulating layers, wherein both the electrode sites and the metal wire are arranged on the flexible substrate; each electrode site is connected to a corresponding lead welding spot through led metal wires; and the flexible insulating layers are arranged on the surfaces of the metal wires instead of being arranged at the electrode sites and the metal welding spots. The invention also discloses an implanting tool for inserting the flexible probe electrode into tissues. Through the implanting tool, the electrode has a high flexibility and biocompatibility and the tissue damage is reduced, so that the long-term working stability of the electrode is ensured, the problem that the own hardness of the flexible electrode cannot satisfy an inserted hardness is solved and the defects that the conventional probe electrodes can damage the tissues easily and the electric signal is instable for the long-term recording of the electrode are overcome.
Description
Technical field
The present invention relates to neurobiology, material science and microelectronics technical field, relate in particular to a kind of flexible stylet electrode that is used to write down the neural activity signal of telecommunication, and this flexible stylet electrode is thrust in-house implanting instrument.
Background technology
Electrode as the Primary Component that extracts the bioelectrical activity signal, is used for biological tissue is carried out the functional electric stimulation or the record biological activity signal of telecommunication, in many cases, electrode need be thrust in the biological tissue to reach the purpose of record.The electrode that is used to write down the neural activity signal of telecommunication at present all is based on the material that silicon, metal or glass etc. have certain intensity, and the electrode of these materials has the accuracy that good intensity and hardness can be thrust in the biological tissue easily and be guaranteed the thorn implantation site because of it.But the electrode that is in the high rigidity between the parenchima shows extreme difference aspect biocompatibility, can cause graft failure or probe electrode operational failure after a period of time.This is because the electrode that quilt is thrust, is placed on its neurocyte on every side of meeting damage in the organism for a long time because hardness is very high, makes its degeneration even death, makes the object of probe electrode forfeiture record, thereby causes graft failure.Even probe electrode was thrust in a very long time, neurocyte is not damaged fully, but owing to can cause the rejection of body after the long-term implantation of probe-type electrode, make and around it, can form one deck sheath shape fibrous layer tissue, influence the record effect of electrode, cause the electrode long term operation stability to be affected.And the mobile slight change that also can cause the electrode record position of organism, and the high rigidity of electrode can't make its distortion to adapt to this change, also can cause writing down the secular instability of the signal of telecommunication.
For the long-time stability of the signal of telecommunication of holding the record and not injured nerve tissue and cell, the present invention proposes a kind of flexible stylet electrode based on polymer substrate.Kind electrode since the polymeric material that adopts good biocompatibility as flexible substrate, can flexural deformation to adapt to the change of record position, therefore be not easy to cause neural cell injury, but because its hardness is very low, be not easy even can't be thrust in the softish biological tissue, the accuracy of more impossible assurance thorn implantation site.Therefore, on the basis of flexible stylet electrode, the present invention has proposed to help it to thrust the implanting instrument of tissue again.Both are in conjunction with can not only having kept the advantage of existing probe-type electrode but also remedied its deficiency.
Summary of the invention
(1) technical problem that will solve
In view of this, main purpose of the present invention is to provide a kind of flexible stylet electrode and implanting instrument thereof that is used to write down the neural activity signal of telecommunication, to guarantee the long-time stability of electrode work, solves flexible electrode self hardness and can't satisfy the problem of implanting hardness.
(2) technical scheme
For achieving the above object, the invention provides a kind of flexible stylet electrode that is used to write down the neural activity signal of telecommunication, comprise: flexible substrates, electrode site, metal connecting line, lead solder-joint and flexible insulating layer, wherein, electrode site and metal connecting line all are arranged on the flexible substrates, each electrode site is connected on the corresponding lead solder-joint by the metal connecting line of drawing, and there is flexible insulating layer on the metal connecting line surface, and electrode site and metal solder joint place do not have flexible insulating layer.
In the such scheme, described metal connecting line adopt can with biocompatible gold, platinum, titanium nitride or yttrium oxide.
In the such scheme, described flexible substrates and flexible insulating layer all adopt can with biocompatible polyimides or Parylene.
For achieving the above object, the present invention also provides a kind of implanting instrument, comprise the finishing of carrier and carrier, carrier is to adopt and to have the material of certain degree of hardness to form with bio-compatible, and the finishing of carrier adopts Polyethylene Glycol to be made.
In the such scheme, described making carrier can with bio-compatible and the material of certain degree of hardness is arranged be silicon or glass.
In the such scheme, the finishing of described carrier is to adopt at high temperature the Polyethylene Glycol of hot melt to be coated on the carrier to realize.
(3) beneficial effect
From technique scheme as can be seen, the present invention has following beneficial effect:
1, this flexible stylet electrode and the implanting instrument thereof that is used to write down the neural activity signal of telecommunication provided by the invention, polymeric material by adopting good biocompatibility is as the insulant of probe-type electrode, can make electrode have good flexibility and biocompatibility, reduce tissue injury, thereby guaranteed the long-time stability of electrode work; Adopt the material of hardness height and good biocompatibility to make implanting instrument, utilize the material Polyethylene Glycol (PEG) of good biocompatibility to make the two combination, make the flexible stylet electrode be penetrated into record position accurately easily, solved flexible electrode self hardness and can't satisfy the problem of implanting hardness.
2, the higher probe-type electrode based on silicon, tinsel or glass of the present invention and the hardness of present use is compared, both kept to be easy to accurately thrust the advantage of wanting record position, and improved existing probe-type electrode again and caused tissue injury and the unsettled deficiency of the electrode long record signal of telecommunication easily.
Description of drawings
Fig. 1 is the process chart of flexible stylet method for making its electrode among the present invention;
Fig. 2 does not cover the structural representation of layer insulating for flexible stylet electrode among the present invention;
Fig. 3 is the structural representation of the whole pattern of flexible stylet electrode among the present invention;
Fig. 4 is the process chart of carrier manufacture method among the present invention;
Fig. 5 is the structural representation of the whole pattern of carrier among the present invention;
Fig. 6 is that the embodiment of the invention is at the integrally-built structural representation in the mutually bonding back of Fig. 2 electrode and Fig. 4 carrier;
Fig. 7 thrusts biological intravital structural representation for the embodiment of the invention in Fig. 5 overall structure;
The structural representation that Fig. 8 extracts in the organism at Fig. 4 carrier for the embodiment of the invention.
The specific embodiment
For making the purpose, technical solutions and advantages of the present invention clearer, below in conjunction with specific embodiment, and with reference to accompanying drawing, the present invention is described in more detail.
This flexible stylet electrode that is used to write down the neural activity signal of telecommunication provided by the invention, comprise flexible substrates, electrode site, metal connecting line, lead solder-joint and flexible insulating layer, wherein, electrode site and metal connecting line all are arranged on the flexible substrates, each electrode site is connected on the corresponding lead solder-joint by the metal connecting line of drawing, there is flexible insulating layer on the metal connecting line surface, and electrode site and metal solder joint place do not have flexible insulating layer.Metal connecting line adopt can with materials such as biocompatible gold, platinum, titanium nitride or yttrium oxide.Flexible substrates and flexible insulating layer all adopt can with materials such as biocompatible polyimides or Parylene.
This flexible stylet electrode that is used to write down the neural activity signal of telecommunication provided by the invention can also be divided into three zones, i.e. a functional area, a line zone and a welding disking area.Wherein functional area comprises and can realize the electrode site that writes down the neural activity signal of telecommunication or stimulate, the line zone comprises can realize making functional area and welding disking area to form the corresponding one by one connecting line construction that is electrically connected, and welding disking area comprises can realize probe electrode and the metal pad structure that is electrically connected with the external equipment instrument.Electrode site in the functional area and the metal pad structure in the welding disking area all are that depositing metallic films forms on the flexible polymer substrate of good biocompatibility, and line zone between the two then is the sandwich structure of double team layer of metal film in a kind of two layers of polymers material.
This implanting instrument provided by the invention comprises the finishing of carrier and carrier, and carrier is to adopt and to have the material of certain degree of hardness to form with bio-compatible, is used to carry the flexible stylet electrode.The finishing of carrier adopts Polyethylene Glycol to be made, and is used to make flexible stylet electrode and carrier to bond together.That makes carrier can with bio-compatible and the material of certain degree of hardness is arranged be silicon or glass.The finishing of carrier is to adopt at high temperature the Polyethylene Glycol of hot melt to be coated on the carrier to realize.
It is liquid that PEG of the present invention has under the condition that is higher than 50 degree, can condense into solid under the room temperature, and condensing into solid PEG can be by the dissolved character of biological fluid.Therefore the PEG of hot melt is coated in the carrier zone, the flexible stylet electrode is attached together by hot melt PEG and carrier, they are placed under the room temperature, PEG condenses into solid, make flexible stylet electrode and carrier bond together to form one to have the very integral body of high rigidity, this integral body is easy to be thrust accurately the position that will write down in the nervous tissue.After this integral body is thrust biological tissue, being used for bonding flexible stylet electrode and carrier solid PEG runs into dissolvedly behind the biological fluid to fall, the flexible stylet electrode separates with carrier, at this moment, can pull away biological tissue to carrier, only stay the flexible stylet electrode and in biological tissue, be used for writing down the neural activity signal of telecommunication.When carrier pulls away biological tissue, can't make it depart from the thorn implantation site by related flexible stylet electrode, this be because, with polyimides substrate and silicon is example, polyimides substrate and silicon all are hydrophobic, and the PEG solution that dissolves in vivo is hydrophilic, because there is very strong adhesion at the effect two hydrophobic material interfaces of surface energy in aqueous solution, and hydrophobic material interface and water wetted material interface do not have adhesion in aqueous solution, are easy to be separated.
Embodiment 1
Below in conjunction with accompanying drawing is the preparation method that example further specifies the flexible stylet formula electrode that the present invention is based on polymeric substrates with the polyimide polymer
1, soak silicon chip 1 (5: 1) in the mixed liquor of concentrated sulphuric acid and hydrogen peroxide and boil, clean with a large amount of deionized water rinsings, dry up, baking the affected part after applying some drugs in 250 ° of baking ovens is removed silicon chip surface moisture.Evaporate the thick metallic aluminium 2 of 300nm as sacrifice layer, (shown in Fig. 1 (a)).
2, the spin-on polyimide photoresist 3, preceding baking, the Kapton of formation bottom, make the electrode pattern by lithography, method with ladder-elevating temperature is cured at last, obtains the bottom insulant that thick about 5 microns Kapton is used as microelectrode, (shown in Fig. 1 (b)).
3, use metal sputtering and band glue to peel off (lift-off) technology, form patterned titanium metallic film 4.This Ti/Au metal level 4 is in order to form the electrode points of electrode, the solder joint of connecting line and outside lead, (shown in Fig. 1 (c)).
4, on metal level 4, pass through whirl coating once more, the method of preceding baking forms upper strata Kapton 3, makes electrode pattern and electrode site and solder joint by lithography, final curing, obtain the upper strata insulant that thick about 5 microns Kapton is used as microelectrode, (shown in Fig. 1 (d)).
5, adopt the method for acid corrosion or electrochemical corrosion to erode Al sacrifice layer 2 quarter, electrode 10 is discharged, (shown in Fig. 1 (e)) from silicon chip 1.
Below in conjunction with accompanying drawing is the manufacture method that example further specifies carrier with silicon materials
1, prepares SOI substrate 7 and cleaning, (shown in Fig. 4 (a)).
2, spin coating photoresist makes carrier 11 patterns by lithography after the preceding baking, (shown in Fig. 4 (b)).
3, erode SiO in the SOI substrate 7 with HF
2Layer 6 discharges carrier 11, (shown in Fig. 4 (c)).
Further specify under the help of implanting instrument below in conjunction with accompanying drawing, the flexible stylet electrode thrusts the method in the biological tissue.
1, the PEG with hot melt is coated on the carrier 11, clamps flexible stylet electrode 10 with tweezers 9, it is placed on the carrier 11, and cooling then, PEG solidifies, and carrier 11, electrode 10 and solid PEG 8 form a hard integral body, (as shown in Figure 6) at this moment.
2, with tweezers 9 probe electrode 10 is thrust the position that will write down in the biological tissue 12, solid PEG 8 meets body fluid dissolving, (as shown in Figure 7).
3, carrier 11 usefulness tweezers 9 are extracted in body, only stayed flexible stylet electrode 10 in body 12, (as shown in Figure 8).
Utilize this method to have and accurately thrust record position easily, can not cause the advantages such as signal of telecommunication good reliability of tissue injury and long record.
Above-described specific embodiment; purpose of the present invention, technical scheme and beneficial effect are further described; institute is understood that; the above only is specific embodiments of the invention; be not limited to the present invention; within the spirit and principles in the present invention all, any modification of being made, be equal to replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (6)
1. flexible stylet electrode that is used to write down the neural activity signal of telecommunication, comprise: flexible substrates, electrode site, metal connecting line, lead solder-joint and flexible insulating layer, wherein, electrode site and metal connecting line all are arranged on the flexible substrates, each electrode site is connected on the corresponding lead solder-joint by the metal connecting line of drawing, there is flexible insulating layer on the metal connecting line surface, and electrode site and metal solder joint place do not have flexible insulating layer.
2. the flexible stylet electrode that is used to write down the neural activity signal of telecommunication according to claim 1 is characterized in that, described metal connecting line adopt can with biocompatible gold, platinum, titanium nitride or yttrium oxide.
3. the flexible stylet electrode that is used to write down the neural activity signal of telecommunication according to claim 1 is characterized in that, described flexible substrates and flexible insulating layer all adopt can with biocompatible polyimides or Parylene.
4. an implanting instrument comprises the finishing of carrier and carrier, and carrier is to adopt and to have the material of certain degree of hardness to form with bio-compatible, and the finishing of carrier adopts Polyethylene Glycol to be made.
5. implanting instrument according to claim 4 is characterized in that, described making carrier can with bio-compatible and the material of certain degree of hardness is arranged be silicon or glass.
6. implanting instrument according to claim 4 is characterized in that, the finishing of described carrier is to adopt at high temperature the Polyethylene Glycol of hot melt to be coated on the carrier to realize.
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| CN 201010231148 CN101884530A (en) | 2010-07-14 | 2010-07-14 | Flexible probe electrode used for recording electric signal of neural activity and implanting tool thereof |
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| CN 201010231148 CN101884530A (en) | 2010-07-14 | 2010-07-14 | Flexible probe electrode used for recording electric signal of neural activity and implanting tool thereof |
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